METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS HAVING SUCH A LAYERED STRUCTURE

METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS WITH SUCH A LAYERED STRUCTURE

MICROSCANNER HAVING A DEFLECTING ELEMENT AND HAVING SPRING ELEMENTS CURVED TOWARDS SAME FOR SUSPENSION OF THE DEFLECTING ELEMENT IN A MANNER CAPABLE OF OSCILLATION

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

Actuator device and method for manufacturing actuator device

Optical device production method

MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS

Optical device

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

A SCANNING MEMS MIRROR DEVICE

MEMS chip

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

Optical device production method

METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS

Reduction of ringing and intermodulation distortion in a MEMS device

MICROMECHANICAL OSCILLATION SYSTEM

Micro-electromechanical transducer

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

ELECTROMECHANICAL MICROSYSTEM

ELECTROMECHANICAL MICROSYSTEM

Methods to characterize wellbore fluid composition and provide optimal additive dosing using MEMS technology

System and method of continuous, vibration-less, and bi-directional MEMS mirror motion via periodic driving force for rapid data acquisition

Structures for piezoelectric actuator to increase displacement and maintain stiffness

MEMS device with a dual hinge structure

Sensor and electronic device

Methods to characterize wellbore fluid composition and provide optimal additive dosing using MEMS technology

Light deflection device

Actuator device and method for manufacturing actuator device

Mirror device

Light deflector, deflecting device, distance measurement device, image projection device, and vehicle

Micro-mirror MEMS system

Optical device

Optical device

Optical device

Micro-electromechanical transducer

MEMS device including spurious mode suppression and corresponding operating method

MICROMECHANICAL COIL DEVICE

MEMS device having a tiltable suspended structure controlled by electromagnetic actuation

MEMS frequency-tuning springs

MEMS-BASED LEVERS AND THEIR USE FOR ALIGNMENT OF OPTICAL ELEMENTS

Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect

Micromechanical component and method for producing a micromechanical component

Resonator and resonance device

PHYSICAL QUANTITY SENSOR

Resonant biaxial MEMS reflector with elongated piezoelectric actuators, and projective MEMS system including the same

Micro-electro-mechanical device having tiltable structure, with detection of the position of the tiltable structure

Interdigitating vertical dampers for MEMS-based actuators

MIRROR DEVICE

Micro-electromechanical transducer

Microelectronic structure comprising means of control of viscous damping

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Micromechanical spring device and method for manufacturing a micromechanical spring device

Multilayer MEMS cantilevers

Resonant biaxial MEMS reflector with piezoelectric actuators, and projective MEMS system including the same

Device and method for quasi-resonant-mode voltage control of a switching converter

Micro-electro-mechanical device having a tiltable structure, with detection of the position of the tiltable structure

MEMS-based levers and their use for alignment of optical elements

Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface

OPTICAL ELEMENT

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

MEMS grid for manipulating structural parameters of MEMS devices

Actuator device and mirror drive device

Electrode for a microelectromechanical device

Mechanical resonator with a spring-mass system comprising a phase-change material

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Microelectromechanical device and system with low-impedance resistive transducer

Suppression of undesired harmonics in MEMS mirror projector display

Drive apparatus

MICROMECHANICAL COMPONENT HAVING A SPLIT, GALVANICALLY ISOLATED ACTIVE STRUCTURE, AND METHOD FOR OPERATING SUCH A COMPONENT

Method for manufacturing resistive element, method for manufacturing pressure sensor element, pressure sensor element, pressure sensor, altimeter, electronic apparatus, and moving object

Mechanical resonator with a spring-mass system comprising a phase-change material

Mechanical resonator with a spring-mass system comprising a phase-change material

Microelectromechanical structure and device

Actuator device and mirror drive device

Light deflector, two-dimensional image display apparatus, optical scanner, and image forming apparatus

Resonance Frequency Adjustment Module

Precise definition of transducer electrodes

Scanning micromirror with improved performance and related electronic device

Micro-electromechanical apparatus utilizing folded spring for rotary element

Actuator with plurality of torsion bars having varying spring constant

Optical scanner, image display apparatus, and head-mount display

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

Microelectromechanical component and corresponding production method

Optical scanning apparatus, image forming apparatus including the optical scanning apparatus, and method of adjusting resonance frequency at oscillating mirror unit in the optical scanning apparatus

MEMS-based levers and their use for alignment of optical elements

Micromechanical sensor and method for manufacturing a micromechanical sensor

Pyroelectric aluminum nitride MEMS infrared sensor with selective wavelength infrared absorber

Light deflector with plate-like mirror forming a base of a recess in a movable member and a mass body on a non-deflecting surface of the mirror to adjust a resonent frequency of the movable member

Device comprising a vibratably suspended optical element

Oscillation structure of micro actuator

COMB ELECTRODE STRUCTURE

Optical reflection element

MEMS-based levers and their use for alignment of optical elements

Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner

Process for MEMS scanning mirror with mass remove from mirror backside

Inertial sensor and method for manufacturing an inertial sensor

Accelerometer with reduced extraneous vibrations owing to improved electrode shape

Torsional hinged MEMS device

Micromechanical actuator with multiple-plane comb electrodes and methods of making

Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth

Micro mirror device with adjacently suspended spring and method for the same

Micromechanical actuator with multiple-plane comb electrodes and methods of making

MEMS mirror device and optical disk apparatus