ClassID:

83877

B81B2203/0338 - CPC Classification

Classification description:

Basic microelectromechanical structures; Static structures; Grooves Channels

Recent Application in this class:
#1
20260145931
2026-05-28

INERTIA MEASUREMENT UNIT AND METHOD FOR FORMING THE SAME

#2
20260097953
2026-04-09

Forming a Bonded Interface Using Plasma-Activated Surfaces

#3
20260034315
2026-02-05

MICROFLUIDIC DEVICES AND METHODS OF PRODUCING

#4
20260028614
2026-01-29

Isotachophoresis for Purification of Nucleic Acids

#5
20250388456
2025-12-25

MICROMECHANICAL PRESSURE SENSOR HAVING AT LEAST TWO MEMBRANES FOR DETERMINING A PRESSURE VALUE, AND CORRESPONDING METHOD

#6
20250376369
2025-12-11

DEVICES, SYSTEMS, AND METHODS INCLUDING MICRO- OR NANO- CANTILEVER STRUCTURES

#7
20250361141
2025-11-27

MICROELECTROMECHANICAL DEVICE FOR INTERACTION WITH A FLUID

#8
20250291176
2025-09-18

MIRROR ARRANGEMENT WITH COOLED MIRROR ELEMENTS AND LITHOGRAPHY SYSTEM

#9
20250268104
2025-08-21

A SEMICONDUCTOR STRUCTURE AND A MICROFLUIDIC SYSTEM THEREOF

#10
20250174566
2025-05-29

THREE-DIMENSIONAL MICRO-ELECTRO-MECHANICAL, MICROFLUIDIC, AND MICRO-OPTICAL SYSTEMS

#11
20250170576
2025-05-29

MICROFLUIDIC VALVE

#12
20250100872
2025-03-27

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

#13
20250059024
2025-02-20

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE AND MEMS MICROPHONE COMPRISING SAME

#14
20250011158
2025-01-09

MEMS Microphone

#15
20240409396
2024-12-12

LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP

#16
20240301395
2024-09-12

Isotachophoresis for Purification of Nucleic Acids

#17
20240280513
2024-08-22

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

#18
20240279048
2024-08-22

Micro-electro-mechanical system fluid control

#19
20240278285
2024-08-22

SHEAR WAVE MODE PIEZOELECTRIC RESONATOR

#20
20240207845
2024-06-27

MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC DEVICE

#21
20240092628
2024-03-21

MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THEREOF, AND MICROFLUIDIC DEVICE

#22
20240009668
2024-01-11

MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LAYER STACK

#23
20230404777
2023-12-21

A MICROFLUIDIC SENSOR

#24
20230382714
2023-11-30

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

#25
20230357748
2023-11-09

Isotachophoresis for purification of nucleic acids

#26
20230279876
2023-09-07

INERTIAL PUMPS

#27
20230241889
2023-08-03

Microfluidic passage with protective layer

#28
20230142172
2023-05-11

MICRODROPLET/BUBBLE GENERATION DEVICE

#29
20230137571
2023-05-04

MICROFLUIDIC CHIP

#30
20220388836
2022-12-08

MEMS CHIP AND ELECTRIC DEVICE

#31
20220373518
2022-11-24

DEVICES FOR MICRO GAS CHROMATOGRAPHY AND METHODS OF MAKING AND USES THEREOF

#32
20220371232
2022-11-24

METHOD OF MANUFACTURING A MICROFLUIDIC ARCHITECTURE

#33
20220340412
2022-10-27

Thin film getter structure having miniature heater and manufacturing method thereof

#34
20220324701
2022-10-13

Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel

#35
20220314216
2022-10-06

MICRO-FLUIDIC CHIP, LIBRARY PREPARATION CHIP AND METHOD FOR CONTROLLING AND DRIVING DROPLET

#36
20220280936
2022-09-08

Systems and methods for fabricating microfluidic devices

#37
20220258185
2022-08-18

MICROFLUIDIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

#38
20220250077
2022-08-11

DIGITAL MICROFLUIDICS DEVICE WITH DROPLET PROCESSING COMPONENTS

#39
20220241785
2022-08-04

Microfluidic chip and valve, production process and uses

#40
20220212916
2022-07-07

MICROCHIP

#41
20220203370
2022-06-30

Photoactivated Selective Release (PHASR) of Droplets from Microwell Arrays

#42
20220111645
2022-04-14

FLUID PROPELLING APPARATUS INCLUDING A HEAT SINK

#43
20220107302
2022-04-07

Calcite channel structures with heterogeneous wettability

#44
20220083081
2022-03-17

Mass flow control based on micro-electromechanical devices

#45
20220081282
2022-03-17

Micro-electromechanical device for use in a flow control apparatus

#46
20220040691
2022-02-10

Substrate assembly and method of bonding substrates

#47
20220032302
2022-02-03

Sample loading cartridge

#48
20220002149
2022-01-06

Three-dimensional features formed in molded panel

#49
20210388428
2021-12-16

METHOD AND DEVICE FOR AMPLIFYING AND DETECTING GENE

#50
20210354136
2021-11-18

Micro-pump fluidic strategy for fabricating perovskite microwire array-based devices on semiconductor platforms and method

#51
20210347634
2021-11-11

Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof

#52
20210276241
2021-09-09

THERMOFORMED, INJECTION MOLDED, AND/OR OVERMOLDED MICROFLUIDIC STRUCTURES AND TECHNIQUES FOR MAKING THE SAME

#53
20210253988
2021-08-19

Plate

#54
20210246013
2021-08-12

Connected field effect transistors

#55
20210237079
2021-08-05

Device with Flow Features for Sample Processing and Method of Use

#56
20210229977
2021-07-29

Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device

#57
20210215658
2021-07-15

Calcite channel structures with heterogeneous wettability

#58
20210162410
2021-06-03

Microfluidic device with integrated micro-structured electrodes and methods thereof

#59
20210146357
2021-05-20

Microfluidic chip and a method for the manufacture of a microfluidic chip

#60
20210114023
2021-04-22

DETECTION SYSTEM AND METHOD FOR PRODUCING SAME

#61
20210054361
2021-02-25

Isotachophoresis for purification of nucleic acids

#62
20210031194
2021-02-04

Fluid handling device and fluid handling system

#63
20210020576
2021-01-21

Three-dimensional micro-electro-mechanical, microfluidic, and micro-optical systems

#64
20210010488
2021-01-14

Inertial pumps

#65
20210008545
2021-01-14

LIQUID HANDLING DEVICE

#66
20200391994
2020-12-17

Use of an uncoupling structure for assembling a component having a casing

#67
20200389721
2020-12-10

MEMS microphone with acoustic relief channels

#68
20200369998
2020-11-26

MICROCHANNEL DEVICE

#69
20200306755
2020-10-01

MICROFLUIDIC CHIP AND MICROSCOPIC IMAGE SYSTEM

#70
20200282394
2020-09-10

Planarization layers over silicon dies

#71
20200216308
2020-07-09

Method of fabricating a micro machined channel

#72
20200209089
2020-07-02

Method for manufacturing micromechanical diaphragm sensors

#73
20200139368
2020-05-07

Micro channel structure

#74
20200095527
2020-03-26

Microchannel device

#75
20200061614
2020-02-27

Microfluidic chip and microfluidic device

#76
20190329250
2019-10-31

Systems and methods for fabricating microfluidic devices

#77
20190285582
2019-09-19

Nanochannel arrays and their preparation and use for high throughput macromolecular analysis

#78
20190240658
2019-08-08

System and method for forming a biological microdevice

#79
20190168222
2019-06-06

SINGLE-PARTICLE CAPTURING APPARATUS, SINGLE-PARTICLE CAPTURING SYSTEM, AND SINGLE-PARTICLE CAPTURING METHOD

#80
20190160462
2019-05-30

Fluidic microelectromechanical sensors/devices and fabrication methods thereof

#81
20190143325
2019-05-16

Plurality of filters

#82
20190127219
2019-05-02

Substrate assembly and related methods

#83
20190126272
2019-05-02

Substrate assembly and method of bonding substrates

#84
20190111429
2019-04-18

Fluidic device, system, method of detecting sample material and method of purifying sample material

#85
20190071663
2019-03-07

Isotachophoresis for purification of nucleic acids

#86
20190062146
2019-02-28

MEMS DEVICES AND PROCESSES

#87
20190039069
2019-02-07

Isotachophoresis for purification of nucleic acids

#88
20180346865
2018-12-06

Method for mechanical and hydrodynamic microfluidic transfection

#89
20180319655
2018-11-08

Fluid propelling apparatus including a heat sink

#90
20180304206
2018-10-25

Methods for creating fluidic cavities by transmembrane etching through porous membranes and structures made thereby and uses of such structures

#91
20180297028
2018-10-18

SELF-POWERED MICROFLUIDIC CHIP WITH MICRO-PATTERNED REAGENTS

#92
20180265353
2018-09-20

Three-dimensional features formed in molded panel

#93
20180221877
2018-08-09

Microfluidic device and sample analysis method

#94
20180221635
2018-08-09

IMPLANTABLE HYBRID LEAD AND METHOD OF MANUFACTURING THE SAME

#95
20180217122
2018-08-02

Systems and methods for genome mapping

#96
20180155669
2018-06-07

Device for mechanical and hydrodynamic microfluidic transfection

#97
20180043283
2018-02-15

Method of forming micro-pipes on a substrate and a structure formed thereof

#98
20180021774
2018-01-25

Direct bond transfer layers for manufacturable sealing of microfluidic chips

#99
20170341927
2017-11-30

Micromechanical sensor and method for producing a micromechanical sensor

#100
20170314704
2017-11-02

Liquid handling device

#101
20170297019
2017-10-19

Microscale fluidic devices and components having a fluid retention groove

#102
20170253476
2017-09-07

Integrated circuit package with sensor and method of making

#103
20170248573
2017-08-31

Systems and methods for integration of microfluidic tear collection and lateral flow analysis of analytes of interest

#104
20170233692
2017-08-17

Method for mechanical and hydrodynamic microfluidic transfection and apparatus therefor

#105
20170227479
2017-08-10

Measurement of liquid parameters using a microfluidic device

#106
20170157606
2017-06-08

Microfluidic chip, manufacturing method therefor and analysis device using same

#107
20170144152
2017-05-25

PROCESSES FOR RAPID MICROFABRICATION USING THERMOPLASTICS AND DEVICES THEREOF

#108
20170144149
2017-05-25

Direct bond transfer layers for manufacturable sealing of microfluidic chips

#109
20170067102
2017-03-09

Nanochannel arrays and their preparation and use for high throughput macromolecular analysis

#110
20170021323
2017-01-26

CHEMICAL SYNTHESIS DEVICE

#111
20160347607
2016-12-01

Integrated circuit package with sensor and method of making

#112
20160297098
2016-10-13

Photostructured chemical devices and methods for making same

#113
20160220996
2016-08-04

Nanochannel device with three dimensional gradient by single step etching for molecular detection

#114
20160129440
2016-05-12

Microfluidic structures for biomedical applications

#115
20160018435
2016-01-21

MEMS accelerometer

#116
20150329354
2015-11-19

Method for producing microchannel, and microchannel

#117
20150214100
2015-07-30

Methods of forming a substrate opening

#118
20150089803
2015-04-02

Photostructured chemical devices and methods for making same

#119
20140180251
2014-06-26

Nanochanneled device and related methods

#120
20140044900
2014-02-13

Microfluidic device and microtube thereof

#121
20130305519
2013-11-21

Method of manufacturing a probe comprising a cantilever with a conduit

#122
20130240483
2013-09-19

Nanochanneled device and related methods

#123
20130168901
2013-07-04

Methods for making photostructured acoustic devices

#124
20130061961
2013-03-14

Method for producing a microfluidic device

#125
20130004386
2013-01-03

microfluidic structures for biomedical applications

#126
20120322263
2012-12-20

Methods of etching single crystal silicon

#127
20120288422
2012-11-15

GLASS MICRO FLUIDIC DEVICE

#128
20120282682
2012-11-08

MICRO-CHANNEL STRUCTURE METHOD AND APPARATUS

#129
20120107194
2012-05-03

Channel and method of forming channels

#130
20120095443
2012-04-19

Nanochanneled device and related methods

#131
20120043649
2012-02-23

Method for making microchannels on a substrate, and substrate including such microchannels

#132
20120009097
2012-01-12

FLOW PATH DEVICE

#133
20120007150
2012-01-12

Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process

#134
20110260298
2011-10-27

Semiconductor structures including square cuts in single crystal silicon and method of forming same

#135
20110236659
2011-09-29

Method of manufacturing micro structure, and substrate structure

#136
20110236277
2011-09-29

MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME

#137
20110232794
2011-09-29

Flow channel structure and method of manufacturing same

#138
20110215430
2011-09-08

Micromechanical device with microfluidic lubricant channel

#139
20110193183
2011-08-11

Nanowire sensor, nanowire sensor array and method of fabricating the same

#140
20110171068
2011-07-14

Photostructured chemical devices and methods for making same

#141
20110170241
2011-07-14

Photostructured electronic devices and methods for making same

#142
20110169375
2011-07-14

Acoustic devices embedded in photostructurable ceramics

#143
20110167941
2011-07-14

Photostructured Mechanical Devices and Methods for Making Same

#144
20110151198
2011-06-23

Micro-Channel Chip and Manufacturing Method and Micro-Channel Chip

#145
20110142716
2011-06-16

Microchip and microchip manufacturing method

#146
20110140300
2011-06-16

Microfluid-System-Supporting Unit And Production Method Thereof

#147
20110137596
2011-06-09

QUALITY CONTROL METHOD AND MICRO/NANO-CHANNELED DEVICES

#148
20110136932
2011-06-09

Polymers, methods of use thereof, and methods of decomposition thereof

#149
20110135817
2011-06-09

Microfluid-System-Supporting Unit And Production Method Thereof

#150
20110135539
2011-06-09

Microchip and process for producing microchip

#151
20110133364
2011-06-09

Method for manufacturing micro-channel, die for molding micro-channel chip, and micro-channel chip

#152
20110132535
2011-06-09

Microfluid-System-Supporting Unit And Production Method Thereof

#153
20110123413
2011-05-26

Surfaces, including microfluidic channels, with controlled wetting properties

#154
20110122406
2011-05-26

Processes for rapid microfabrication using thermoplastics and devices thereof

#155
20110033338
2011-02-10

MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH NANO INTERSTICES AND FABRICATION METHOD THEREOF

#156
20110027873
2011-02-03

MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE

#157
20110014422
2011-01-20

Microchip and Method of Manufacturing Same

#158
20100326844
2010-12-30

CHANNEL FOR CAPILLARY FLOW, BIOSENSOR DEVICE AND METHOD FOR FORMING AN OBJECT HAVING A CHANNEL FOR CAPILLARY FLOW

#159
20100310437
2010-12-09

Microchip and Method for Manufacturing the Same

#160
20100277722
2010-11-04

Integrated flow cell with semiconductor oxide tubing

#161
20100221667
2010-09-02

Catalyst for microelectromechanical systems microreactors

#162
20100203294
2010-08-12

Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof

#163
20100173436
2010-07-08

Method of making BIOMEMS devices

#164
20100152699
2010-06-17

Nanochanneled device and related methods

#165
20100062142
2010-03-11

Fabrication method for hollow microneedles for drug delivery

#166
20100029508
2010-02-04

Nanochannel arrays and their preparation and use for high throughput macromolecular analysis

#167
20100013061
2010-01-21

Semiconductor structures including square cuts in single crystal silicon

#168
20090291264
2009-11-26

Microfluid-System-Supporting Unit And Production Method Thereof

#169
20090220710
2009-09-03

Process of making a microtube and microfluidic devices formed therewith

#170
20090181200
2009-07-16

Method of fabricating microfluidic structures for biomedical applications

#171
20090152326
2009-06-18

ULTRASONIC WELDING-BASED MICROFLUIDIC DEVICE AND METHOD OF MANUFACTURING THE SAME

#172
20090115094
2009-05-07

METHODS FOR MAKING CONTINUOUS NANOCHANNELS

#173
20090084496
2009-04-02

Method for fabricating a microfluidic component comprising at least one microchannel filled with nanostructures

#174
20090069458
2009-03-12

Polymers, Methods Of Use Thereof, And Methods Of Decomposition Thereof

#175
20090045473
2009-02-19

Devices having horizontally-disposed nanofabric articles and methods of making the same

#176
20080277006
2008-11-13

Fabrication of ultra-shallow channels for microfluidic devices and systems

#177
20080274301
2008-11-06

Method for producing patterns in a polymer layer

#178
20080230857
2008-09-25

SENSOR CHIP AND SUBSTRATE ASSEMBLY FOR MEMS DEVICE

#179
20080179696
2008-07-31

Micromechanical device with microfluidic lubricant channel

#180
20080152892
2008-06-26

Component comprising submicron hollow spaces

#181
20080044939
2008-02-21

LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON THE USE OF POROUS SEALED AIR CAVITY TECHNOLOGY OR MICROCHANNEL TECHNOLOGY

#182
20070286773
2007-12-13

Microfluidic Device

#183
20070278183
2007-12-06

Wet etch suitable for creating square cuts in si

#184
20070257357
2007-11-08

Forcing gas trapped between two components into cavities

#185
20070235826
2007-10-11

Devices having horizontally-disposed nanofabric articles and methods of making the same

#186
20070224727
2007-09-27

Methods of forming a diamond micro-channel structure and resulting devices

#187
20070202015
2007-08-30

Microfluidic device with controlled substrate conductivity

#188
20070148588
2007-06-28

METHODS OF RELEASING PHOTORESIST FILM FROM SUBSTRATE AND BONDING PHOTORESIST FILM WITH SECOND SUBSTRATE

#189
20070053799
2007-03-08

Microfluidic device with controlled substrate conductivity

#190
20070048192
2007-03-01

Integrated microfluidic vias, overpasses, underpasses, septums, microfuses, nested bioarrays and methods for fabricating the same

#191
20070039920
2007-02-22

Method of fabricating nanochannels and nanochannels thus fabricated

#192
20070031761
2007-02-08

Polymers, methods of use thereof, and methods of decomposition thereof

#193
20070018260
2007-01-25

Devices having vertically-disposed nanofabric articles and methods of making the same

#194
20070015179
2007-01-18

Plastic microfluidic chip and methods for isolation of nucleic acids from biological samples

#195
20060231521
2006-10-19

Technique for manufacturing micro-electro mechanical structures

#196
20060147679
2006-07-06

Method for filtering particles from a fluid

#197
20060128049
2006-06-15

Devices having vertically-disposed nanofabric articles and methods of making the same

#198
20060096691
2006-05-11

Method of producing a microfluidic device

#199
20060073687
2006-04-06

Method for maskless fabrication of self-aligned structures comprising a metal oxide

#200
20060057450
2006-03-16

Catalyst for microelectromechanical systems microreactors

#201
20050208211
2005-09-22

Component comprising submicron hollow spaces

#202
20050204821
2005-09-22

Micromechanical component having a diaphragm

#203
20050186629
2005-08-25

Nanopore device and methods of fabricating and using the same

#204
20050164118
2005-07-28

Method of joining a workpiece and a microstructure light exposure

#205
20050102721
2005-05-12

Apparatus and method for making a low capacitance artificial nanopore

#206
20050090034
2005-04-28

Method and apparatus for fabrication of passivated microfluidic structures in semiconductor substrates

#207
17354474
2024-03-12

Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electronic circuits