ClassID:

83834

B81B2201/03 - CPC Classification

Classification description:

Specific applications of microelectromechanical systems Microengines and actuators

Sub-classes:
Recent Application in this class:
#1
20240327201
2024-10-03

MEMS DIES EMBEDDED IN GLASS CORES

#2
20240217808
2024-07-04

Method for manufacturing package structure

#3
20230354713
2023-11-02

FERROELECTRIC MATERIAL, MEMS COMPONENT COMPRISING A FERROELECTRIC MATERIAL, MEMS DEVICE COMPRISING A FIRST MEMS COMPONENT, METHOD OF PRODUCING A MEMS COMPONENT, AND METHOD OF PRODUCING A CMOS-COMPATIBLE MEMS COMPONENT

#4
20230327640
2023-10-12

NON-LINEAR TETHERS FOR SUSPENDED DEVICES

#5
20230312337
2023-10-05

MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT

#6
20230061042
2023-03-02

MICRO VIBRATION BODY HAVING THREE-DIMENSIONAL CURVED SURFACE SHAPE AND METHOD FOR MANUFACTURING THE SAME

#7
20220289561
2022-09-15

Scalable high-voltage control circuits using thin film electronics

#8
20220254982
2022-08-11

TECHNOLOGIES FOR MICROELECTROMECHANICAL SYSTEMS WITH COMPOSABLE PIEZOELECTRIC ACTUATORS

#9
20220185655
2022-06-16

Package structure and method for manufacturing the same

#10
20220179195
2022-06-09

MEMS based light deflecting device and method

#11
20220112075
2022-04-14

MEMS packaging structure and manufacturing method therefor

#12
20220063988
2022-03-03

MEMS PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREFOR

#13
20220063987
2022-03-03

MEMS PACKAGING STRUCTURE AND FABRICATION METHOD THEREFOR

#14
20210354979
2021-11-18

Thermal compensation of lens assembly focus using image sensor shift

#15
20210211071
2021-07-08

Micro power generation device and electronic apparatus with the same

#16
20210211068
2021-07-08

Micro electrostatic actuated pneumatic driven motor

#17
20210135649
2021-05-06

Non-linear tethers for suspended devices

#18
20210091007
2021-03-25

Fabric with embedded electrical components

#19
20200411747
2020-12-31

Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component

#20
20200409238
2020-12-31

Auto-focusing device and method of fabricating the same

#21
20200378848
2020-12-03

Semiconductor strain detection element with impurity diffusion layer

#22
20200140265
2020-05-07

Fence structure to prevent stiction in a MEMS motion sensor

#23
20200131033
2020-04-30

Actuator layer patterning with topography

#24
20190345027
2019-11-14

Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor

#25
20190219193
2019-07-18

Micro electrical mechanical system (MEMS) valve

#26
20190062153
2019-02-28

Fence structure to prevent stiction in a MEMS motion sensor

#27
20190036006
2019-01-31

Method of manufacturing MEMS device and MEMS device

#28
20190013274
2019-01-10

Fabric with embedded electrical components

#29
20180297834
2018-10-18

MEMS package

#30
20180186626
2018-07-05

SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION COMPONENT

#31
20180164241
2018-06-14

MICRO-ELECTROMECHANICAL DEVICE, SYSTEM AND METHOD FOR ENERGY HARVESTING AND SENSING

#32
20180072565
2018-03-15

MEMS actuation systems and methods

#33
20180072562
2018-03-15

MEMS actuation systems and methods

#34
20170260041
2017-09-14

Membrane of amorphous carbon and MEMS including such a membrane

#35
20170022814
2017-01-26

Kinetic energy atom-powered engine

#36
20150370063
2015-12-24

Precise definition of transducer electrodes

#37
20150226066
2015-08-13

Kinetic energy atom-powered engine

#38
20150024534
2015-01-22

Two degree of freedom dithering platform for MEMS sensor calibration

#39
20150008788
2015-01-08

Low temperature ceramic Microelectromechanical structures

#40
20120272731
2012-11-01

Two degree of freedom dithering platform for MEMS sensor calibration

#41
20120272730
2012-11-01

Systems and methods for an encoder and control scheme

#42
20120169068
2012-07-05

Kinetic energy atom-powered engine

#43
20110111545
2011-05-12

Low temperature ceramic microelectromechanical structures

#44
17114265
2025-04-29

System for controlling the application of energy to a construction component