GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE

High-Frequency BIAXIAL Bi-Resonant Microelectromechanical Mirror Structure

MEMS DEVICE

METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL SYSTEM MIRROR DEVICE, MANUFACTURING APPARATUS, SET OF MIRROR DEVICES AND WAFER

MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE

DEEP TRENCHES ON MICROELECTROMECHANICAL SYSTEM WAFERS FOR STEALTH DICING

MEMS Optical Modulator Independently Controlled with Integrated ASIC Device and Making the Same

DIELECTRIC STACK FOR MICROELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF FABRICATION THEREOF

LIGHT DEFLECTOR

Systems and Apparatus for Micromirror Designs with Electrode Contact

METHODS FOR POST-PROCESSING AND FOR HANDLING OF MEMS CHIPS

SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS

MICROELECTROMECHANICAL SYSTEM DEVICE WITH FILLED VIA

NON-CONTACT MICROELECTROMECHANICAL SYSTEMS

METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS HAVING SUCH A LAYERED STRUCTURE

METHODS AND SYSTEMS FOR STACKED MICROELECTROMECHANICAL SYSTEM DEVICES

Wavefront reversal device using a MEMS spatial phase modulator integrated with a retroreflector array

MICROELECTROMECHANICAL SYSTEM DEVICE WITH ELONGATED VIA

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS WITH SUCH A LAYERED STRUCTURE

NON-CONTACT MICROELECTROMECHANICAL SYSTEM DEVICE WITH HINGE-LEVEL ACTUATION

MEMS DEVICE WITH RESONATING STRUCTURE

FUNCTIONALIZED OXOACID LUBRICANTS IN MEMS DEVICES

MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY

SYSTEM AND METHOD FOR MEMS DEVICES

DRIVE ELEMENT AND OPTICAL DEFLECTION ELEMENT

SEMICONDUCTOR DEVICE MOUNTED ON A SYSTEM BOARD

MEMS DEVICES SINGULATED BY PLASMA ETCH

PLASMA SHIELDING FOR AN ELECTROSTATIC MEMS DEVICE

MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FORMING THE SAME

ELECTROSTATIC ACTUATOR

Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators

MICROSCANNER HAVING A DEFLECTING ELEMENT AND HAVING SPRING ELEMENTS CURVED TOWARDS SAME FOR SUSPENSION OF THE DEFLECTING ELEMENT IN A MANNER CAPABLE OF OSCILLATION

MIRROR ARRANGEMENT WITH COOLED MIRROR ELEMENTS AND LITHOGRAPHY SYSTEM

MICROELECTROMECHANICAL SYSTEM DEVICE WITH OFFSET MIRROR

ACTUATOR DEVICE

MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES

HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST MASS FROM A NANORIBBON

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

APPARATUS FOR STRESS-REDUCED MOUNTING OF MEMS-BASED MICROMIRRORS

MEMS DEVICE

MICROELECTROMECHANICAL DEVICE

CIRCUITS AND METHODS TO CALIBRATE MIRROR DISPLACEMENT

Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator

MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARATION METHOD THEREFOR

ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FOR LASER DISPLAYS USING BEAM SHAPING OPTICS

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

MIRROR UNIT AND OPTICAL MODULE

MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOVABLE MIRROR AND A SUBSTRATE

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

FORMING A PASSIVATION COATING FOR MEMS DEVICES

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

AUTOSTEREOSCOPIC CAMPFIRE DISPLAY

Enhanced microelectromechanical system mirror apparatus

MICROMECHANICAL COMPONENT AND SCANNING DEVICE

LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

OPTICAL REFLECTIVE DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC INTEGRATED CIRCUIT

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MANUFACTURING DAMASCENE INTERCONNECT STRUCTURE

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING SAME AND PREPARATION METHOD THEREFOR

Actuator device and method for manufacturing actuator device

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPENSATION

METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMBLIES

Optical device production method

Actuator device

DEVICE WITH A STRESS DECOUPLING STRUCTURE

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering

MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS

Optical device

OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

Mirror unit and optical module

Support Device for One or More MEMS Components

MEMS DEVICE

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES

METHOD AND APPARATUS FOR THE OPTICAL CONTACT BONDING OF COMPONENTS

ELECTROMECHANICAL MICROSYSTEM

MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS

MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF

ELECTROSTATIC MEMS MICROMIRROR

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MOVABLE DEVICE, MEMS DEVICE AND OPTICAL SCANNING APPARATUS

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND OPTIMIZED SIZE

MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER

MEMS Package and Method for Encapsulating an MEMS Structure

FLIP CHIP MICROMIRROR TECHNOLOGY

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY

PIEZOELECTRIC DRIVE ELEMENT

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

Actuator device

Hermetically sealed MEMS mirror and method of manufacture

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION HAVING IMPROVED STRESS RESISTANCE

OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE, AND IMAGE DRAWING SYSTEM

SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES

BIAXIAL MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION

3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FOOTPRINT

Stiffening structures for micro-electro-mechanical system (MEMS) micromirrors

SYSTEM AND METHOD FOR MEMS DEVICES

GRATING REFLECTOR

DIRECT DRIVE MEMS SCANNING MICROMIRROR

PIEZOELECTRIC ELEMENT AND MEMS MIRROR

A SCANNING MEMS MIRROR DEVICE

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

Micro-electro-mechanical device with a shock-protected tiltable structure

GLASS-SUBSTRATE-BASED MEMS MIRROR DEVICE AND METHOD FOR ITS PRODUCTION

Method to estimate phase and amplitude for control of a resonant MEMS mirror

Optical device

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONIC DEVICE

Wavefront reversal device using a MEMS spatial phase modulator integrated with a retroreflector array

MEMS MIRROR AND MEMS MIRROR ARRAY SYSTEM

MICROMECHANICAL DEVICE

Optical device production method

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

Micro-electro-mechanical systems micromirrors and micromirror arrays

Micromachined mirror assembly with asymmetric structure

Reduction of ringing and intermodulation distortion in a MEMS device

OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND DISTANCE MEASURING DEVICE

MICROMIRROR DEVICE

SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS

Systems and apparatus for micromirror designs with electrode contact

METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR DEVICE

PROTECTIVE BONDLINE CONTROL STRUCTURE

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

MICRO SCANNING MIRROR

DIGITAL MICROMIRROR DEVICE WITH REDUCED STICTION

OPTICAL UNIT, OPTICAL DEVICE, AND METHOD FOR MANUFACTURING OPTICAL UNIT

Optical scanning system using micro-electro-mechanical system (mems) micro-mirror arrays (MMAs)

Hybrid driving for large aperture tilting mirrors

MICRO-ELECTRONIC NON-LANDING MIRROR SYSTEM

MEMS DEVICE AND METHOD OF DRIVING MEMS DEVICE

Mirror unit and optical module

MICROACTUATOR APPARATUS AND SYSTEM

Surface micromachined structures

MEMS DEVICE

MEMS stress reduction structure embedded into package

SEMICONDUCTOR DEVICE MOUNTED ON A SYSTEM BOARD

LIGHT DEFLECTOR

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AND MICROELECTROMECHANICAL MIRROR DEVICE

Circuits and methods to calibrate mirror displacement

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STEERED HIGH-POWER LASER TRANSMITTER

Micromirror arrays

Movable apparatus

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MICROMECHANICAL OSCILLATION SYSTEM

Actuator device

Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror

MEMS mirror arrays with reduced crosstalk

Spatial light modulators

BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE

STRESS REDUCING AND FLEXIBLE PINS FOR MEMS MIRRORS

Thermal control of MEMS mirrors to limit resonant frequency shift

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

BACKSIDE COATING OF SUSPENDED MEMS MIRROR ACTUATORS FOR STRESS MATCHING AND THERMAL STABILITY

ELECTROMECHANICAL MICROSYSTEM

ELECTROMECHANICAL MICROSYSTEM

MEMS actuation device with sparse pulses

Laser systems and optical devices for laser beam shaping

COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE AND LARGE OUT-OF-PLANE TRANSLATIONAL DISPLACEMENT

Detachable MEMS package top cover

Batch fabrication of MEMS scanning mirror

ATTACHMENT FOR REDUCING TEMPERATURE SENSITIVITY

MIRROR ASSEMBLY HAVING REINFORCEMENT STRUCTURE FOR LIGHT STEERING

MEMS ACTUATOR AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF MEMS ACTUATORS

MEMS Device for Large Angle Beamsteering

Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes

Microelectromechanical mirror device with compensation of planarity errors

Electrode configuration for tilting micro-electro-mechanical systems mirror

Detector array detection with hadamard pattern scanning

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

Optical scanning device and method for manufacturing the same

Scanning mirror and manufacturing method for scanning mirror

Structures for piezoelectric actuator to increase displacement and maintain stiffness

Actuator device

MEMS package with shock and vibration protection

MICROMIRROR DEVICE AND METHOD OF DRIVING MICROMIRROR DEVICE

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

Method for manufacturing semiconductor substrate, method for manufacturing damascene wiring structure, semiconductor substrate, and damascene wiring structure

MEMS device with a dual hinge structure

Mems scanner suspension system enabling high frequency and high mechanical tilt angle for large mirrors

Mirror assembly for light steering with reduced finger thickness

Mirror assembly for light steering with flexible support structure

Movable device, distance measurement device, image projection apparatus, vehicle, and mount

LIDAR module and methods thereof

Damascene interconnect structure, actuator device, and method of manufacturing damascene interconnect structure

Micromechanical structure and method of providing the same

Vibrating element

MEMS SYSTEM

Micromechanical structure, micromechanical system and method of providing a micromechanical structure

Projecting apparatus

Projecting apparatus

MEMS devices comprising spring element and comb drive and associated production methods

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MEMS and method of manufacturing the same

MEMS display device with an etch-stop-layer

Microelectromechanical system (MEMS) scanner having a torsional beam flexure with variable width

MEMS display device with a vertical hinge

Light deflection device

Multiple layer electrode transducers

Vibrating mirror element and optical scanner

Projector and method of projecting an image

Method with stealth dicing process for fabricating MEMS semiconductor chips

Actuator device and method for manufacturing actuator device

MEMS micro-mirror device with stopper and method of making same

Active matrix programmable mirror

Optical module

A MEMS Package

Micromechanical component and method for producing a micromechanical component

Multi-axis MEMS mirror parking

OPTICAL DEVICE AND A METHOD FOR BONDING

MOUNTS FOR MICRO-MIRRORS

Surface micromachined structures

Spatial light modulator (SLM) comprising integrated digital-to-analog converters

Microelectromechanical mirror device with piezoelectric actuation, having an improved structure

Optical device production method

Addressable display system for ICA monitoring and annunciation for certified applications running on a personal electronic device

Micro-electro-mechanical device with a shock-protected tiltable structure

Micromachined mirror assembly with asymmetric structure

Mirror device

Light deflector, deflecting device, distance measurement device, image projection device, and vehicle

Two degree-of-freedom actuator and MEMS device

Micro-mirror MEMS system

Optical module

Microelectromechanical system (MEMS) structure and method of formation

Optical electronics device

Vertically-shifting electrostatic actuator and optical scanner employing the same

Optical device

Optical device

Mirror unit and optical module

MEMS device with a three-layer comb actuator structure and a two-layer hinge

MEMS comprising a movable structural element, and MEMS array

Mirror device, scanning laser device and scanning display including same mirror device, and method for manufacturing mirror device

Optical device

MEMS device manufacturing method, MEMS device, and shutter apparatus using the same

Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device

GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE

Microelectromechanical system contactor spring

Optical device

Process for manufacturing a MEMS micromirror device, and associated device

Interposer substrate, MEMS device and corresponding manufacturing method

Encapsulant barrier

MEMS chip structure

Hinge offering a reduced sensitivity to internal stresses

Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror

Micromechanical micromirror array and corresponding operating method

Microelectromechanical component and method for producing same

Optical scanner module and method for fabricating optical scanner module

Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure

Apparatus having a bondline structure and a diffusion barrier with a deformable aperture

Micromachined mirror assembly having reflective layers on both sides

Actuator device

MEMS via with enhanced electrical and mechanical integrity

Isolated protrusion/recession features in microelectromechanical systems

Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics

MEMS device having a tiltable suspended structure controlled by electromagnetic actuation

Microelectromechanical system cavity packaging

Actuator device

Light deflection device, distance measurement device, and mobile body

Protective wafer including inclined optical windows and device

MEMS mirror arrangement for detecting a large angular range

Micro-electro-mechanical systems micromirrors and micromirror arrays

Optical device

Projector

MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION

LIDAR SYSTEM AND CONTROL METHOD THEREOF

Optical module having high-accuracy spectral analysis

Optical module

Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer

Mirror unit and optical module

Optical device

MEMS device formed by at least two bonded structural layers and manufacturing process thereof

MEMS electrothermal actuator for large angle beamsteering

Mirror driving apparatus and method for manufacturing thereof

Process for manufacturing a microelectromechanical device with a mobile structure, in particular a micromirror

Optical module

Methods and system for microelectromechanical packaging

MEMS chip and electrical packaging method for MEMS chip

Backside reinforcement structure design for mirror flatness

Hermetically sealed MEMS mirror and method of manufacture

Compensation for laser light source misalignment in a multiple laser scanning TOF sensor system

Coupling a magnet with a MEMS device

MEMS device with suspension structure and method of making a MEMS device

Tunable MEMS etalon device

Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

MMS, MMS array, MEMS actuator and method for providing an MMS

Techniques for removing particulate from an optical surface

Inferring ambient atmospheric temperature

Method and apparatus for evaluating electrostatic or nonlinear devices

OPTICAL SYSTEM WITH DEFORMABLE MEMS OPTICAL ELEMENT

MEMS CONTROL CIRCUIT AND PROJECTOR

Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device

Micromechanical component and method for producing a micromechanical component

Image display apparatus