San Jose, California
United States
3
2007-05-15
3
2007-05-15
These are the the leading inventors for applications assigned to Novellus Systems:
Novellus Systems based in San Jose, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Deposition reactor with precursor recycle
#2 | 2006-05-09 ✅ Patent 7,043,148 granted on 2006-05-09Wafer heating using edge-on illumination
#3 | 2005-01-25 ✅ Patent 6,846,391 granted on 2005-01-25Process for depositing F-doped silica glass in high aspect ratio structures
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