METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL

ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHING AND METHODS FOR MANUFACTURING AND USING THE SAME

MEMS SOUND TRANSDUCER

ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING SAME

METHOD FOR PRODUCING A MICROELECTRONIC DEVICE

PIEZOELECTRIC ACTUATOR STACK WITH TAPERED SIDEWALL

METHOD OF ASSEMBLING MOBILE MICRO-MACHINES AND A MOBILE MICRO-MACHINE

Passive microfluidic valves

Semiconductor structure and manufacturing method thereof

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

Tunable photonic device with liquid crystal elastomer microactuators and method of fabricating the same

Micro-electromechanical device having a soft magnetic material electrolessly deposited on a palladium layer coated metal beam

Piezoelectric actuator having a deformation sensor and fabrication method thereof

Electrode arrangement for a micro-electro-mechanical system including tapered electrode structures

Method of actuating a shape changeable member, shape changeable member and actuating system

Coupling a magnet with a MEMS device

MEMS and method of manufacturing the same

Microfluidic MEMS device for fluid ejection with piezoelectric actuation

Method and apparatus for evaluating electrostatic or nonlinear devices

Three-dimensional micro devices and method for their production

Microfabricated ultrasonic transducers and related apparatus and methods

Electrostatic actuator with tri-electrode topology

Microfabricated ultrasonic transducers and related apparatus and methods

Microelectromechanical system with spring for magnet placement

INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE

Micromechanical component and method for producing same

Compliant micro device transfer head

Process for manufacturing a microelectromechanical interaction system for a storage medium

Optical module

ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR ASSEMBLIES AND APPLICATIONS THEREOF

In-plane-strain-actuated out-of-plane actuator

ELECTROMAGNETIC MEMS DEVICE

Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer

Electrostatic actuator and method for producing the same

Liquid-driven nano-porous actuator and the application thereof

Compliant micro device transfer head

Display apparatus incorporating corrugated beam actuators

Forming magnetic microelectromechanical inductive components

Forming magnetic microelectromechanical inductive components

Electromagnetic actuator for optical device to reduce temperature and deformation

Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer

Forming magnetic microelectromechanical inductive components

Motion conversion mechanisms

Surface mount actuator

Compliant micro device transfer head

Motion conversion system

Nano-devices formed with suspended graphene membrane

Nano-devices formed with suspended graphene membrane

Surface mount actuator

Capacitive transducer and methods of manufacturing and operating the same

Micro-nozzle thruster

MEMS anchor and spacer structure

Fabricating MEMS composite transducer including compliant membrane

Forming curved features using a shadow mask

Electrostatic actuator of a mobile structure with improved relaxation of trapped charges

Motion conversion system

Method for fabricating a multi-layer capacitor and a multi-layer capacitor

Polymer actuator device

Microstructure and method of manufacturing the same

Magnetic microparticle and method for manufacturing such a microparticle

Active fixturing for micro/mesoscale, machine tool systems

Piezoelectric actuator, optical reflection element using the same and piezoelectric driver

Method of manufacturing a capacitive electromechanical transducer

LOW DISTORTION PACKAGE FOR A MEMS DEVICE INCLUDING MEMORY

Actuator driving system in which a drive voltage and number of electrodes parts driven changes in accordance with temperature

Device with protective layer

ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME

MEMS devices and systems actuated by an energy field

Apparatus and method for converting energy

CMOS-compatible movable microstructure based devices

Method and apparatus for electromagnetic actuation

Thermal bend actuator material selection

STANDING WAVE FLUIDIC AND BIOLOGICAL TOOLS

Multilayer composite and a method of making such

MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS

Dielectric composite and a method of manufacturing a dielectric composite

Dielectric composite and a method of manufacturing a dielectric composite

Non-contact actuator

Micro actuator

Method for fabricating a multi-layer capacitor

Electrostatic actuator driving system having plural actuators and a temperature detector

Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid

Microfabrication

Low-cost continuous phase sheet deformable mirror

Nanocrystal powered nanomotor

Process for manufacturing a microelectromechanical interaction system for a storage medium

Motion conversion system

Wireless technique for microactivation

Light pressure rotator and light pressure rotating device

Process for manufacturing an apparatus that protects features during the removal of sacrificial materials

Actuating member and method for producing the same

Thermoelastic device with preselected resistivity, inertness and deposition characteristics

Tiltable-body apparatus, and method of fabricating the same

MICROELECTROMECHANICAL STEP ACTUATOR CAPABLE OF BOTH ANALOG AND DIGITAL MOVEMENTS

Method of manufacturing a MEMS device and MEMS device

6-axis electromagnetically-actuated meso-scale nanopositioner

Optical components and production thereof

Method of fabricating micro actuator having media stage

Multilayer composite and a method of making such

Self-assembling MEMS devices having thermal actuation

Thermoelastic device comprising an expansive element formed from a preselected material

MEMS digital linear actuator

Micro power generator and apparatus for producing reciprocating movement

Micro-electromechanical actuator

Tiltable-body apparatus, and method of fabricating the same

Double-electret mems actuator

Liquid droplet ejecting apparatus and method for producing same

Method for supplying multiple voltages to a movable part of a MEMS device

Vertical displacement device

Semiconductor structure with electrically isolated sidewall electrodes and method for fabricating the structure

Thermoelastic device comprising an expansive element formed from a preselected material

Tiltable-body apparatus, and method of fabricating the same

Apparatus and method for position sensing in MEMS actuators using temperature resistance variations

Wideband power attenuators in RF-MEMS technology