Zero Power Micro-Chemomechanical Hydrogen Sensor

MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY

MEMS cavity with non-contaminating seal

INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS

Ultrasonic Particle Reduction System for an Acoustic Micro-Valve

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

BATTERY CELL AND BATTERY DEVICE HAVING THE SAME

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering

Haptic Device with Multiple Fluidically-Controlled Voids

MEMS Package and Method for Encapsulating an MEMS Structure

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATION METHOD

Piezoelectric mems device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof

MEMS cavity with non-contaminating seal

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) DESIGN

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND MANUFACTURING PROCESS THEREOF

Multifunction magnetic and piezoresistive MEMS pressure sensor

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL THICKNESSES

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT MATERIAL PROPERTIES

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM ONE OR MORE COMPENSATION LAYERS

MICROACTUATOR APPARATUS AND SYSTEM

MEMS device, assembly comprising the MEMS device, and methods for operating the MEMS device

MEMS actuator for in-plane movement of a mobile mass and optical module comprising the MEMS actuator

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AND MICROELECTROMECHANICAL MIRROR DEVICE

Piezoelectric based MEMS device with time sharing actuation and sensing circuitry

Actuation of microchannels for optimized acoustophoresis

Wearable gloves including a fabric material worn by a user, a position sensor, and a matrix with a plurality of voids that each include at least one fluidic actuator

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

MICROMECHANICAL DEVICE FOR TRANSDUCING ACOUSTIC WAVES IN A PROPAGATION MEDIUM

MEMS cavity with non-contaminating seal

MEMS Device for Large Angle Beamsteering

Multifunction magnetic and piezoresistive MEMS pressure sensor

Droplet jetting device

Modeling the emission intensity of an IR emitter by varying the emission surface

MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE

Haptic Actuators Fabricated by Roll-to-Roll Processing

Manufacturing method of micro fluid actuator

SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS

Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS

MEMS device comprising a membrane and an actuator

Multifunctional photoresponsive materials exhibiting aggregation-induced emission and solid-state actuation

Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection

MEMS cavity with non-contaminating seal

Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current

Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

Post-processing techniques on mems foundry fabricated devices for large angle beamsteering

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

Piezoelectrically actuated MEMS optical device having a protected chamber and manufacturing process thereof

Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

MEMS device comprising a membrane and an actuator

Haptic actuators fabricated by roll-to-roll processing

Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device

MEMS electrothermal actuator for large angle beamsteering

MEMS transducer for interacting with a volume flow of a fluid, and method of producing same

A MICROFLUIDIC ANALYTICAL PLATFORM FOR AUTONOMOUS IMMUNOASSAYS

Device with a suspended membrane having an increased amplitude of displacement

Microelectromechanical transducer

Actuator element using carbon electrode

Repulsive-attractive-force electrostatic actuator

Multidirectional artificial muscles from nylon

Actuator, optical scanning device, and manufacturing methods

Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the same

Sensing devices, sensors, and methods for monitoring environmental conditions

Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device

Piezoelectric MEMS device having a suspended diaphragm and manufacturing process thereof

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Resonator and resonance device

Displacement increasing mechanism and shutter device

MEMS device for large angle beamsteering

MEMS device comprising a membrane and an actuator

Microelectromechanical transducer

MEMS cavity with non-contaminating seal

Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current

MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related control method

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Membrane bonding with photoresist

Large scale integration of haptic devices

Nozzle substrate, ink-jet print head, and method for producing nozzle substrate

Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing

Local haptic actuation system

Method for manufacturing a piezoelectric device

Mechanical structure comprising an actuator and mechanical amplification means, and production method

Pop-Up Laminate Structure Including Miniature Optical Components

Method for manufacturing thermal bimorph diaphragm and MEMS speaker with thermal bimorphs

Aluminum nitride (AlN) devices with infrared absorption structural layer

Membrane bonding with photoresist

Micromechanical device with an actively deflectable element

Integrated MEMS device

Device to convert out-of-plane motion to in-plane motion and/or conversely

Electrostatically deflectable micromechanical device

Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus

MEMS device

Optical reflection element

Mirror drive device and driving method thereof

Polymer actuator element

Optical and infrared imaging system

Actuator element using carbon electrode

Device and method for generating a second temperature variation from a first temperature variation

Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs

Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs

Corrugated membrane MEMS actuator fabrication method

Electromechanical transducer

FERROELECTRIC DEVICE

Fabrication of robust electrothermal MEMS with fast thermal response

Forming a membrane having curved features

Micro-electro-mechanical device with a piezoelectric actuator

Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process

Electromechanical transducer device and method of forming a electromechanical transducer device

Electromechanical transducer device and method of forming a electromechanical transducer device

Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same

MEMS switch and method of manufacturing the MEMS switch

Electrothermal microactuator for large vertical displacement without tilt or lateral shift

Device for energy conversion, in particular a piezoelectric micropower converter

Inkjet nozzle assembly having bilayered passive beam

Micromechanical element and sensor for monitoring a micromechanical element

Micro-electro-mechanical device with a piezoelectric actuator

Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device

Electrically conductive polymer actuator, method for manufacturing the same, and method of driving the same

Method for fabricating lateral-moving micromachined thermal bimorph

Actuator

Hysteretic MEMS thermal device and method of manufacture

Actuator and electronic hardware using the same

Micromechanical actuators comprising semiconductors on a group III nitride basis

Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film

Assembly of a microswitch and of an acoustic resonator

Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such

Piezoresistive sensing structure

Thermal bend actuator comprising passive element having negative thermal expansion

Micro transport machine and methods for using same

Micro-electromechanical device

Actuator and method of manufacturing actuator module

Apparatus Comprising a Thermal Bimorph with Enhanced Sensitivity

Piezoelectric driven MEMS device

Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same

PASSIVE ANALOG THERMAL ISOLATION STRUCTURE

Bimorph element, bimorph switch, mirror element, and method for manufacturing these

Actuator and method of manufacturing actuator module

Bi-directional released-beam sensor

Micromechanical component and method for production thereof

Piezoresistive sensing structure

Actuator device

Bi-directional released-beam sensor

Functional material for micro-mechanical systems

Thermal plastic deformation of RF MEMS devices

Bimorph MEMS devices

Actuator device

Process for manufacturing a microsystem

Microelectricalmechanical system with improved beam suspension

Unilateral thermal buckle beam actuator

Wearable device with fluid-based circuits and stretch-sensitive materials, and systems including the wearable device used in conjunction with a virtual-reality headset

Large area OLED display with MEMS switching device

Magnetoelastically actuated MEMS device and methods for its manufacture

Thermal management using microelectromechanical systems bimorph cantilever beams

Hydrogen barriers in a copper interconnect process