ClassID:

83815

B81B2201/01 - CPC Classification

Classification description:

Specific applications of microelectromechanical systems Switches

Sub-classes:
Recent Application in this class:
#1
20260077998
2026-03-19

Zero Power Micro-Chemomechanical Hydrogen Sensor

#2
20260035238
2026-02-05

DEVICE ENCAPSULATION USING PHYSICAL VAPOR DEPOSITION

#3
20250368502
2025-12-04

Electrical Measurement of MEMS Switch Beam Resonant Frequency

#4
20250243052
2025-07-31

Single MEMS Die Capable of Differential SPDT or General DPDT

#5
20250233327
2025-07-17

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

#6
20250091857
2025-03-20

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

#7
20250019224
2025-01-16

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

#8
20240405454
2024-12-05

Electrical contacts using an array of micromachined flexures

#9
20240359973
2024-10-31

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

#10
20240262678
2024-08-08

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE

#11
20240199411
2024-06-20

VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE

#12
20240038472
2024-02-01

MEMS RELAY WITH SAFETY FUNCTION

#13
20230101598
2023-03-30

Reduction of ringing and intermodulation distortion in a MEMS device

#14
20230082203
2023-03-16

Low voltage MEMS relay filled with alternative gas mixture to SF

#15
20220367339
2022-11-17

Wafer level stacked structures having integrated passive features

#16
20220276615
2022-09-01

Thermal metamaterial for low power MEMS thermal control

#17
20220227620
2022-07-21

System for protecting mems product under ESD event

#18
20210317868
2021-10-14

Actuator with buckling member stability

#19
20210125918
2021-04-29

Wafer level stacked structures having integrated passive features

#20
20200389149
2020-12-10

Microfabricated notch filter

#21
20200319251
2020-10-08

Signal detecting circuit and signal detecting method of micro switch

#22
20200189910
2020-06-18

Microelectromechanical system cavity packaging

#23
20200140265
2020-05-07

Fence structure to prevent stiction in a MEMS motion sensor

#24
20200024127
2020-01-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

#25
20200017356
2020-01-16

Planar cavity MEMS and related structures, methods of manufacture and design structures

#26
20200017355
2020-01-16

Planar cavity mems and related structures, methods of manufacture and design structures

#27
20190367356
2019-12-05

Microelectromechanical systems (MEMS) switching circuit and related apparatus

#28
20190318885
2019-10-17

Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices

#29
20190315619
2019-10-17

Planar cavity MEMS and related structures, methods of manufacture and design structures

#30
20190248644
2019-08-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

#31
20190233277
2019-08-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

#32
20190185320
2019-06-20

Microelectromechanical system cavity packaging

#33
20190169017
2019-06-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

#34
20190152767
2019-05-23

Planar cavity MEMS and related structures, methods of manufacture and design structures

#35
20190088435
2019-03-21

MEMS membrane with integrated transmission line

#36
20190062153
2019-02-28

Fence structure to prevent stiction in a MEMS motion sensor

#37
20180346318
2018-12-06

Planar cavity MEMS and related structures, methods of manufacture and design structures

#38
20180315572
2018-11-01

Current handling in legs and anchors of RF-switch

#39
20180257931
2018-09-13

Planar cavity MEMS and related structures, methods of manufacture and design structures

#40
20180244514
2018-08-30

Planar cavity MEMS and related structures, methods of manufacture and design structures

#41
20180197828
2018-07-12

Vanishing via for hardware IP protection from reverse engineering

#42
20180174851
2018-06-21

Thin film metal silicides and methods for formation

#43
20180144879
2018-05-24

Contact material for MEMS devices

#44
20180096812
2018-04-05

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

#45
20180072568
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

#46
20180072567
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

#47
20180072566
2018-03-15

Planar cavity MEMS and related structures, methods of manufacture and design structures

#48
20180057357
2018-03-01

Planar cavity MEMS and related structures, methods of manufacture and design structures

#49
20180050903
2018-02-22

Planar cavity MEMS and related structures, methods of manufacture and design structures

#50
20180033564
2018-02-01

Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices

#51
20180026160
2018-01-25

LED chip with integrated electromechanical switch

#52
20180009658
2018-01-11

Planar cavity MEMS and related structures, methods of manufacture and design structures

#53
20170247246
2017-08-31

MEMS component

#54
20170162355
2017-06-08

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

#55
20170134008
2017-05-11

Mixed-technology combination of programmable elements

#56
20170121170
2017-05-04

Planar cavity MEMS and related structures, methods of manufacture and design structures

#57
20170066645
2017-03-09

Refractory seed metal for electroplated MEMS structures

#58
20170022048
2017-01-26

Planar cavity MEMS and related structures, methods of manufacture and design structures

#59
20160329266
2016-11-10

Electronic power device with improved cooling

#60
20160325986
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

#61
20160325983
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

#62
20160325982
2016-11-10

Planar cavity MEMS and related structures, methods of manufacture and design structures

#63
20160244321
2016-08-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

#64
20160233097
2016-08-11

Thin film metal silicides and methods for formation

#65
20160207761
2016-07-21

NEMS devices with series ferroelectric negative capacitor

#66
20160207758
2016-07-21

Thin capping for MEMS devices

#67
20160099124
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

#68
20160096721
2016-04-07

Planar cavity MEMS and related structures, methods of manufacture and design structures

#69
20160083245
2016-03-24

Planar cavity MEMS and related structures, methods of manufacture and design structures

#70
20160060107
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

#71
20160060099
2016-03-03

Planar cavity MEMS and related structures, methods of manufacture and design structures

#72
20160055282
2016-02-25

Planar cavity MEMS and related structures, methods of manufacture and design structures

#73
20150183636
2015-07-02

Functional device, acceleration sensor, and switch

#74
20150180251
2015-06-25

Apparatus for wirelessly charging a rechargeable battery

#75
20150137068
2015-05-21

Junctionless nano-electro-mechanical resonant transistor

#76
20150090034
2015-04-02

Method of reducing gyroscope oscillator start-up time and device therefor

#77
20150069472
2015-03-12

Electromechanical switching device with 2D layered material surfaces

#78
20150048864
2015-02-19

Low consumption logic circuit with mechanical switches

#79
20150041932
2015-02-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

#80
20150008788
2015-01-08

Low temperature ceramic Microelectromechanical structures

#81
20140166463
2014-06-19

Planar cavity MEMS and related structures, methods of manufacture and design structures

#82
20130234265
2013-09-12

Planar cavity MEMS and related structures, methods of manufacture and design structures

#83
20120103768
2012-05-03

Magnetically actuated micro-electro-mechanical capacitor switches in laminate

#84
20110315527
2011-12-29

Planar cavity MEMS and related structures, methods of manufacture and design structures

#85
20110111545
2011-05-12

Low temperature ceramic microelectromechanical structures

#86
20080230357
2008-09-25

GOLD-METAL OXIDE THIN FILMS FOR WEAR-RESISTANT MICROELECTROMECHANICAL SYSTEMS ("MEMS")

#87
16354854
2020-01-14

Microelectromechanical systems-based logic gates