83834 ⎘
Specific applications of microelectromechanical systems Microengines and actuators
Sub-classes:MEMS DIES EMBEDDED IN GLASS CORES
#2Method for manufacturing package structure
#3FERROELECTRIC MATERIAL, MEMS COMPONENT COMPRISING A FERROELECTRIC MATERIAL, MEMS DEVICE COMPRISING A FIRST MEMS COMPONENT, METHOD OF PRODUCING A MEMS COMPONENT, AND METHOD OF PRODUCING A CMOS-COMPATIBLE MEMS COMPONENT
#4NON-LINEAR TETHERS FOR SUSPENDED DEVICES
#5MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
#6MICRO VIBRATION BODY HAVING THREE-DIMENSIONAL CURVED SURFACE SHAPE AND METHOD FOR MANUFACTURING THE SAME
#7Scalable high-voltage control circuits using thin film electronics
#8TECHNOLOGIES FOR MICROELECTROMECHANICAL SYSTEMS WITH COMPOSABLE PIEZOELECTRIC ACTUATORS
#9Package structure and method for manufacturing the same
#10MEMS based light deflecting device and method
#11MEMS packaging structure and manufacturing method therefor
#12MEMS PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREFOR
#13MEMS PACKAGING STRUCTURE AND FABRICATION METHOD THEREFOR
#14Thermal compensation of lens assembly focus using image sensor shift
#15Micro power generation device and electronic apparatus with the same
#16Micro electrostatic actuated pneumatic driven motor
#17Non-linear tethers for suspended devices
#18Fabric with embedded electrical components
#19Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component
#20Auto-focusing device and method of fabricating the same
#21Semiconductor strain detection element with impurity diffusion layer
#22Fence structure to prevent stiction in a MEMS motion sensor
#23Actuator layer patterning with topography
#24Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor
#25Micro electrical mechanical system (MEMS) valve
#26Fence structure to prevent stiction in a MEMS motion sensor
#27Method of manufacturing MEMS device and MEMS device
#28Fabric with embedded electrical components
#29MEMS package
#30SYSTEM FOR CONTROLLING THE APPLICATION OF ENERGY TO A CONSTRUCTION COMPONENT
#31MICRO-ELECTROMECHANICAL DEVICE, SYSTEM AND METHOD FOR ENERGY HARVESTING AND SENSING
#32MEMS actuation systems and methods
#33MEMS actuation systems and methods
#34Membrane of amorphous carbon and MEMS including such a membrane
#35Kinetic energy atom-powered engine
#36Precise definition of transducer electrodes
#37Kinetic energy atom-powered engine
#38Two degree of freedom dithering platform for MEMS sensor calibration
#39Low temperature ceramic Microelectromechanical structures
#40Two degree of freedom dithering platform for MEMS sensor calibration
#41Systems and methods for an encoder and control scheme
#42Kinetic energy atom-powered engine
#43Low temperature ceramic microelectromechanical structures
#44System for controlling the application of energy to a construction component