83761 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements; Angular deflection Constitution or structural means for controlling angular deflection not provided for in groups -
LIGHT DEFLECTOR
#2Micromachined mirror assembly with asymmetric structure
#3MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STEERED HIGH-POWER LASER TRANSMITTER
#4Light reflecting element and spatial light modulator
#5Micromachined mirror assembly with asymmetric structure
#6Plate Spring
#7Board mounted microelectromechanic system (MEMS) sensors for motor diagnostics and analytics
#8Gyroscope
#9Method for producing a rolled-up electrical or electronic component
#10ELECTROOPTICAL DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE
#11MEMS anti-phase vibratory gyroscope
#12Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation
#13Sensor for detecting angular velocity
#14In-plane-strain-actuated out-of-plane actuator
#15MEMS-sensor
#16Sensor and method for manufacturing a sensor
#17Micromechanical component and method for producing a micromechanical component
#18Compliant structures with time-varying moment of inertia
#19Light deflector
#20Micromechanical element