83762 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements For defining the movement, i.e. structures that guide or limit the movement of an element
Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”
#302Multistage proof-mass movement deceleration within MEMS structures
#303Arrangement of micromechanical elements
#304Micromechanical Acceleration Sensor
#305Planar microelectromechanical device having a stopper structure for out-of-plane movements
#306Optical deflector
#307Microactuator, optical device and exposure apparatus, and device manufacturing method
#308Acceleration sensor
#309Mems moving platform with lateral zipping actuators
#310Inertial sensor
#311Actuation microsystem and method of producing same
#312MEMS device and fabrication method of the same
#313Z-axis microelectromechanical device with improved stopper structure
#314Methods and devices for inhibiting tilting of a movable element in a MEMS device
#315METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR
#316Micro-electromechanical device
#317Silicon microphone with impact proof structure
#318Electromechanical device with optical function separated from mechanical and electrical function
#319MEMS device having distance stops
#320Tiltable-body apparatus, and method of fabricating the same
#321MICROELECTROMECHANICAL STEP ACTUATOR CAPABLE OF BOTH ANALOG AND DIGITAL MOVEMENTS
#322Micro actuator having tilt and vertical displacement and device having such micro actuator
#323Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch
#324Integrateable capacitors and microcoils and methods of making thereof
#325MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
#326Spatial light modulator multi-layer mirror plate
#327Heat activated nanometer-scale pump
#328Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
#329Quantum tunnelling transducer device
#330Vibration-type piezoelectric acceleration sensor element and vibration-type piezoelectric acceleration sensor therewith
#331Actuator with Alternating Steady Voltage Combs and Variable Voltage Combs
#332Tiltable-body apparatus, and method of fabricating the same
#333Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
#334Acceleration sensor manufacturable by simplified method
#335Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
#336Buckling actuator
#337Acceleration sensor
#338Inertial sensor
#339Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
#340Internally shock caged serpentine flexure for micro-machined accelerometer
#341Method for supplying multiple voltages to a movable part of a MEMS device
#342Internally shock caged serpentine flexure for micro-machined accelerometer
#343Tiltable-body apparatus, and method of fabricating the same
#344Microstructure with movable mass
#345Method of manufacture and assembly of XY flexure mechanism assembly
#346Four degrees of freedom piston-tube electrostatic actuator
#347Micro-electro-mechanical system (MEMS) chip