Method and system for MEMS devices

Electric component and method of manufacturing the electric component

MEMS packaging scheme using dielectric fence

MEMS and a protection structure thereof

SEMICONDUCTOR DEVICE AND METHOD

Sensor and method for its production

Method for forming MEMS devices having low contact resistance and devices obtained thereof

MEMS INTEGRATED CHIP WITH CROSS-AREA INTERCONNECTION

MEMS SENSOR AND ELECTRONIC APPARATUS

Direct contact heat control of micro structures

Front end micro cavity

Cointegrated MEMS sensor and method

Method of forming a MEMS topped integrated circuit with a stress relief layer

Use of field oxidation to simplify chamber fabrication in microfluidic devices

Method for producing a component, and sensor element

Electronic device and method for manufacturing thereof

Micro-electro-mechanical system device

Stacked MEMS device

CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining

MEMS-topped integrated circuit with a stress relief layer

Methods of Making, Positioning and Orienting Nanostructures, Nanostructure Arrays and Nanostructure Devices

Method for manufacturing a microelectromechanical component, and a microelectromechanical component

Methods of positioning and/or orienting nanostructures

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same

Methods of positioning and/or orienting nanostructures

Electromechanical element, electric circuit device and production method of those

Stacked MEMS device

Semiconductor device carrying micro electro mechanical system

Microelectromechanical devices and fabrication methods

Electronic device and method for manufacturing thereof

Method for making an electromechanical component on a plane substrate

Monolithic MEMS and integrated circuit device having a barrier and method of fabricating the same

Method for sealing and backside releasing of microelectromechanical systems

Microelectromechanical component

Integrated tire pressure sensor system

Method for manufacturing a microelectromechanical component, and a microelectromechanical component

Method for containing a device and a corresponding device

MEMS pressure sensing device

Method of fabricating silicon-based MEMS devices

Microelectromechanical systems, and devices having thin film encapsulated mechanical structures

Method of fabricating silicon-based MEMS devices

Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices

Circuit device

Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Microelectromechanical systems having trench isolated contacts, and methods for fabricating same

Thin MEMS die

Monolithic integration of MEMS and IC devices

Structure and formation method of semiconductor device structure

CMOS and pressure sensor integrated on a chip and fabrication method

Dry scribing methods, devices and systems

Semiconductor structure and manufacturing method thereof

Semiconductor structure with micro-electro-mechanical system devices

Sensor device and method for making thereof

Integrated MEMS-CMOS devices and methods for fabricating MEMS devices and CMOS devices

Integration of electromechanical and CMOS devices in front-end-of-line using replacement metal gate process flow