DROP RESISTANT MEMS ACTUATOR-IMAGER ASSEMBLY PACKAGE

Anchor and cavity configuration for MEMS-based cooling systems

A SCANNING MEMS MIRROR DEVICE

LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE

Anchor and cavity configuration for MEMS-based cooling systems

MICROELECTROMECHANICAL DRIVE FOR MOVING OBJECTS

OUT-OF-PLANE MOTION MOTOR FOR CARRYING REFLECTOR AND MANUFACTURING METHOD THEREOF

MEMS device with a three-layer comb actuator structure and a two-layer hinge

Multidirectional translating and tilting platform using bending actuators as active entity

MEMS actuator package architecture

Molecular machine

Actuator

Levitated motor-actuator with parallel dipole line trap system

Three-dimensional micro devices and method for their production

Camera modules using MEMS micro electrostatic pistontube actuators for autofocus (AF) and optical image stabilization (OIS)

Method and apparatus for harvesting energy based on the random occurrence of common direction molecules

Method for manufacturing a device having a three-dimensional magnetic structure

Electrical tuning of resonant scanning

MEMS hinges with enhanced rotatability

MEMS actuator package architecture

MEMS actuator package architecture

Kinetic energy atom-powered engine

MEMS device and methods for manufacturing and using same

Method and apparatus for harvesting energy based on the random occurrence of common direction molecules

Method and apparatus for harvesting energy based on the random occurrence of common direction molecules

Micro rotary machine and methods for using same

MEMS device and methods for manufacturing and using same

Kinetic energy atom-powered engine

Micro electro mechanical device and manufacturing method thereof

Method of fabricating an electromechanical component using graphene

Micro electro mechanical device and manufacturing method thereof

Rotary nanotube bearing structure and methods for manufacturing and using the same

Micromachine switch, filter circuit, duplexer circuit, and communication device

Actuator using comb-tooth

Radially Staged Microscale Turbomolecular Pump

Micro transport machine and methods for using same

Micro rotary machine and methods for using same

Micro electro mechanical device and manufacturing method thereof

Device with surface cooling and method of making

Molecular motor power-supplying device

Apparatus and method for nanoscale and microscale mechanical machining and processing

Drop resistant MEMS actuator-imager assembly package

MEMS rotary fuze architecture for out-of-line applications