Patents-Review.com
ClassID:

83835 ⎘

B81B2201/031 - CPC Classification

Classification description:

Specific applications of microelectromechanical systems; Microengines and actuators Thermal actuators

Recent Application in this class:
#1
20250075825
2025-03-06

VIRTUAL VALVE IN A MEMS-BASED COOLING SYSTEM

 #2
20220038035
2022-02-03

Light responsive polymer magnetic microrobots

 #3
20210371271
2021-12-02

Integrated circuit packages having stress-relieving features

 #4
20210325553
2021-10-21

MEMS nanotube based thermal neutron detector

 #5
20210180723
2021-06-17

Virtual valve in a MEMS-based cooling system

 #6
20210024352
2021-01-28

MEMS device manufacturing method, MEMS device, and shutter apparatus using the same

 #7
20200055728
2020-02-20

MEMS ISOLATION STRUCTURES

 #8
20190330050
2019-10-31

Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect

 #9
20190122845
2019-04-25

Integrated mechanical device with vertical movement

 #10
20190060591
2019-02-28

Device, system and method for thermal capnography

 #11
20190020291
2019-01-17

Light responsive polymer magnetic microrobots

 #12
20180321643
2018-11-08

Actuator apparatus, electronic device, and control method

 #13
20180201497
2018-07-19

Systems and methods for micro-cantilever actuation by base excitation

 #14
20180100490
2018-04-12

Actuator based on carbon nanotubes and actuating system using the same

 #15
20180099866
2018-04-12

Method for making an actuator based on carbon nanotubes

 #16
20180066636
2018-03-08

Local haptic actuation system

 #17
20180029879
2018-02-01

MEMS isolation structures

 #18
20170117825
2017-04-27

Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams

 #19
20170113918
2017-04-27

Microelectromechanical device and system with low-impedance resistive transducer

 #20
20160336941
2016-11-17

Ultra low power thermally-actuated oscillator and driving circuit thereof

 #21
20160272485
2016-09-22

MEMS isolation structures

 #22
20150116072
2015-04-30

Integrated mechanical device with vertical movement

 #23
20140295365
2014-10-02

Device and method for generating a second temperature variation from a first temperature variation

 #24
20140191524
2014-07-10

Reconfigurable lithographic structures

 #25
20130037512
2013-02-14

MEMS-based micro and nano grippers with two axis force sensors

 #26
20130005955
2013-01-03

Micro rotary machine and methods for using same

 #27
20120119324
2012-05-17

MEMS isolation structures

 #28
20110063068
2011-03-17

THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH

 #29
20110006874
2011-01-13

MICROMECHANICAL ACTUATOR

 #30
20100326071
2010-12-30

Reconfigurable lithographic structures

 #31
20100207411
2010-08-19

MEMS-based micro and nano grippers with two-axis force sensors

 #32
20100182120
2010-07-22

MEMS device with bi-directional element

 #33
20090197061
2009-08-06

Method for producing a multilayer piezoelectric microcomponent using sacrificial thick film technology

 #34
20090085699
2009-04-02

MEMS actuator

 #35
20090040008
2009-02-12

Thermal actuator for a MEMS-based relay switch

 #36
20090002118
2009-01-01

MEMS device with bi-directional element

 #37
20080061913
2008-03-13

Singly attached MEMS thermal device and method of manufacture

 #38
20080061031
2008-03-13

NANO-GRIPPER AND METHOD OF PRODUCING SAME

 #39
20080048519
2008-02-28

Micro rotary machine and methods for using same

 #40
20050178118
2005-08-18

Thermal bend actuator with corrugate profile

 #41
20050029827
2005-02-10

Nano-gripper and method of producing same

 #42
14756652
2016-09-13

MEMS rotary fuze architecture for out-of-line applications