ClassID:

83758

B81B3/004 - CPC Classification

Classification description:

Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements Angular deflection

Sub-classes:
Recent Application in this class:
#1
20250083948
2025-03-13

MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD

#2
20220411255
2022-12-29

Driving circuits for a piezoelectric microelectromechanical system mirror

#3
20210396850
2021-12-23

Mirror assembly for light steering with reduced finger thickness

#4
20210396849
2021-12-23

Mirror assembly for light steering with flexible support structure

#5
20210382297
2021-12-09

Vibrating element

#6
20210331911
2021-10-28

Vibrating mirror element and optical scanner

#7
20210048662
2021-02-18

Force-balanced micromirror with electromagnetic actuation

#8
20200317504
2020-10-08

MEMS image forming element with built-in voltage generator

#9
20200049975
2020-02-13

Optical module

#10
20190359478
2019-11-28

Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis

#11
20180129016
2018-05-10

METHOD FOR ACTIVATING AN ACTUATOR UNIT AND MICROMECHANICAL DEVICE

#12
20170146792
2017-05-25

Micromirror arrangement and projection device

#13
20160289061
2016-10-06

Silicon-on-sapphire device with minimal thermal strain preload and enhanced stability at high temperature

#14
20150276547
2015-10-01

Detecting failure of scanning mirror

#15
20130285166
2013-10-31

Hybrid integrated component and method for the manufacture thereof

#16
20120325347
2012-12-27

Particle processing device using centrifugal force

#17
20120162737
2012-06-28

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

#18
20120162736
2012-06-28

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

#19
20120162735
2012-06-28

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

#20
20110248601
2011-10-13

Cascaded micromechanical actuator structure

#21
20110134504
2011-06-09

Micro-electro-mechanical system tiltable lens

#22
20100277783
2010-11-04

Micro scanner device and method for controlling micro scanner device

#23
20100264997
2010-10-21

Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component

#24
20100245964
2010-09-30

Micro-structure

#25
20100118372
2010-05-13

Micromirror device and micromirror array

#26
20100045137
2010-02-25

Actuator having deflected fixed comb electrodes and movable comb electrodes

#27
20100033856
2010-02-11

Spring, mirror device, mirror array, and optical switch

#28
20100014143
2010-01-21

Vibrating mirror element

#29
20090251760
2009-10-08

MICRO MIRRORS HAVING IMPROVED HINGES

#30
20080316577
2008-12-25

MEMS device with an angular vertical comb actuator

#31
20080151345
2008-06-26

Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore

#32
20080151342
2008-06-26

Micromechanical actuator having multiple joints

#33
20080100899
2008-05-01

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

#34
20070158767
2007-07-12

Out-of-plane electrostatic actuator

#35
20070068308
2007-03-29

MEMS actuator

#36
20070041682
2007-02-22

Micro mirror unit and its manufacturing process, and optical switch with the micro mirror unit employed therein

#37
20060279169
2006-12-14

Actuator having fixed and movable comb electrodes