83815 ⎘
Specific applications of microelectromechanical systems Switches
Sub-classes:Zero Power Micro-Chemomechanical Hydrogen Sensor
#2DEVICE ENCAPSULATION USING PHYSICAL VAPOR DEPOSITION
#3Electrical Measurement of MEMS Switch Beam Resonant Frequency
#4Single MEMS Die Capable of Differential SPDT or General DPDT
#5ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
#6REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
#7MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
#8Electrical contacts using an array of micromachined flexures
#9MEMS Switch, Preparation Method thereof, and Electronic Apparatus
#10MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE
#11VERTICALLY STACKED MEMS DEVICES AND CONTROLLER DEVICE
#12MEMS RELAY WITH SAFETY FUNCTION
#13Reduction of ringing and intermodulation distortion in a MEMS device
#14Low voltage MEMS relay filled with alternative gas mixture to SF
#15Wafer level stacked structures having integrated passive features
#16Thermal metamaterial for low power MEMS thermal control
#17System for protecting mems product under ESD event
#18Actuator with buckling member stability
#19Wafer level stacked structures having integrated passive features
#20Microfabricated notch filter
#21Signal detecting circuit and signal detecting method of micro switch
#22Microelectromechanical system cavity packaging
#23Fence structure to prevent stiction in a MEMS motion sensor
#24Planar cavity MEMS and related structures, methods of manufacture and design structures
#25Planar cavity MEMS and related structures, methods of manufacture and design structures
#26Planar cavity mems and related structures, methods of manufacture and design structures
#27Microelectromechanical systems (MEMS) switching circuit and related apparatus
#28Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#29Planar cavity MEMS and related structures, methods of manufacture and design structures
#30Planar cavity MEMS and related structures, methods of manufacture and design structures
#31Planar cavity MEMS and related structures, methods of manufacture and design structures
#32Microelectromechanical system cavity packaging
#33Planar cavity MEMS and related structures, methods of manufacture and design structures
#34Planar cavity MEMS and related structures, methods of manufacture and design structures
#35MEMS membrane with integrated transmission line
#36Fence structure to prevent stiction in a MEMS motion sensor
#37Planar cavity MEMS and related structures, methods of manufacture and design structures
#38Current handling in legs and anchors of RF-switch
#39Planar cavity MEMS and related structures, methods of manufacture and design structures
#40Planar cavity MEMS and related structures, methods of manufacture and design structures
#41Vanishing via for hardware IP protection from reverse engineering
#42Thin film metal silicides and methods for formation
#43Contact material for MEMS devices
#44Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#45Planar cavity MEMS and related structures, methods of manufacture and design structures
#46Planar cavity MEMS and related structures, methods of manufacture and design structures
#47Planar cavity MEMS and related structures, methods of manufacture and design structures
#48Planar cavity MEMS and related structures, methods of manufacture and design structures
#49Planar cavity MEMS and related structures, methods of manufacture and design structures
#50Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
#51LED chip with integrated electromechanical switch
#52Planar cavity MEMS and related structures, methods of manufacture and design structures
#53MEMS component
#54Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas
#55Mixed-technology combination of programmable elements
#56Planar cavity MEMS and related structures, methods of manufacture and design structures
#57Refractory seed metal for electroplated MEMS structures
#58Planar cavity MEMS and related structures, methods of manufacture and design structures
#59Electronic power device with improved cooling
#60Planar cavity MEMS and related structures, methods of manufacture and design structures
#61Planar cavity MEMS and related structures, methods of manufacture and design structures
#62Planar cavity MEMS and related structures, methods of manufacture and design structures
#63Planar cavity MEMS and related structures, methods of manufacture and design structures
#64Thin film metal silicides and methods for formation
#65NEMS devices with series ferroelectric negative capacitor
#66Thin capping for MEMS devices
#67Planar cavity MEMS and related structures, methods of manufacture and design structures
#68Planar cavity MEMS and related structures, methods of manufacture and design structures
#69Planar cavity MEMS and related structures, methods of manufacture and design structures
#70Planar cavity MEMS and related structures, methods of manufacture and design structures
#71Planar cavity MEMS and related structures, methods of manufacture and design structures
#72Planar cavity MEMS and related structures, methods of manufacture and design structures
#73Functional device, acceleration sensor, and switch
#74Apparatus for wirelessly charging a rechargeable battery
#75Junctionless nano-electro-mechanical resonant transistor
#76Method of reducing gyroscope oscillator start-up time and device therefor
#77Electromechanical switching device with 2D layered material surfaces
#78Low consumption logic circuit with mechanical switches
#79Planar cavity MEMS and related structures, methods of manufacture and design structures
#80Low temperature ceramic Microelectromechanical structures
#81Planar cavity MEMS and related structures, methods of manufacture and design structures
#82Planar cavity MEMS and related structures, methods of manufacture and design structures
#83Magnetically actuated micro-electro-mechanical capacitor switches in laminate
#84Planar cavity MEMS and related structures, methods of manufacture and design structures
#85Low temperature ceramic microelectromechanical structures
#86GOLD-METAL OXIDE THIN FILMS FOR WEAR-RESISTANT MICROELECTROMECHANICAL SYSTEMS ("MEMS")
#87Microelectromechanical systems-based logic gates