83759 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements; Angular deflection Increasing angular deflection
MULTIDIMENSIONAL CANTILEVERS AND STRESS-PROGRAMMABLE OUT-OF-PLANE INTERPOSERS FOR 3-D PHOTONIC INTEGRATION AND CONTROL
#2MEMS DEVICE HAVING A TILTABLE STRUCTURE AND QUASI-STATIC PIEZOELECTRIC ACTUATION, IN PARTICULAR MICROMIRROR, WITH IMPROVED EFFICIENCY
#3DEVICES, SYSTEMS, AND METHODS INCLUDING MICRO- OR NANO- CANTILEVER STRUCTURES
#4MEMS transducer having a carrier layer and at least two piezoelectric layers
#5MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
#6Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt, and Piston Beamsteering
#7MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTABILITY
#8OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE, AND IMAGE DRAWING SYSTEM
#9Method to estimate phase and amplitude for control of a resonant MEMS mirror
#10Movable apparatus
#11COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE AND LARGE OUT-OF-PLANE TRANSLATIONAL DISPLACEMENT
#12MEMS Device for Large Angle Beamsteering
#13Mems scanner suspension system enabling high frequency and high mechanical tilt angle for large mirrors
#14Bipolar staggered comb drive for bidirectional MEMS actuation
#15Two degree-of-freedom actuator and MEMS device
#16Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#17Bipolar staggered comb drive for bidirectional MEMS actuation
#18MEMS electrothermal actuator for large angle beamsteering
#19Micromechanical component for a pressure sensor device
#20Micromechanical z-inertial sensor
#21Displacement increasing mechanism and shutter device
#22MEMS device for large angle beamsteering
#23Mirror driving device and driving method thereof
#24MEMS hinges with enhanced rotatability
#25MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
#26Gyroscope structure and gyroscope
#27Micromirror arrangement
#28MEMS hinges with enhanced rotatability
#29Optical reflection element
#30Mirror drive device and driving method thereof
#31Ring gyroscope structure and gyroscope
#32Gyroscope structure and gyroscope
#33Micromirror
#34MEMS device and methods for manufacturing and using same
#35MEMS DEVICE WITH INCREASED TILTING RANGE
#36Vibrating element having meandering shape, and optical reflection element
#37Pivotable MEMS device
#38Assembly having a displaceable part and method for operating an assembly having a displaceable part
#39MEMS device and methods for manufacturing and using same
#40Vertical Comb Drive and Uses Thereof