MEMS packaging with improved reaction to temperature changes

Method for filtering particles from a fluid

Structure and method for reducing thermal stresses on a torsional hinged device

Method and device for wafer scale packaging of optical devices using a scribe and break process

Micro-mirror with rotor structure

Effecting dynamic measurement of low mass devices

Method of making prestructure for MEMS systems

Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

Method and device for protecting interferometric modulators from electrostatic discharge

Methods of fabricating interferometric modulators by selectively removing a material

System and method of providing a regenerating protective coating in a MEMS device

System and method for display device with integrated desiccant

Method and system for providing MEMS device package with secondary seal

Methods of fabricating interferometric modulators by selectively removing a material

Method of making a reflective display device using thin film transistor production techniques

Method and device for packaging a substrate

System and method for display device with reinforcing substance

Method and system for xenon fluoride etching with enhanced efficiency

Flexure

Laser based method and device for forming spacer structures for packaging optical reflection devices

System and method of sensing actuation and release voltages of an interferometric modulator

Light modulator with concentric control-electrode structure

Method for stripping sacrificial layer in MEMS assembly

Method of producing a movable lens structure for a light shaping unit

Wafer-level hermetic micro-device packages

Systems and methods for three-dimensional lithography and nano-indentation

Method for making a microelectromechanical system using a flexure protection layer

Method for producing micromechanical and micro-optic components consisting of glass-type materials

Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth

Microdevice with movable microplatform and process for making thereof

Method for forming a chamber in an electronic device and device formed thereby

Component comprising submicron hollow spaces

Memory cell dual protection

Method for fabricating an interference display unit

Optical scanning using vibratory diffraction gratings

Optical device with a mobile optical element capable of interacting with an optical guide structure

Systems and methods for integration of heterogeneous circuit devices

Optical fiber terminator package

Structure of a micro electro mechanical system and the manufacturing method thereof

Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same

Hermetically sealed micro-device package with window

Process for producing microelectromechanical components and a housed microelectromechanical component

Method of forming a micromechanical structure

Method for manufacturing electrooptical device and apparatus for manufacturing the same, electrooptical device and electronic appliances

Etching process for micromachining crystalline materials and devices fabricated thereby

MEMS-tunable optical ring resonator

Structure for controlling flashover in MEMS devices

Wafer processing equipment having exposable sensing layers

Method and device using silicon substrate to glass substrate anodic bonding