83816 ⎘
Specific applications of microelectromechanical systems; Switches characterised by the shape
Sub-classes:Micro-electromechanical system devices and methods
#2Microphone device with integrated pressure sensor
#3Systems and methods for MEMS-based cross-point electrical switching
#4Microphone device with integrated pressure sensor
#5Small wafer are MEMS switch
#6Small wafer area MEMs switch
#7Small wafer area MEMS switch
#8Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
#9Systems and methods for MEMS-based cross-point electrical switching
#10Composite beam microelectromechanical system switch