83762 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for controlling the movement of the flexible or deformable elements For defining the movement, i.e. structures that guide or limit the movement of an element
DESIGNS AND METHODS FOR MAUFACTURING OUT-OF-PLANE ROTATION STOPS FOR MEMS DEVICES
#2BUMPSTOP PROCESS FOR A MOTION SENSOR
#3Transducer
#4MEMS MICROPHONE CHIP
#5MICROELECTROMECHANICAL ACCELERATION SENSOR
#6MEMS OSCILLATING ELEMENT AND METHOD FOR OPERATING A MEMS OSCILLATING ELEMENT
#73-AXIS ANGULAR ACCELEROMETER
#8THREE-AXIS GYROSCOPE
#9MEMS DEVICE
#10MICRO-ELECTROMECHANICAL GYROSCOPE WITH IN-PLANE ACTUATION AND PITCH/ROLL SENSING
#11MEMS DEVICE WITH MOTION LIMITER
#12MICROMECHANICAL PRESSURE SENSOR HAVING AT LEAST TWO MEMBRANES FOR DETERMINING A PRESSURE VALUE, AND CORRESPONDING METHOD
#13MICROELECTROMECHANICAL SYSTEMS (MEMS) TRANSDUCER OVERSTRESS PROTECTION
#14ELECTROMECHANICAL SYSTEM COMPRISING A MOVABLE ELEMENT PROVIDED WITH AN OPENING
#15MULTI-STAGE MEMS STOPPER DEVICE AND METHOD
#16MEMS STRUCTURE WITH A STRUCTURED TAPER LAYER
#17METHOD OF MANUFACTURE AND ASSEMBLY OF XY FLEXURE MECHANISM ASSEMBLY
#18Reliable and Robust Zero Power Micro-Mechanical Switch
#19DIRECTIONAL MICROPHONE
#20MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
#21Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
#22Piezoelectric Motion Limiters for MEMS Autofocus Actuator
#23MEMS Device
#24MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND ANCHOR STRUCTURES
#25MEMS COMPONENT
#26MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND METHODS OF MANUFACTURING THE SAME
#27MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCTURE HAVING IMPROVED MECHANICAL ROBUSTNESS
#28MEMS ELEMENT
#29MEMS ELEMENT
#30Controller for sound producing device with dynamic vent function
#31INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
#32MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
#33MICROMECHANICAL DEVICE WITH A MECHANICAL STOP
#34THREE SEISMIC MASS Z-AXIS ACCELEROMETER AND MANUFACTURING METHOD THEROF
#35DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF MEMS DEVICE
#36STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#37MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPER MECHANISM
#38Micro-electromechanical system switch and communication device
#39DOUBLE LAYER MEMS DEVICES
#40INTERPOSER FOR DAMPING MEMS MICROPHONES
#41Venting device, manufacturing method of venting device, venting method and device
#42Microelectromechanical System for Moving a Mechanical Part in Two Opposite Directions
#43PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, AND MEMS DEVICE
#44STOPPER BUMP ON ROTOR
#45Device and method of equalizing low frequency roll off for wearable sound device
#46FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
#47MEMS SENSOR AND MANUFACTURING METHOD THEREOF
#48MEMS DEVICE
#49MOTION LIMITER WITH REDUCED STICTION
#50ELECTROMECHANICAL MICROSYSTEM
#51MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
#52MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC REFLECTOR TRENCHES
#53Dielectric protection layer configured to increase performance of mems device
#54MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
#55Microelectromechanical microphone with membrane trench reinforcements and method of fabrication
#56MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication method thereof
#57Semiconductor Device
#58SENSOR AND SENSOR SYSTEM"
#59STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#60MICROELECTROMECHANICAL SYSTEM DEVICE
#61MEMS DIE AND MEMS-BASED VIBRATION SENSOR
#62Robust inertial sensor self-test
#63Electronic device
#64MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONIC DEVICE
#65ACOUSTIC TRANSDUCER SYSTEM WITH FEEDBACK TRANSDUCTION
#66VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
#67MEMS GYROSCOPE HAVING QUADRATURE COMPENSATION ELECTRODES AND METHOD FOR COMPENSATING A QUADRATURE ERROR
#68Electronic device
#69MEMS inertial sensor with high resilience to the phenomenon of stiction
#70MEMS microphone
#71MANUFACTURING METHOD OF DEVICE
#72MICROELECTROMECHANICAL DEVICE WITH OUT-OF-PLANE STOPPER STRUCTURE
#73MICROELECTROMECHANICAL DRIVE FOR MOVING OBJECTS
#74Electrostatic device, electrostatic device intermediate body and production method
#75Device, package structure and manufacturing method of device
#76Channel for decreasing damping asymmetry
#77Optical module and method for manufacturing optical module
#78PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEM MICROPHONE SENSITIVITY IMPROVEMENT BY ANCHOR ENGINEERING
#79Low-impact motion limiter
#80Early-impact motion limiter for MEMS device
#813-axis angular accelerometer
#82Micromechanical structure and micromechanical sensor
#83Z-axis inertial sensor with extended motion stops
#84Micromechanical structure and method of providing the same
#85Micromechanical structure, micromechanical system and method of providing a micromechanical structure
#86MEMS and method of manufacturing the same
#87Process for manufacturing a micro-electro-mechanical device, and MEMS device
#88Microelectromechanical microphone with membrane trench reinforcements and method of fabrication
#89MEMS display device with a vertical hinge
#90MEMS micro-mirror device with stopper and method of making same
#91Electrostatic zipper
#92ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
#93Microelectromechanical device with stopper
#94MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
#95Micromechanical device and method for manufacturing a micromechanical device
#96Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement
#97Method for forming semiconductor device
#98MEMS comprising a movable structural element, and MEMS array
#99Piezoelectric MEMS microphone
#100Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection
#101Interposer substrate, MEMS device and corresponding manufacturing method
#102Out-of-plane hinge for a micromechanical and/or nanomechanical structure with a reduced sensitivity to internal stresses
#103Fused quartz dual shell resonator and method of fabrication
#104Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#1053-axis angular accelerometer
#106Microelectromechanical electroacoustic transducer with piezoelectric actuation and corresponding manufacturing process
#107Method for manufacturing MEMS microphone
#108Configuration to reduce non-linear motion
#109Micromechanical device including a covering bond frame
#110MEMS device with movable stage
#111Optical module and method for manufacturing optical module
#112MEMS actuation systems and methods
#113MEMS element and optical apparatus using the same
#114MEMS-transducer and method for producing a MEMS-transducer
#115MEMS locking system
#116MEMS device and method for forming the same
#117Damping system for a mobile mass of a MEMS device
#118Physical quantity sensor, sensor device, electronic device, and vehicle
#119MEMS or NEMS device with stacked stop element
#120Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#121Shock caging features for MEMS actuator structures
#122Vibration apparatus
#123Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#124Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#125Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#126Physical quantity sensor with spring having protective beam
#127Vertical stopper for capping MEMS devices
#128MEMS actuator structures resistant to shock
#129MEMS actuator structures resistant to shock
#130Actuator plate partitioning and control devices and methods
#131Piezoelectric MEMS device having a suspended diaphragm and manufacturing process thereof
#132MEMS device, inertial measurement unit, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
#133Micromechanical sensor system
#134MEMS microphone and method of manufacturing the same
#135Semiconductor device with patterned contact area
#136Displacement increasing mechanism and shutter device
#137SENSOR
#138Methods and systems for micro machines
#139Rotation rate sensor, method for manufacturing a rotation rate sensor
#140MEMS-BASED THREE-AXIS ACCELERATION SENSOR
#141Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#142Impact element for a sensor device and a manufacturing method
#143Microelectromechanical device with at least one translationally guided moveable element
#144Enhanced control of shuttle mass motion in MEMS devices
#145MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer
#146Micromirror device having a mechanical stop
#147Microelectromechanical component
#148Micromechanical sensor
#149Devices for deflecting a laser beam in a two-dimensional manner
#150MEMS microphone and method for manufacturing the same
#151Physical quantity sensor, method for manufacturing physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
#152Isolated protrusion/recession features in a micro electro mechanical system
#153Physical quantity sensor
#154MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer
#155Acceleration sensor
#156MEMS isolation platform with three-dimensional vibration and stress isolation
#157Accelerometers
#158MEMS microphone and method for manufacturing the same
#159MEMS CAPACITIVE PRESSURE SENSOR AND MANUFACTURING METHOD
#160MEMS sensors with selectively adjusted damping of suspension
#161Movable reflection device and reflection surface drive system utilizing same
#162Microelectromechanical sensor device with reduced stress-sensitivity and corresponding manufacturing process
#163Microelectromechanical system with spring for magnet placement
#164Vertical stopper for capping MEMS devices
#165Contact point structure, electronic device, and electronic apparatus
#166Micromechanical component and method for producing a micromechanical component
#167Systems and methods for a MEMS actuation systems device with one or more slidable connection assemblies
#168MEMS actuation systems and methods
#169MEMS actuation systems and methods
#170Configuration to reduce non-linear motion
#171MEMS actuation systems and methods
#172MEMS actuation systems and methods
#173Self-tuning microelectromechanical impedance matching circuits and methods of fabrication
#174Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor
#175Two-port SRAM connection structure
#176Overforce control through sense die design
#177Micromechanical component
#178Functional element, electronic apparatus and mobile entity
#179Miniature kinetic energy harvester for generating electrical energy from mechanical vibrations
#180Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface
#181Method for producing a rolled-up electrical or electronic component
#182Semiconductor device and method of manufacturing the same
#183Shock caging features for MEMS actuator structures
#184Circuit architecture for a measuring arrangement, a level converter circuit, a charge pump stage and a charge pump, and method for operating same
#1853-axis angular accelerometer
#186Method for manufacturing an electromechanical device and corresponding device
#187Multi-pressure MEMS package
#188IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE
#189Pop-Up Laminate Structure Including Miniature Optical Components
#190Active opening MEMS switch device
#191MEMS device and multi-layered structure
#192Shock caging features for MEMS actuator structures
#193MEMS actuator structures resistant to shock
#194TRAPPED MEMBRANE
#195Center-fixed MEMS microphone membrane
#196Pressure sensor die over pressure protection for high over pressure to operating span ratios
#197Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#198Micromirror arrangement and projection device
#199Asymmetric MEMS mirror assembly
#200Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof
#201Microelectromechanical sensor device with reduced stress-sensitivity and corresponding manufacturing process
#202Silicon microphone with suspended diaphragm and system with the same
#203In-plane overtravel stops for MEMS microphone
#204Two-port SRAM connection structure
#205Configuration to reduce non-linear motion
#206Mirco-electro-mechanical system device
#207Optical module
#208MEMS device with over-travel stop structure and method of fabrication
#209Device to convert out-of-plane motion to in-plane motion and/or conversely
#210MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE
#211Microelectromechanical systems (MEMS) stopper structure for stiction improvement
#212Angular velocity sensor
#213MEMS device with a capping substrate
#214Trapped membrane
#215Pressure sensors and methods of making the same
#216MEMS device and method of making a MEMS device
#217MEMS sensor including an over-travel stop and method of manufacture
#218Three-axis microelectromechanical systems devices
#219Integrated CMOS/MEMS microphone die components
#220MEMS digital variable capacitor design with high linearity
#221Linearly deployed actuators
#222Micromechanical sensor device
#223MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#224Method of manufacturing apparatus for harvesting and storing piezoelectric energy
#225Low stiffness flexure
#226Functional element, physical quantity sensor, electronic apparatus and mobile entity
#227Micro-electromechanical device comprising a mobile mass that can move out-of-plane
#228MEMS device with a stress-isolation structure
#229Optical scanner, image display device, and head mounted display
#230Angular acceleration sensor and acceleration sensor
#231Pressure sensor
#232MEMS microphone device
#233Microelectromechanical structure with frames
#234Microelectromechanical device with motion limiters
#235Microelectromechanical structure with motion limiter
#236ARRANGEMENT OF THROUGH-HOLE STRUCTURES OF A SEMICONDUCTOR PACKAGE
#237MEMS device with a bonding layer embedded in the cap
#238Functional device, acceleration sensor, and switch
#239Microfabricated Elastomeric Valve and Pump Systems
#240Semiconductor device having a micro-mechanical structure
#241MICROELECTROMECHANICAL SYSTEM AND METHODS OF USE
#242Micromechanical Z-sensor
#243Micromechanical sensor device with a getter in an enclosed cavity
#244Functional device, electronic apparatus, and moving object
#245Optomechanical accelerometer
#246Integrated circuit provided with a device for detecting its spatial orientation and/or a modification of this orientation
#247Cantilever beam structure where stress is matched and method of manufacturing the same
#248Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry
#249Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners
#250DETECTION STRUCTURE FOR A MEMS ACOUSTIC TRANSDUCER WITH IMPROVED ROBUSTNESS TO DEFORMATION
#251MEMS variable capacitor with enhanced RF performance
#252Micro-electro-mechanical system (MEMS) structures and design structures
#253Mechanical connection forming a pivot for MEMS and NEMS mechanical structures
#254Micro electro mechanical systems device and apparatus for compensating tremble
#255Semiconductor devices and methods for manufacturing semiconductor devices
#256Micromechanical structure having a deformable membrane and a protection against strong deformations
#257Actuator plate partitioning and control devices and methods
#258Microelectromechanical system and method
#259MEMS device with a capping substrate
#260Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#261Acceleration sensor having a capacitor array located in the center of an inertial mass
#262Electromechanical systems device with protrusions to provide additional stable states
#263Out-of plane travel restriction structures
#264Flexible stop for an acceleration sensor
#265Electromechanical microsystems with air gaps
#266MEMS device and method of making a MEMS device
#267MEMS element
#268Single-axis flexure bearing configurations
#269SIDEWALL SPACERS ALONG CONDUCTIVE LINES
#270PROOF MASS POSITIONING FEATURES HAVING TANGENTIAL CONTACT SURFACES
#271INERTIAL SENSOR
#272Electromechanical device with optical function separated from mechanical and electrical function
#273Apparatus for harvesting and storing piezoelectric energy and manufacturing method thereof
#274Chip package structure and method for forming the same
#275Limiting travel of proof mass within frame of MEMS device
#276Optical reflection element
#277DRIVING APPARATUS
#278Multi-stage stopper system for MEMS devices
#279MEMS sensor with movable Z-axis sensing element
#280Micromechanical element mobile along at least one axis of rotation
#281Linearly deployed actuators
#282MEMS SENSOR
#283Microfabricated elastomeric valve and pump systems
#284SENSOR AND METHOD FOR MANUFACTURING A SENSOR
#285Force sensor with reduced noise
#286Electromechanical device with optical function separated from mechanical and electrical function
#287MOVING STRUCTURE AND LIGHT SCANNING MIRROR USING THE SAME
#288Microactuator, optical device and exposure apparatus, and device manufacturing method
#289Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
#290Microvalve device
#291Systems and Methods for Resonance Frequency Tuning of Micromachined Structures
#292Micromechanical component
#293MEMS device and manufacturing method thereof
#294MEMS device and fabrication method of the same
#295Long range travel MEMS actuator
#296Acceleration sensor and electronic device
#297Microfabricated elastomeric valve and pump systems
#298Housing for micro-mechanical and micro-optical components used in mobile applications
#299CONDENSER MICROPHONE AND MEMS DEVICE
#300Optical deflector