47995 ⎘
Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
Sub-classes:DIVIDING METHOD
#2ENGINEERED SEMICONDUCTOR SUBSTRATE
#3Method for Producing a Layer of Solid Material
#4Wafer processing method including crushed layer and wafer processing apparatus
#5Method for producing a layer of solid material
#6Method for forming a crack in an edge region of a donor substrate
#7Hammer
#8METHOD OF SEGMENTING SUBSTRATE WITH METAL FILM
#9UV laser slicing of β-GaOby micro-crack generation and propagation
#10Wafer production method
#11Wafer processing method
#12LED wafer processing method
#13System and method of cleaving of buried defects
#14Combined wafer production method with laser treatment and temperature-induced stresses
#15Method for guiding a crack in the peripheral region of a donor substrate
#16Methods for separating bonded wafer structures
#17Method for forming a crack in the edge region of a donor substrate, using an inclined laser beam
#18Wafer processing method
#19Cleave systems, mountable cleave monitoring systems, and methods for separating bonded wafer structures
#20Method for guiding a crack in the peripheral region of a donor substrate
#21METHOD FOR SPLITTING CIRCLES
#22Combined wafer production method with laser treatment and temperature-induced stresses
#23SiC ingot slicing method
#24Method of forming a semiconductor die cutting tool
#25RECOVERY OF SILICON VALUE FROM KERF SILICON WASTE
#26SUBSTRATE-SPLITTING DEVICE WITH DETECTION OF OBSTACLES
#27LASER MACHINING DEVICE AND LASER MACHINING METHOD
#28Dicing methods
#29Processing method for a workpiece, dividing method for a workpiece, and laser processing apparatus
#30Semiconductor die singulation method
#31SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT CHIP
#32METHOD FOR PRODUCING SEMICONDUCTOR WAFER
#33Semiconductor die singulation method
#34Apparatus and method for splitting substrates