83768 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device Mechanical properties
Sub-classes:ARTICLES INCLUDING A MICROSTRUCTURED CURVED SURFACE, TOOLING ARTICLES, AND METHODS
#2MEMS DIE AND MEMS-BASED SENSOR
#3CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF
#4Method of forming micro-electromechanical system device
#5MEMS SOUND TRANSDUCER
#6MEMS device having uniform contacts
#7Textiles having a microstructured surface and garments comprising the same
#8MEMS DIE AND MEMS-BASED SENSOR
#9Sealed vacuum MEMS die
#10Laser systems and optical devices for laser beam shaping
#11Micro-electromechanical system device and method of forming the same
#12Sensor Arrangement and Method for Producing a Sensor Arrangement
#13OUT-OF-PLANE MOTION MOTOR FOR CARRYING REFLECTOR AND MANUFACTURING METHOD THEREOF
#14Optomechanical resonator stabilization for optomechanical devices
#15Pressure detection element and pressure detection apparatus
#16Force-balanced micromirror with electromagnetic actuation
#17Feedthrough rejection for optomechanical devices using elements
#18Micro-electromechanical system devices and methods
#19MEMS device having uniform contacts
#20Method of forming a flexible MEMS device
#21Stable landing above RF conductor in MEMS device
#22MICROMECHANICAL COIL DEVICE
#23MEMS DEVICE
#24Threshold-value detection device
#25Micro-electro-mechanical device with ion exchange polymer
#26Acceleration sensor and mounting structure of acceleration sensor
#27Microlattice damping material and method for repeatable energy absorption
#28Sensor device
#29Textiles having a microstructured surface and garments comprising the same
#30MEMS device structure and methods of forming same
#31APPLICATIONS OF CONTACT-TRANSFER PRINTED MEMBRANES
#32Wafer level sealing methods with different vacuum levels for MEMS sensors
#33Optomechanical accelerometer
#34Electric device and method of manufacturing the same
#35PRESSURE LEVEL ADJUSTMENT IN A CAVITY OF A SEMICONDUCTOR DIE
#36Micro electro mechanical systems device
#37MEMS device structure and methods of forming same
#38Electric device and method of manufacturing the same
#39MEMS chip package and method for manufacturing an MEMS chip package
#40TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER
#41Microfluid-System-Supporting Unit And Production Method Thereof
#42Microfluid-System-Supporting Unit And Production Method Thereof
#43Microfluid-System-Supporting Unit And Production Method Thereof
#44Microfluid-System-Supporting Unit And Production Method Thereof
#45Method of producing an oscillator device
#46Oscillating device, light deflector, and image forming apparatus using the same
#47Oscillator device, optical deflector and optical instrument using the same
#48Tiltable-body apparatus, and method of fabricating the same
#49Torsion spring for MEMS structure
#50Excitation in micromechanical devices
#51Manufacturing a mirror plate or other operational structure having superior flatness by laser milling for use with torsional hinged devices
#52Tiltable-body apparatus, and method of fabricating the same
#53Vibrating gyrosensor and vibrating element
#54Interleaved MEMS-based probes for testing integrated circuits
#55Nanostructured liquid bearing
#56Tiltable-body apparatus, and method of fabricating the same
#57Strain-based sensing of dual-axis mirror rotation