Patents-Review.com
ClassID:

83875 ⎘

B81B2203/0323 - CPC Classification

Classification description:

Basic microelectromechanical structures; Static structures Grooves

Sub-classes:
Recent Application in this class:
#1
20260132016
2026-05-14

PIEZOELECTRIC MICROELECTROMECHANICAL DEVICE WITH ANCHOR REINFORCEMENT

 #2
20250276894
2025-09-04

SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME

 #3
20250091313
2025-03-20

SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPARING THEREOF

 #4
20240425357
2024-12-26

Inertial Sensor

 #5
20240359973
2024-10-31

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

 #6
20240262678
2024-08-08

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE

 #7
20240174511
2024-05-30

MEMS DEVICE

 #8
20230416076
2023-12-28

Microelectromechanical Acoustic Pressure-Generating Device with Improved Drive

 #9
20230365403
2023-11-16

Semiconductor structure including scribe line structures and method for fabricating the same

 #10
20230016416
2023-01-19

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

 #11
20220363343
2022-11-17

Process for establishing uniform liquid films on polar and non-polar substrates

 #12
20220324700
2022-10-13

Photothermal conversion element, method of manufacturing the same, photothermal power generator, and microscopic object collection system

 #13
20220311112
2022-09-29

MEMS phase shifter and manufacturing method thereof

 #14
20210379858
2021-12-09

Substrates comprising nano-patterning surfaces and methods of preparing thereof

 #15
20200391994
2020-12-17

Use of an uncoupling structure for assembling a component having a casing

 #16
20200346926
2020-11-05

Semiconductor structure including scribe line structures and method for fabricating the same

 #17
20200325015
2020-10-15

MEMS chip structure

 #18
20200282693
2020-09-10

Substrates comprising nano-patterning surfaces and methods of preparing thereof

 #19
20190055117
2019-02-21

Method for producing a MEMS sensor, and MEMS sensor

 #20
20180244516
2018-08-30

MEMS DEVICE AND PROCESS

 #21
20170341933
2017-11-30

Semiconductor structure and method for fabricating the same

 #22
20170313582
2017-11-02

Dry scribing methods, devices and systems

 #23
20170217760
2017-08-03

MEMS device and process

 #24
20160246170
2016-08-25

Substrates comprising nano-patterning surfaces and methods of preparing thereof

 #25
20160244326
2016-08-25

Semiconductor element and methods for manufacturing the same

 #26
20150239217
2015-08-27

MICROCHIP AND METHOD FOR MANUFACTURING THE SAME

 #27
20150214100
2015-07-30

Methods of forming a substrate opening

 #28
20140044900
2014-02-13

Microfluidic device and microtube thereof

 #29
20130011618
2013-01-10

PHOTOCURABLE PERFLUOROPOLYETHERS FOR USE AS NOVEL MATERIALS IN MICROFLUIDIC DEVICES

 #30
20090250130
2009-10-08

Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing

 #31
20090220710
2009-09-03

Process of making a microtube and microfluidic devices formed therewith

 #32
20090165320
2009-07-02

Photocurable perfluoropolyethers for use as novel materials in microfluidic devices

 #33
20070286774
2007-12-13

MICRO FLUIDIC DEVICES AND METHODS FOR PRODUCING SAME

 #34
20070254278
2007-11-01

Photocurable perfluoropolyethers for use as novel materials in microfluidic devices

 #35
20060216654
2006-09-28

Method for etching microchannel networks within liquid crystal polymer substrates

 #36
20060175303
2006-08-10

Process of making a microtube and microfluidic devices formed therewith

 #37
20060040505
2006-02-23

Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith

 #38
20060037187
2006-02-23

Process of making a microtube and microfluidic devices formed therewith

 #39
20050118673
2005-06-02

Process for creating a 3-dimensional configuration on a substrate

 #40
20050070802
2005-03-31

Chemical sensor

 #41
15087732
2017-08-15

Dry scribing methods, devices and systems