83758 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements Angular deflection
Sub-classes:MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
#2Driving circuits for a piezoelectric microelectromechanical system mirror
#3Mirror assembly for light steering with reduced finger thickness
#4Mirror assembly for light steering with flexible support structure
#5Vibrating element
#6Vibrating mirror element and optical scanner
#7Force-balanced micromirror with electromagnetic actuation
#8MEMS image forming element with built-in voltage generator
#9Optical module
#10Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis
#11METHOD FOR ACTIVATING AN ACTUATOR UNIT AND MICROMECHANICAL DEVICE
#12Micromirror arrangement and projection device
#13Silicon-on-sapphire device with minimal thermal strain preload and enhanced stability at high temperature
#14Detecting failure of scanning mirror
#15Hybrid integrated component and method for the manufacture thereof
#16Particle processing device using centrifugal force
#17Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#18Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#19Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#20Cascaded micromechanical actuator structure
#21Micro-electro-mechanical system tiltable lens
#22Micro scanner device and method for controlling micro scanner device
#23Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component
#24Micro-structure
#25Micromirror device and micromirror array
#26Actuator having deflected fixed comb electrodes and movable comb electrodes
#27Spring, mirror device, mirror array, and optical switch
#28Vibrating mirror element
#29MICRO MIRRORS HAVING IMPROVED HINGES
#30MEMS device with an angular vertical comb actuator
#31Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
#32Micromechanical actuator having multiple joints
#33Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#34Out-of-plane electrostatic actuator
#35MEMS actuator
#36Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein
#37Actuator having fixed and movable comb electrodes