Sunnyvale, California
United States
4
2007-04-24
The entities that hold a legal rights for patent applications filed by inventor Van Cleemput Patrick A.:
Patrick A. Van Cleemput from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of porogen removal from porous low-k films using UV radiation
#2 | 2005-10-04Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor
#3 | 2005-03-15Properties of a silica thin film produced by a rapid vapor deposition (RVD) process
#4 | 2005-01-25Process for depositing F-doped silica glass in high aspect ratio structures
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