83772 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device; Mechanical properties Constitution or structural means for improving mechanical properties not provided for in -
PIEZOELECTRIC MICROELECTROMECHANICAL DEVICE WITH ANCHOR REINFORCEMENT
#2MEMS DEVICE
#3SENSOR
#4MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
#5MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF MASS ELEMENT AND METHODS FOR FORMING THE SAME
#6SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
#7VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
#8PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE
#9MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
#10MEMS DEVICE
#11VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRATION DEVICE
#12Fabrication of MEMS device with automated dispensing of damping fluid and viscosity control
#13MEMS device with damping fluid vertically sandwiched between moving and non-moving structures
#14Semiconductor Device
#15MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#16FABRICATION OF GLASS CELLS FOR HERMETIC GAS ENCLOSURES
#17MICRO-ELECTRO-MECHANICAL SYSTEM AND ELECTRO-ACOUSTIC CONVERSION DEVICE HAVING THE MICRO-ELECTRO-MECHANICAL SYSTEM
#18SENSOR
#19Mems actuator and manufacturing process thereof
#20MEMS device with improved dynamic mechanical performance through damping by localized viscoelastic medium
#21MEMS device with a TMD structure
#22Spring-mass microelectromechanical resonator
#23Micromechanical pressure sensor device and a corresponding production method
#24Sculpted micromirror in a digital micromirror device
#25Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#26MEMS microphone
#27MEMS device
#28Mirror device, scanning laser device and scanning display including same mirror device, and method for manufacturing mirror device
#29MEMS vibration element, method of manufacturing MEMS vibration element, and vibration-driven energy harvester
#30MEMS sensor structure comprising mechanically preloaded suspension springs
#31Prevention of buzz noise in smart microphones
#32Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#33Sensor including a structure body having a deforming portion and a first sensing element provided at the defroming portion and microphone, blood pressure sensor, and touch panel including same
#34MEMS microphone and manufacturing method for making same
#35Physical quantity sensor, sensor device, electronic device, and vehicle
#36Deformable membrane and a compensating structure thereof
#37MEMS gap control structures
#38Microelectromechanical and/or nanoelectromechanical device offering improved robustness
#39MEMS sensor with offset anchor load rejection
#40Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#41Actuator, optical device, and projector
#42STABILE MICROMECHANICAL DEVICES
#43MEMS devices and processes
#44Three-dimensional micro devices and method for their production
#45Method for producing a MEMS sensor, and MEMS sensor
#46Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#47Physical quantity sensor, method for manufacturing physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
#48Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy
#49Electrode layer partitioning
#50Integrated semiconductor device and manufacturing method
#51Low friction coating formed of boron-doped zinc oxide thin film and micromachine
#52Multilayer MEMS cantilevers
#53MICROMECHANICAL SENSOR CORE FOR AN INERTIAL SENSOR
#54CURABLE SILICONE FORMULATIONS AND RELATED CURED PRODUCTS, METHODS, ARTICLES, AND DEVICES
#55Support pillar
#56MEMS gap control structures
#57MEMS sensor structure comprising mechanically preloaded suspension springs
#58MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION ELECTRODE
#59Strain sensing element, having a first and second magnetic layer and a third layer that is antiferrimagnetic
#60Integrated semiconductor device and manufacturing method
#61Optical deflector and image forming apparatus including the same
#62Silicon-on-sapphire device with minimal thermal strain preload and enhanced stability at high temperature
#63ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
#64MEMS DEVICE INCLUDING SUPPORT STRUCTURE AND METHOD OF MANUFACTURING
#65MEMS SENSOR
#66RF MEMS electrodes with limited grain growth
#67Method of forming a resonator
#68DRIVING APPARATUS
#69MEMS microphone with low pressure region between diaphragm and counter electrode
#70Capacitive micromechanical sensor structure and micromechanical accelerometer
#71MEMS switch
#72Corrosion-resistant, strong x-ray window
#73Inhibiting propagation of surface cracks in a MEMS device
#74MEMS device and method of manufacturing the same
#75MEMS pressure sensor with improved insensitivity to thermo-mechanical stress
#76MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#77Method for simultaneous structuring and chip singulation
#78Actuator with plurality of torsion bars having varying spring constant
#79Low frequency response microphone diaphragm structures and methods for producing the same
#80Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
#81Adjustable ventilation openings in MEMS structures
#82Micro-electro-mechanical system device having differential capacitors of corresponding sizes
#83MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
#84MEMS device with differential vertical sense electrodes
#85Apparatus and method for reduced strain on MEMS devices
#86MEMS microphone with low pressure region between diaphragm and counter electrode
#87Open Cavity Substrate in a MEMS Microphone Assembly and Method of Manufacturing the Same
#88MEMS structure with adaptable inter-substrate bond
#89Micropatterned component and method for manufacturing a micropatterned component
#90Varactor and varactor system
#91Inhibiting propagation of surface cracks in a MEMS Device
#92Microelectromechanical resonators
#93Low frequency response microphone diaphragm structures and methods for producing the same
#94CMOS compatible silicon differential condenser microphone and method for manufacturing the same
#95MEMS microphone and method for manufacture
#96AMORPHOUS CARBON AND ALUMINUM MEMBRANE
#97Nano resonance apparatus and method
#98Acceleration sensor for detecting acceleration in three directions
#99Micromechanical devices comprising n-type doping agents
#100Micromechanical component having a diaphragm
#101Adjustable ventilation openings in MEMS structures
#102Diaphragm of MEMS electroacoustic transducer
#103VIBRATION POWER GENERATION DEVICE
#104MEMS microphone and method for manufacture
#105Micromechanical component having a damping device
#106Microelectromechanical system with a center of mass balanced by a mirror substrate
#107Method for manufacturing liquid ejecting head
#108Microelectromechanical system device including a metal proof mass and a piezoelectric component
#109Flat back plate
#110Micromechanical component and manufacturing method for a micromechanical component
#111Micromechanical component having a volume-elastic medium
#112Micromirror unit and method of making the same
#113MEMS devices
#114Micromechanical system and method for building a micromechanical system
#115High impact resistant acceleration sensor
#116Vibrating micromechanical system having beam-shaped element
#117Semiconductor pressure sensor
#118MEMS devices and fabrication thereof
#119Flow channel structure and method of manufacturing same
#120Optical scanner
#121MEMs devices
#122Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
#123MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR
#124MEMS SENSOR AND ELECTRONIC APPARATUS
#125Physical quantity sensor
#126Direct contact heat control of micro structures
#127MEMS MICROPHONE
#128MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#129Sensor element for capacitive differential-pressure sensing
#130Mounting system for torsional suspension of a MEMS device
#131Diaphragm of MEMS electroacoustic transducer
#132Oscillator and optical deflector having oscillator
#133Electromechanical element and electronic equipment using the same
#134Oscillating, deflectable micromechanical element and method for use thereof
#135Acceleration sensor resistant to excessive force breakage
#136MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES
#137TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED
#138Electronic part with affixed MEMS
#139Micromechanical device and method of manufacturing micromechanical device
#140Method for fabricating lateral-moving micromachined thermal bimorph
#141Microphone with backside cavity that impedes bubble formation
#142Method for manufacturing a micromechanical component having a volume-elastic medium and micromechanical component
#143High-deformation composite microresonator
#144Micromechanical device and method of manufacturing micromechanical device
#145Micro-oscillation element provided with weight portion, and array utilizing the same
#146Shock resistant and mode mixing resistant torsional hinged device
#147Micro-electro-mechanical systems device
#148Fluid paths in etchable materials
#149Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use
#150Method of manufacturing a MEMS device and MEMS device
#151MEMS device having a layer movable at asymmetric rates
#152Oscillating system and optical deflector
#153Micromirror unit and method of making the same
#154MEMS device and method of fabrication
#155Ultra-low friction configuration
#156Method of manufacturing a micromachined polymer beam structure
#157Movable sensor device
#158Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
#159Micromirror unit and method of making the same