83911 ⎘
Microstructural systems or auxiliary parts thereof; Packages; Arrangements for connecting external electrical signals to mechanical structures inside the package Arrangements not provided for in groups -
SELF-CONFIGURING CONTACT ARRAYS FOR INTERFACING WITH ELECTRIC CIRCUITS AND FABRIC CARRIERS
#2BOTTOM PACKAGE EXPOSED DIE MEMS PRESSURE SENSOR INTEGRATED CIRCUIT PACKAGE DESIGN
#3SEMICONDUCTOR DEVICE MOUNTED ON A SYSTEM BOARD
#4SEMICONDUCTOR PACKAGE WITH METAL COLUMN MOLD BARRIER
#5INTEGRATED ULTRASONIC TRANSDUCERS
#6Ovenized MEMS
#7MICROELECTRONICS PACKAGE WITH VERTICALLY STACKED MEMS DEVICE AND CONTROLLER DEVICE
#8SENSOR DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
#9MEMS Element and Vibration-Driven Energy Harvesting Device
#10Integrated ultrasonic transducers
#11FLIP CHIP MICROMIRROR TECHNOLOGY
#12Method of manufacturing a sensor device and moulding support structure
#13INTEGRATED CIRCUIT PACKAGE WITH WARPAGE CONTROL USING CAVITY FORMED IN LAMINATED SUBSTRATE BELOW THE INTEGRATED CIRCUIT DIE
#14Semiconductor package with metal column mold barrier
#15SEMICONDUCTOR DEVICE MOUNTED ON A SYSTEM BOARD
#16Ovenized MEMS
#17Sensing device and method for manufacturing sensing device
#18Semiconductor device and method of forming microelectromechanical systems (MEMS) package
#19BOTTOM PACKAGE EXPOSED DIE MEMS PRESSURE SENSOR INTEGRATED CIRCUIT PACKAGE DESIGN
#20Semiconductor package and method for manufacturing the same
#21MEMS package with shock and vibration protection
#22Reducing delamination in sensor package
#23Sensor and package assembly thereof
#24Semiconductor package with built-in vibration isolation, thermal stability, and connector decoupling
#25Micromechanical sensor device having an ASIC chip integrated into a capping unit and corresponding manufacturing method
#26Sound producing package structure and method for packaging sound producing package structure
#27THROUGH-SUBSTRATE CONDUCTOR SUPPORT
#28SENSOR DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
#29Packaged die and assembling method
#30SELF-CONFIGURING CONTACT ARRAYS FOR INTERFACING WITH ELECTRIC CIRCUITS AND FABRIC CARRIERS
#31Semiconductor package structures and methods of manufacturing the same
#32Microelectronics package with vertically stacked MEMS device and controller device
#33Sensor systems and methods for providing sensor systems
#34Semiconductor package structure and method for manufacturing the same
#35Integrated ultrasonic transducers
#36Semiconductor device packages and methods of manufacturing the same
#37SEMICONDUCTOR DEVICE PACKAGES AND METHODS OF MANUFACTURING THE SAME
#38Method of making ohmic contact on low doped bulk silicon for optical alignment
#39Method of making ohmic contact on low doped bulk silicon for optical alignment
#40Semiconductor package structure and method for manufacturing the same
#41ELECTRONIC DEVICE
#42Semiconductor device and method of forming microelectromechanical systems (MEMS) package
#43INERTIAL SENSOR
#44MEMS devices including MEMS dies and connectors thereto
#45Optical scanner module and method for fabricating optical scanner module
#46Method of manufacturing a sensor device and moulding support structure
#47Micromechanical device and method for manufacturing a micromechanical device
#48Molded lead frame sensor package
#49Ovenized MEMS
#50Bonding pad layer system, gas sensor and method for manufacturing a gas sensor
#51Shielded semiconductor device and lead frame therefor
#52Sensor device with flip-chip die and interposer
#53Wafer-level fan-out package with enhanced performance
#54Semiconductor package and method for manufacturing the same
#55Method of making ohmic contact on low doped bulk silicon for optical alignment
#56SENSOR DEVICES AND METHODS FOR MANUFACTURING THE SAME
#57Terminal assembly structure of MEMS microphone
#58LIQUID PROOF PRESSURE SENSOR
#59MEMS devices including MEMS dies and connectors thereto
#60Bottom package exposed die MEMS pressure sensor integrated circuit package design
#61Through-substrate conductor support
#62Wafer level package for a mems sensor device and corresponding manufacturing process
#63Reducing crosstalk in a mixed-signal multi-chip MEMS device package
#64Method for fabricating MEMS device integrated with a semiconductor integrated circuit
#65Device with terminal-containing sensor
#66Integrated ultrasonic transducers
#67EMC PROTECTION OF A SEMICONDUCTOR COMPONENT
#68Pressure sensor assembly mounted to a ceramic substrate
#69Semiconductor device and method of forming microelectromechanical systems (MEMS) package
#70Optical scanner module and optical scanner control apparatus
#71MEMS devices including MEMS dies and connectors thereto
#72Through-substrate conductor support
#73MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof
#74Wafer level package for a MEMS sensor device and corresponding manufacturing process
#75Bottom package exposed die MEMS pressure sensor integrated circuit package design
#76Reconstructed wafer based devices with embedded environmental sensors and process for making same
#77Integrated package containing MEMS acoustic sensor and pressure sensor
#78Electric component with sensitive component structures and method for producing an electric component with sensitive component structures
#79Integrated circuit package with sensor and method of making
#80Semiconductor pressure sensor for harsh media application
#81Microelectronic component arrangement and production method for a microelectronic component arrangement
#82Open cavity package using chip-embedding technology
#83MEMS devices including MEMS dies and connectors thereto
#84Integrated circuit package with sensor and method of making
#85Sensor package
#86Wafer level package for a MEMS sensor device and corresponding manufacturing process
#87Electronic device with stacked chips
#88Microelectromechanical system device with internal direct electric coupling
#89Internal electrical contact for enclosed MEMS devices
#90Sensor apparatus and method for producing a sensor apparatus
#91Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit
#92MEMS devices and methods for forming same
#93Package structure and fabrication method thereof
#94Method of manufacturing a MEMS micro-mirror assembly
#95MEMS micro-mirror assembly
#96Microelectromechanical device and a method of manufacturing
#97Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit
#98Fabrication method for a chip package
#99MEMS devices
#100Chip package and manufacturing method thereof
#101PACKAGE STRUCTURE HAVING MEMS ELEMENT AND FABRICATION METHOD THEREOF
#102Methods for forming MEMS devices
#103Semiconductor package and method of fabricating the same
#104DIE-CUT THROUGH-GLASS VIA AND METHODS FOR FORMING SAME
#105Package structure having MEMS elements and fabrication method thereof
#106Method for connecting a plurality of unpackaged substrates
#107Sensor module having an electromagnetically shielded electrical component
#108Device and method for producing a device
#109Microfluidic system for purposes of analysis and diagnosis and corresponding method for producing a microfluidic system
#110Microelectromechanical systems embedded in a substrate
#111Chip package and manufacturing method thereof
#112Chip package and fabrication method thereof
#113PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PHYSICAL QUANTITY SENSOR
#114System and method of manufacturing an electromechanical device by printing raised conductive contours
#115Semiconductor device and manufacturing method therefor
#116CONNECTING MICROSIZED DEVICES USING ABLATIVE FILMS
#117CONNECTING MICROSIZED DEVICES USING ABLATIVE FILMS
#118MICROELECRONIC ASSEMBLY AND METHOD FOR FORMING THE SAME
#119Functional element package and fabrication method therefor
#120Micro movable device
#121THREE-DIMENSIONAL MODULE
#122Method for manufacturing an electronic component package and electronic component package
#123Connecting microsized devices using ablative films
#124Electrical component having external contacting
#125Flip-chip assembly of protected micromechanical devices
#126Method of fabricating a semiconductor chip package
#127Wafer level package and method for making the same
#128Semiconductor chip package
#129Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level
#130Method of making a substrate contact for a capped MEMS at the package level
#131Back chamber volume enlargement microphone package