GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE

Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators

MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESONANT OSCILLATIONS ABOUT AT LEAST TWO RESONANT AXES

Dual-Layer Micro-ribbon MEMS Light Modulator

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

MEMS OPTICAL MICROPHONE

MEMS OPTICAL MICROPHONE

MEMS optical device comprising a lens and an actuator for controlling the curvature of the lens, and related manufacturing process

TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATION, AND METHOD OF FABRICATION

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND METHODS

MEMS sensors and systems

COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROPERTIES

PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND MANUFACTURING PROCESS THEREOF

INFRARED RADIATOR ELEMENT AND METHODS

MEMS mirror system with slow light beam deflection using fast resonant oscillations about at least two resonant axes

SCANNING MIRROR ASSEMBLY WITH A SCANNING MIRROR ELEVATED ABOVE A MEMS ACTUATOR

Dual-layer micro-ribbon MEMS light modulator

Scanning mirror assembly with a scanning mirror elevated above a MEMS actuator

Microstructure and method of producing a microstructure

Capacitive angle sensing of electrostatic MEMS mirrors

TECHNIQUE TO DETECT THE ROTATIONAL DIRECTION OF RESONANT MEMS MIRRORS DRIVEN BY PARAMETRIC EXCITATION

Laser Marking System and Method

Optical MEMS based monitoring system

OPTICAL MEMS BASED INTRACRANIAL PRESSURE AND INTRACRANIAL TEMPERATURE MONITOR

FEEDBACK SENSOR FOR MEMS MIRROR

System and method of continuous, vibration-less, and bi-directional MEMS mirror motion via periodic driving force for rapid data acquisition

Integrated optical transducer and method for detecting dynamic pressure changes

MEMS mirror structure with backside skeleton

Optical sensing in MEMS package for LiDAR system

Lidar projection apparatus

SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS

Ultrafast photonic micro-systems

Micro-opto-mechanical system sensor, arrangement and manufacturing method

Low-height optoelectronic modules and packages

MEMS device comprising a membrane and an actuator

Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows

MEMS sensors and systems

MEMs phased-array for LiDAR applications

Asymmetric deformable diffractive grating modulator

Device for sensing a motion of a deflective surface

GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE

Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

MEMS optical device comprising a lens and an actuator for controlling the curvature of the lens, and related manufacturing process

MEMS image forming element with built-in voltage generator

Post-processing techniques on mems foundry fabricated devices for large angle beamsteering

Method for forming hermetic seals in MEMS devices

MEMS device comprising a membrane and an actuator

MEMS actuator package architecture

MEMS-BASED LEVERS AND THEIR USE FOR ALIGNMENT OF OPTICAL ELEMENTS

Display apparatus and method of manufacturing the same

Geometrically multiplexed RGB lasers in a scanning MEMS display system for HMDS

Method for forming hermetic seals in MEMS devices

Piezoelectric MEMS device having a suspended diaphragm and manufacturing process thereof

External resonance type laser module, analysis apparatus, method of driving external resonance type laser module, and non-transitory computer readable medium

MEMS DEVICES AND PROCESSES

MEMS device comprising a membrane and an actuator

Multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module

Method for protecting a MEMS unit against infrared investigations and MEMS unit

System and method for an optical MEMS transducer

Display device and manufacturing method therefor

Fluidic devices and methods of manufacturing the same

Camera modules using MEMS micro electrostatic pistontube actuators for autofocus (AF) and optical image stabilization (OIS)

Flexible membrane

Stress compensation for piezoelectric optical MEMS devices

Microelectromechanical systems (MEMS) and methods

Integrated optical probe card and system for batch testing of optical MEMS structures with in-plane optical axis using micro-optical bench components

Wafer processing equipment having exposable sensing layers

Display apparatus and method of manufacturing the same

MEMS-based levers and their use for alignment of optical elements

Multi-device transducer module, apparatus including the transducer module and method of manufacturing the transducer module

Pop-Up Laminate Structure Including Miniature Optical Components

Atomic Layer Deposition Layer for a Microelectromechanical system (MEMS) Device

Multiple MEMS device and methods

Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT)

Micromechanical component and method for producing same

Optomechanical non-reciprocal device

Electrical tuning of resonant scanning

MEMS actuator package architecture

Hybrid MEMS OLED display

Measuring device and method for determining mass and/or mechanical properties of a biological system

Open cavity package using chip-embedding technology

Display device

Microelectromechanical system for tuning lasers

Method for obtaining at least one structure approximating a sought structure by reflow

Anodic bonding of dielectric substrates

SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING DEVICE

Micro-electromechanical system (MEMS) carrier

Micro-optical bench device with highly/selectively-controlled optical surfaces

SYSTEMS AND METHODS FOR SELECTING AN OPERATING VOLTAGE OF A DISPLAY APPARATUS

Data-display glasses comprising an anti-glare screen

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

Adaptive optical filter for spectacle lenses

Autofocus system

DISPLAYS WITH SELECTIVE REFLECTORS AND COLOR CONVERSION MATERIAL

Reducing background fluorescence in MEMS materials by low energy ion beam treatment

APERTURE PLATE PERIMETER ROUTING USING ENCAPSULATED SPACER CONTACT

MEMS device

DISPLAY APPARATUS INCORPORATING EDGE SEALS FOR REDUCING MOISTURE INGRESS

OPTICAL SHUTTER BASED ON SUB-WAVELENGTH GRATINGS ACTUATED BY MICROELECTROMECHANICAL SYSTEMS

Device comprising a strained germanium membrane

Multi-pane windows including electrochromic devices and electromechanical systems devices

Method for producing a micromechanical component, and micromechanical component

Display device

Display device and method for manufacturing the same

MEMS-based levers and their use for alignment of optical elements

Optical-microwave-quantum transducer

Sloped structure, method for manufacturing sloped structure, and spectrum sensor

Display device having MEMS transmissive light valve and method for forming the same

BACKPLATE ELECTRODE SENSOR

MEMS autofocus actuator

Electromechanical systems device with protrusions to provide additional stable states

DISPLAY APPARATUS INCORPORATING VERTICALLY ORIENTED ELECTRICAL INTERCONNECTS

Surface mount actuator

MEMS DEVICE ENCAPSULATION WITH CORNER OR EDGE SEALS

PACKAGE STRUCTURE AND PACKAGING METHOD

ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS

GLASS-ENCAPSULATED PRESSURE SENSOR

Surface mount actuator

Electromechanical device with optical function separated from mechanical and electrical function

Electromechanical system structures with ribs having gaps

GLASS AS A SUBSTRATE MATERIAL AND A FINAL PACKAGE FOR MEMS AND IC DEVICES

GLASS AS A SUBSTRATE MATERIAL AND A FINAL PACKAGE FOR MEMS AND IC DEVICES

Sloped structure, method for manufacturing sloped structure, and spectrum sensor

Method of fabricating an integrated device

Alignment methods in fluid-filled MEMS displays

PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT

Display device and method for manufacturing the same

Display device

MEMS anchor and spacer structure

METHOD OF FABRICATING LIQUID FILM, METHOD OF ARRANGING NANO PARTICLES AND SUBSTRATE HAVING LIQUID THIN FILM FABRICATED USING THE SAME

ELECTROMECHANICAL DEVICE CONFIGURED TO MINIMIZE STRESS-RELATED DEFORMATION AND METHODS FOR FABRICATING SAME

Optomechanical non-reciprocal device

Laser rangefinder

Pixel via and methods of forming the same

CONFIGURABLE MICROMECHANICAL DIFFRACTIVE ELEMENT WITH ANTI STICTION BUMPS

System and method of sensing actuation and release voltages of an interferometric modulator

THREE-DIMENSIONAL OBLIQUE MICROSTRUCTURE WITH PRESS DOWN AND ENGAGEMENT MECHANISMS

MEMS CAVITY-COATING LAYERS AND METHODS

MEMS-based levers and their use for alignment of optical elements

ELECTROMECHANICAL DEVICES WITH VARIABLE MECHANICAL LAYERS

Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same

Actuator motion control features

Method for making a planar membrane

DIFFUSION BARRIER LAYER FOR MEMS DEVICES

PROCESS OF FORMING AN AIR GAP IN A MICROELECTROMECHANICAL SYSTEM DEVICE USING A LINER MATERIAL

MICRO DEVICE PACKAGING

Method and device for packaging a substrate

Nanostructured articles and methods of making nanostructured articles

Micromechanical element

Mechanical layer and methods of shaping the same

Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof

Electromechanical devices having support structures

Electromechanical device with optical function separated from mechanical and electrical function

Electromechanical device with optical function separated from mechanical and electrical function

INTERFEROMETRIC PIXEL WITH PATTERNED MECHANICAL LAYER

Micro-electro-mechanical system tiltable lens

MEMS devices having overlying support structures

STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL

Anti-stiction electrode

METHODS FOR FORMING LAYERS WITHIN A MEMS DEVICE USING LIFTOFF PROCESSES

Membrane, especially for an optical device having a deformable membrane

Method and device for wafer scale packaging of optical devices using a scribe and break process

PERIODIC DIMPLE ARRAY

Mechanical isolation for MEMS electrical contacts

Semiconductor dynamic quantity sensor and method of manufacturing the same

Electrothermal microactuator for large vertical displacement without tilt or lateral shift

Corrosion Protection and Lubrication of MEMS Devices

Encapsulated electromechanical devices

Micro scanner device and method for controlling micro scanner device

Method of creating MEMS device cavities by a non-etching process

Electromechanical device configured to minimize stress-related deformation and methods for fabricating same

MEMS cavity-coating layers and methods

Display device with openings between sub-pixels and method of making same

Equipment and methods for etching of MEMS

Display device with desiccant

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

Methods for forming layers within a MEMS device using liftoff processes

System and method for display device with reinforcing substance

Method of fabricating an integrated device

Method for producing a retention matrix comprising a functional liquid

Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control

Thermal conduction by encapsulation

Multi-MEMS Single Package MEMS Device

Electromechanical device with optical function separated from mechanical and electrical function

Housing for micro-mechanical and micro-optical components used in mobile applications

Method of fabricating a structure by anisotropic etching, and silicon substrate with an etching mask

Diffusion barrier layer for MEMS devices

MICRO-HOLE SUBSTRATES AND METHODS OF MANUFACTURING THE SAME

SPACER FOR MEMS DEVICE

Methods of fabricating MEMS devices having overlying support structures

Encapsulation methods for interferometric modulator and MEMS devices

Micro-posts having improved uniformity and a method of manufacture thereof

Oscillator and optical deflector having oscillator

Method for packing a display device and the device obtained thereof

Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof

Electrical conditioning of MEMS device and insulating layer thereof

MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES

Micro-Hole Substrates and Methods of Manufacturing the Same

Vibration elements

System and method of sensing actuation and release voltages of an interferometric modulator

METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY

Support structures for electromechanical systems and methods of fabricating the same

Minute structure and its manufacturing method

Molded Sensor Package and Assembly Method

MEMS package structure

Micro-oscillating element and method of making the same

Low cost hermetically sealed package

Periodic dimple array

Method of fabricating liquid film, method of arranging nano particles and substrate having liquid thin film fabricated using the same

Method and device for packaging a substrate

SYSTEM AND METHOD FOR MEASURING ADHESION FORCES IN MEMS DEVICES

MEMS device and interconnects for same

Fine grating and mold therefor

HERMETICALLY SEALED PACKAGE WITH WINDOW

Manufacturing Method for Micro Components

Movable device

Electromechanical device with optical function separated from mechanical and electrical function

MEMS devices having improved uniformity and methods for making them

Method of nano-patterning block copolymers and method of manufacturing polarizer and color filter using the same

Electromechanical device treatment with water vapor

Eliminate release etch attack by interface modification in sacrificial layers

Electromechanical system having a dielectric movable membrane and a mirror

Lid structure for microdevice and method of manufacture

Method and device for protecting interferometric modulators from electrostatic discharge

Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such

Micro oscillating device and micro oscillating device array

Microelectromechanical device and method utilizing conducting layers separated by stops

Electrode and interconnect materials for MEMS devices

Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device

System and method for measuring residual stress

MEMS cavity-coating layers and methods

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

MEMS devices with an etch stop layer

Microelectromechanical device and method utilizing a porous surface

Methods for etching layers within a MEMS device to achieve a tapered edge

Method and device for wafer scale packaging of optical devices using a scribe and break process

METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE STRUCTURE HAVING MICRO-ELECTRO-MECHANICAL SYSTEMS

Switches for shorting during MEMS etch release

Aluminum fluoride films for microelectromechanical system applications

Component comprising submicron hollow spaces

Package stiffener and a packaged device using the same

Method for quantifying over-etch of a conductive feature

Methods and devices for inhibiting tilting of a movable element in a MEMS device

METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR

Large area induced assembly of nanostructures

Sacrificial spacer process and resultant structure for MEMS support structure

Method for the Modification of a Microstructure of an Object

Micro-Displays and Their Manufacture

Structure of a micro electro mechanical system and the manufacturing method thereof

STRUCTURE OF A MICRO ELECTRO MECHANICAL SYSTEM AND THE MANUFACTURING METHOD THEREOF

Alignment methods in fluid-filled MEMS displays

Selective etching of MEMS using gaseous halides and reactive co-etchants

Microelectromechanical device and method utilizing a porous surface

Electromechanical device with optical function separated from mechanical and electrical function

Low temperature fabrication of conductive micro structures

MEMS device having distance stops

MEMS device having a recessed cavity and methods therefor

Patterning of mechanical layer in MEMS to reduce stresses at supports

Desiccant in a MEMS device

Optical device and method of forming the same

Electrode and interconnect materials for MEMS devices

Microelectromechanical device and method utilizing a porous surface

Packaging a MEMS device using a frame

MEMS devices and processes for packaging such devices

Electrical conditioning of MEMS device and insulating layer thereof

MEMS device having a layer movable at asymmetric rates

Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof

Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Method for wafer level packaging and fabricating cap structures

Method of creating MEMS device cavities by a non-etching process

Optical modulator

Method and apparatus for reducing back-glass deflection in an interferometric modulator display device

Comb-type electrode structure capable of large linear-displacement motion

Optical components and production thereof

MEMS device and interconnects for same

Diffusion barrier layer for MEMS devices

Physical quantity sensor having optical part and method for manufacturing the same

Spatial light modulator multi-layer mirror plate

Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure

MEMS devices having support structures

MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same

Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge

MEMS device having support structures configured to minimize stress-related deformation and methods for fabricating same

Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers

Electromechanical devices having overlying support structures

Electrostatic actuator, device comprising such actuators, microsystem comprising such a device and method for making such an actuator

Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator

Film stack for manufacturing micro-electromechanical systems (MEMS) devices

Integrated circuit device including a bifunctional core material in a chamber

Low cost hermetically sealed package

Micromirror array device with compliant adhesive

Micro-oscillating element and method of making the same

Backside coating for MEMS wafer

Optical scanner package and method of manufacturing the same

Method of fabricating a structure in a material

Profiled standoff structure and method for optical display package

Method for producing at least one small opening in a layer on a substrate and components produced according ot said method

Process for producing microelectromechanical components and a housed microelectromechanical component

Wafer-level hermetic micro-device packages