Capacitive-based determination of micromirror status

Microelectromechanical system (MEMS) structure and method of formation

Semiconductor device package

PROTECTIVE BONDLINE CONTROL STRUCTURE

Actuator, optical scanning device, and manufacturing methods

Packaging for compact object-scanning modules

Microelectromechanical system cavity packaging

MEMS device formed by at least two bonded structural layers and manufacturing process thereof

Addressable display system for ICA monitoring and annunciation for certified applications running on a personal electronic device

Scanning reflector system

Resonance MEMS mirror control system

Reflective device

Encapsulant barrier

Projector configured to project an image towards a surface reflecting light towards an eye of a user and portable device comprising such projector

Method for producing optical components using functional elements

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Piezoelectric mirror system

Electromagnetic activated mirror array with fluid damping and micro-fabricated recess for magnet assembly

Tilted chip assembly for optical devices

MEMS device for large angle beamsteering

Actuator device

Ultra-thin planar lens-less camera

Actuator device

Micro-electro-mechanical device having tiltable structure, with detection of the position of the tiltable structure

Micromirror device having a mechanical stop

Devices for deflecting a laser beam in a two-dimensional manner

Interdigitating vertical dampers for MEMS-based actuators

Micromechanical constituent and method for adjusting an adjustable element

Methods and systems for microelectronic packaging

MEMS package

Optical scanner module and optical scanner control apparatus

Isolated protrusion/recession features in a micro electro mechanical system

Inferring ambient atmospheric temperature

Compact modular scanners for scanning laser devices

Optical power attenuator

Optical electronics device

Microelectromechanical device with multiple hinges

MIRROR DEVICE

Optical circuit switch mirror array crack protection

Tunable MEMS etalon

MANUFACTURING METHOD FOR A MICROMECHANICAL WINDOW STRUCTURE AND CORRESPONDING MICROMECHANICAL WINDOW STRUCTURE

Micro-electro-mechanical device with a movable structure, in particular micromirror, and manufacturing process thereof

Gasses for increasing yield and reliability of MEMS devices

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Micromechanical spring device and method for manufacturing a micromechanical spring device

Microelectromechanical system with spring for magnet placement

Circuit for detection of failure of movable MEMS mirror

Position detection method and optical module

Method for manufacturing a protective wafer including inclined optical windows and device

Micromechanical component and method for producing a micromechanical component

Integrated micro-channel heatsink in DMD substrate for enhanced cooling capacity

Resonance MEMS mirror control system

MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCLINED OPTICAL WINDOW AND CORRESPONDING MICROMECHANICAL DEVICE

Hermetically sealed MEMS mirror and method of manufacture

Electro-optical device, manufacturing method of electro-optical device, and electronic apparatus

Optical scanning apparatus having pivoting reflector and piezoelectric element

Process for manufacturing a MEMS micromirror device, and associated device

Device and method for quasi-resonant-mode voltage control of a switching converter

Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure

MEMS device formed by at least two bonded structural layers and manufacturing process thereof

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

ELECTROOPTICAL DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE

Display element, display device, or electronic device

Scanning mirror device and a method for manufacturing it

MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator

Actuator device and mirror drive device

Multi-frequency excitation

Electro-optic device, electronic apparatus, and method of manufacturing electro-optic device

Method for manufacturing a device having a three-dimensional magnetic structure

Electro-optical device, manufacturing method thereof, and electronic apparatus

Mirror group, in particular for a picoprojector, comprising micromirrors made using the MEMS technology

MEMS automatic alignment high-and-low comb tooth and manufacturing method thereof

Image display apparatus

Mirror driving device and driving method thereof

Micromirror array and method for the manufacture thereof

Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation

Micromechanical structure with biaxial actuation and corresponding MEMS device

MEMS hinges with enhanced rotatability

MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

Micromirror arrangement and projection device

Hinged MEMS diaphragm, and method of manufacture thereof

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

DEVICE AND METHOD FOR PRODUCING A DEVICE COMPRISING MICRO OR NANOSTRUCTURES

Micromirror device and projection device

Display device, method of manufacturing the same, display method, and wearable device

Suppression of undesired harmonics in MEMS mirror projector display

Electro-optical device, manufacturing method of electro-optical device, and electronic apparatus

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

Asymmetric MEMS mirror assembly

MICROMECHANICAL LAYER SYSTEM

Assembly body for micromirror chips, mirror device and production method for a mirror device

Optical electronic device and method of fabrication

Micro drive device and micro device using same

Drive apparatus

Tunable light emitting devices and applications thereof

Optical deflector and image forming apparatus including the same

MEMS device

Electromechanical systems device with hinges for reducing tilt instability

Manufacturing method thereof

Micromirror arrangement

METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING THEREOF

Electro-optical device, manufacturing method thereof, and electronic apparatus

Spatial light modulation element module, photolithographing apparatus, exposure apparatus, method of manufacturing spatial light modulation element module and method of manufacturing device

Optical module

Semiconductor device

Method for manufacturing electronic component

Actuator device and mirror drive device

Mirror drive device

In-plane-strain-actuated out-of-plane actuator

ELECTROMAGNETIC MEMS DEVICE

Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus

Mirror driving device

MEMS package structure and method for fabricating the same

Multi-pane windows including electrochromic devices and electromechanical systems devices

Production of micro-mechanical devices

Optical reflection element

Mirror drive device and driving method thereof

APPLICATIONS OF CONTACT-TRANSFER PRINTED MEMBRANES

MEMS package structure and manufacturing method thereof

Optical scanner, image display device, and head mounted display

MEMS DEVICE

Detecting failure of scanning mirror

APPLICATIONS OF CONTACT-TRANSFER PRINTED MEMBRANES

Projector, Oscillating Mirror Element Unit and Headup Display

Method for producing a wafer equipped with transparent plates

Electrostatically driven MEMS device

Optical projecting apparatus having two digital micro-mirror devices

Optical scanner, image display apparatus, and head-mount display

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

MEMS device

Electronic device and electronic apparatus

Micromechanical component and method for producing a micromechanical component

Microelectromechanical component and corresponding production method

Actuator, optical scanner, and image forming apparatus

Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

Micromechanical component and corresponding test method for a micromechanical component

Method for producing structured optical components

Micromirror

Micro-electromechanical system (MEMS) carrier

Method of forming a semiconductor device

Method of manufacturing a MEMS micro-mirror assembly

MEMS micro-mirror assembly

MEMS device and methods for manufacturing and using same

Light deflector with plate-like mirror forming a base of a recess in a movable member and a mass body on a non-deflecting surface of the mirror to adjust a resonent frequency of the movable member

MEMS device and electronic device having projector function

Electromagnetic actuator for optical device to reduce temperature and deformation

Device comprising a vibratably suspended optical element

Device comprising a spring and an element suspended thereon, and method for manufacturing same

MEMS scanning micromirror

MEMS scanning micromirror

Electronic component

Method for fabricating miniature structures or devices such as RF and microwave components

Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids

Metal elastic member, miniature machine, method of manufacturing miniature machine, swing control device and swing control method

Method for fabricating a self-aligned vertical comb drive structure

Fabrication of a floating rocker MEMS device for light modulation

MEMS device with independent rotation in two axes of rotation

MEMS DEVICE WITH INCREASED TILTING RANGE

DEVICES AND METHODS FOR PROTECTING ELECTROMECHANICAL DEVICE ARRAYS

Oscillation structure of micro actuator

Reflective device to scan light to project an image on a display surface

CAVITY LINERS FOR ELECTROMECHANICAL SYSTEMS DEVICES

Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly

Light deflector

TRANSPARENT THROUGH-GLASS VIA

MEMS nanostructures and methods of forming the same

COMB ELECTRODE STRUCTURE

Microelectromechanical system device with electrical interconnections and method for fabricating the same

SIDEWALL SPACERS ALONG CONDUCTIVE LINES

Optical reflection element

TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER

Method for manufacturing optical deflector for forming dicing street with double etching

Magnetic force drive device, optical scanning device, and image display device

MECHANICAL LAYER AND METHODS OF MAKING THE SAME

Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component

Methods of fabricating MEMS with spacers between plates and devices formed by same

Optical reflection element

Fabrication of robust electrothermal MEMS with fast thermal response

Microelectromechanical system with a center of mass balanced by a mirror substrate

Method for forming a mirror MEMS device

Pivotable MEMS device

Optical scanning device

Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids

ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS

Actuator, optical scanner, and image forming apparatus

Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display

Assembly having a displaceable part and method for operating an assembly having a displaceable part

Vibrating element, optical scanning device, actuator device, video projection apparatus, and image forming apparatus

Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display

SEAL ANCHOR STRUCTURES

DRIVING APPARATUS

DRIVING APPARATUS

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

MEMS device and methods for manufacturing and using same

ELECTROMECHANICAL DEVICES WITH VARIABLE MECHANICAL LAYERS

Electrochemical Fabrication Methods Incorporating Dielectric Materials and/or Using Dielectric Substrates

Releasing and post-releasing processes in fabrications for micromirror array devices

MICROELECTROMECHANICAL DEVICE WITH THERMAL EXPANSION BALANCING LAYER OR STIFFENING LAYER

Actuator, optical scanner, and image forming apparatus

Cover device for a micro-optomechanical component, and manufacturing method for such a cover device

Micromechanical element mobile along at least one axis of rotation

MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT

Method of manufacturing MEMS devices providing air gap control

Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner

Integration manufacturing process for MEMS device

Micromirror unit and method of making the same

ELECTROMECHANICAL SYSTEMS APPARATUSES AND METHODS FOR PROVIDING ROUGH SURFACES

Reduction of the dynamic deformation of translational mirrors using inertial masses

MEMS DEVICE AND COMPOSITE SUBSTRATE FOR AN MEMS DEVICE

Process for MEMS scanning mirror with mass remove from mirror backside

Method for forming a MEMS capacitor array

MULTICOMPONENT SACRIFICIAL STRUCTURE

Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same

Vapor deposition of anti-stiction layer for micromechanical devices

Via structure and method thereof

Via structure and method thereof

Method for fabricating miniature structures or devices such as RF and microwave components

Method for Fabricating a Micromirror

Micromechanical component and manufacturing method for a micromechanical component

Method and apparatus for providing high-fill-factor micromirror/micromirror arrays with surface mounting capability

Connecting structure for micromechanical oscillating devices

Process for eliminating delamination between amorphous silicon layers

Microstructural body and production method therefor

Reducing adherence in a MEMS device

Thermally activated micromirror and fabrication method

MEMS devices with multi-component sacrificial layers

Micro-optical device packaging system

MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME

Microactuator, optical device and exposure apparatus, and device manufacturing method

Optical scanner

MEMS device comprising oscillations measurements means

Integration manufacturing process for MEMS device

Moving structure and micro-mirror device using the same

Process for fabricating MEMS devices

Piezoelectric actuator, optical reflection element using the same and piezoelectric driver

System and method of manufacturing an electromechanical device by printing raised conductive contours

Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications

Micromechanical assembly having a displaceable component

Translating and rotation micro mechanism

Miniature RF and Microwave Components and Methods for Fabricating Such Components

Display device with at least one movable stop element

Dielectric etching

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Fabrication of a floating rocker MEMS device for light modulation

Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids

MEMS device and method of manufacturing the same

Micromechanical component having a swiveling part and method for producing same

MEMS device and fabrication method of the same

MEMS device having reduced deformations

Microsystem and method for the production of a microsystem

Optical scanner

Mesoscale and microscale device fabrication methods using split structures and alignment elements

MEMS device with independent rotation in two axes of rotation

Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component

Microactuator, optical device, display apparatus, exposure apparatus, and method for producing device

OPTIMIZED BI-DIRECTIONAL ELECTROSTATIC ACTUATORS

Methods of and Apparatus for Molding Structures Using Sacrificial Metal Patterns

Micro movable element and micro movable element array

Method for microcontact printing of MEMS

Optical module

Methods of fabricating MEMS with spacers between plates and devices formed by same

MEMS devices with multi-component sacrificial layers

MEMS device with controlled gas space chemistry

Micro-optical device packaging system

OSCILLATOR DEVICE AND METHOD OF MANUFACTURING THE SAME

Support structure for MEMS device and methods therefor

METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY

Support structure for MEMS device and methods therefor

Electrochemically Fabricated Hermetically Sealed Microstructures and Methods of and Apparatus for Producing Such Structures

Planarity of pixel mirrors

Micromirror device and micromirror array

Micro movable device and optical switching apparatus

Fabry-Perot type tunable filter and fabrication method thereof

Micro movable device and optical switching apparatus

Micro-mirror actuator having encapsulation capability and method for the production thereof

Multi-thickness layers for MEMS and mask-saving sequence for same

Actuator, image projection apparatus and production method for actuator

Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions

Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions

Housing for micro-mechanical and micro-optical components used in mobile applications

Actuator having deflected fixed comb electrodes and movable comb electrodes

Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices

METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS

Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same

Spring, mirror device, mirror array, and optical switch

Device comprising an ohmic via contact, and method of fabricating thereof

Method for manufacturing micro movable element

Production method for a micromechanical component, and a micromechanical component

Vibrating mirror element

Optical scanning device

Method of fabricating structure

Arrangement of micromechanical elements

Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

SELF-TILTED MICROMIRROR DEVICE

Method for structuring a device layer of a substrate

Oscillating, deflectable micromechanical element and method for use thereof

Process for eliminating delamination between amorphous silicon layers

Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant

Method of manufacturing MEMS devices providing air gap control

MEMS device with independent rotation in two axes of rotation