83775 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
Microelectromechanical systems having stored charge and methods for fabricating and using same
#302Microsystem comprising a deformable bridge
#303Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
#304Process for fabricating a micro-electro-mechanical system with movable components
#305Integrated tire pressure sensor system
#306Switch
#307MEMS element having a dummy pattern
#308Spatial light modulator multi-layer mirror plate
#309Nanowire electromechanical device and method of fabricating the same
#310Thin film accelerometer
#311Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level
#312Method and apparatus for reducing dielectric charging in MEMS structures
#313Acceleration sensor and method for manufacturing the same
#314Creation of hermetically sealed dielectrically isolating trenches
#315Micromechanical component and suitable method for its manufacture
#316Micromechanical device with thinned cantilever structure and related methods
#317Conductive bus structure for interferometric modulator array
#318Electronic device having a plurality of conductive beams
#319Controlling electromechanical behavior of structures within a microelectromechanical systems device
#320Piezoelectric/electrostrictive film-type device
#321Providing a charge dissipation structure for an electrostatically driven device
#322Micromechanical device with thinned cantilever structure and related methods
#323Thermal plastic deformation of RF MEMS devices
#324Micromechanical component and method for producing same
#325Micromachined device having electrically isolated components and a method for making the same
#326Charge screening in electrostatically driven devices
#327Gap tuning for surface micromachined structures in an epitaxial reactor
#328Seismic acquisition system and sensor based on MEMS sensor with low power consumption
#329Acoustic devices with directional reinforcement
#330Method for making vias using a doped substrate
#331All silicon capacitive pressure sensor
#332Semiconductor structure and manufacturing method thereof
#333Semiconductor structure with micro-electro-mechanical system devices