83775 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Constitution or structural means for improving or controlling the physical properties of a device Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
MEMS ELECTROSTATIC ACTUATOR BLADE CONFIGURATIONS AND METHODS OF MANUFACTURE
#2Zero Power Micro-Chemomechanical Hydrogen Sensor
#3Gamepad Microphone
#4Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators
#5MICROELECTROMECHANICAL SYSTEMS DEVICE AND MANUFACTURING METHOD THEREOF
#6ELECTROSTATIC ACTUATOR
#7STATIC RANDOM ACCESS MEMORY USING MICRO-ELECTROMECHANICAL SYSTEMS
#8SENSOR
#9Method for Fabricating a Hermetically Sealed Contact and Hermetically Sealed Contact
#10MOUNTING STRUCTURE OF MICRO VIBRATOR
#11NANOGAP DIELECTRIC MATERIAL
#12VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUDING SAME
#13MEMS SWITCH AND ELECTRONIC DEVICE
#14OPTIMIZED CONTROL CIRCUIT FOR A MICROELECTROMECHANICAL SOUND GENERATOR AND A SOUND GENERATION SYSTEM
#15MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
#16MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROMECHANICAL INERTIAL SENSOR
#17ACCELERATION SENSOR
#18LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) DESIGN AND MANUFACTURING FLOW
#19MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
#20Device and Method for Adapting Measuring Range and Sensitivity of Micromechanical Sensors
#21MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
#22MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
#23MEMS DEVICE
#24DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM
#25ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING SAME AND PREPARATION METHOD THEREFOR
#26MEMS DEVICE
#27CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHIEVING HIGHER SIGNAL TO NOISE RATIO
#28MEMS MODULE
#29VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUDING SAME
#30MOUNTING STRUCTURE OF MICRO VIBRATOR
#31Electromechanical power switch integrated circuits and devices and methods thereof
#32Dual diaphragm dielectric sensor
#33Vibrating-type gyroscope element and angular velocity sensor comprising same
#34MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE
#35Capacitive microphone sensor design and fabrication method for achieving higher signal to noise ratio
#36PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR
#37MEMS DEVICE
#38SENSOR
#39Microelectromechanical system
#40MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
#41Microelectromechanical system and process of making it
#42Micromechanical component for a sensor device
#43MEMS element and electrical circuit
#44System for protecting mems product under ESD event
#45MEMS DEVICE WITH MEANDERING ELECTRODES
#46MEMS device with electrodes and a dielectric
#47MEMS based light deflecting device and method
#48Mems sensor for sensing deformation by breaking contact between two electrodes
#49Droplet jetting device
#50CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION
#51MEMS CONDUCTIVE MEMBER AND PREPARATION METHOD OF CONDUCTIVE COATING LAYERS
#52Sculpted micromirror in a digital micromirror device
#53Electromechanical transducer and method for manufacturing same
#54Microelectromechanical Device with Beam Structure over Silicon Nitride Undercut
#55Broad Range Micro Pressure Sensor
#56Capacitive microphone sensor design and fabrication method for achieving higher signal to noise ratio
#57Vibration-driven energy harvesting element and vibration-driven energy harvesting device
#58BENDING TRANSDUCER AS ACTUATOR, BENDING TRANSDUCER AS SENSOR, BENDING TRANSDUCER SYSTEM
#59Electrode arrangement for a micro-electro-mechanical system including tapered electrode structures
#60Position sensing circuit for an electrostatically driven MEMS device
#61MEMS Microphone
#62Electromechanical power switch integrated circuits and devices and methods thereof
#63Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures
#64Sensor
#65Packaged pressure sensor device
#66Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element
#67Semiconductor strain detection element with impurity diffusion layer
#68Electromechanical power switch integrated circuits and devices and methods thereof
#69Capacitive micromachined ultrasonic transducer and method of fabricating the same
#70MEMS device
#71Capacitive micro structure
#72CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME
#73Piezoelectric micromachined ultrasonic transducers and methods for fabricating thereof
#74COMB DRIVE WITH NON-PARALLEL OVERLAPPING COMB FINGERS
#75Device for suppressing stray radiation
#76SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
#77Electronic device including a capacitor
#78MEMS transducer system for pressure and acoustic sensing
#79MEMS sensor compensation for off-axis movement
#80POSITION SENSING CIRCUIT FOR AN ELECTRONICALLY DRIVEN MEMS DEVICE
#81Method for manufacturing low contact resistance semiconductor structure
#82Composite spring for robust piezoelectric sensing
#83Reducing parasitic capacities in a microelectronic device
#84MEMS DEVICES AND PROCESSES
#85OPTICAL SYSTEM WITH DEFORMABLE MEMS OPTICAL ELEMENT
#86Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#87Micro-electro-mechanical device with ion exchange polymer
#88Micromechanical z-inertial sensor
#89Broad range micro pressure sensor
#90Packaged pressure sensor device
#91MEMS sensor with dual pendulous proof masses
#92MEMS device
#93Semiconductor structure including a suspended membrane containing a central segment of structured thickness
#94MEMS sensors, methods for providing same and method for operating a MEMS sensor
#95Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
#96Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element
#97MEMS devices and processes
#98MEMS devices and processes
#99Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency
#100MEMS device and process for RF and low resistance applications
#101Vibrator device, oscillator, electronic device, and vehicle
#102Capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
#103Semiconductor device, pressure sensor, microphone, and acceleration sensor
#104Bulk mode microelectromechanical resonator devices and methods
#105Low contact resistance semiconductor structure and method for manufacturing the same
#106Thin film metal silicides and methods for formation
#107BONDLINE FOR MM-WAVE APPLICATIONS
#108MEMS DEVICE
#109MEMS microphone having reduced leakage current and method of manufacturing the same
#110Contact material for MEMS devices
#111MEMS microphone
#112Electromechanical power switch integrated circuits and devices and methods thereof
#113MEMS device and MEMS vacuum microphone
#114MEMS DEVICE WITH OFFSET ELECTRODE
#115Self-tuning microelectromechanical impedance matching circuits and methods of fabrication
#116Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure
#117MEMS sensor with high voltage switch
#118Selective conductive coating for MEMS sensors
#119Antenna having MEMS-tuned RF resonators
#120RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING THE SAME
#121Semiconductor structure and manufacturing method thereof
#122MEMS device and process for RF and low resistance applications
#123Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
#124MEMS device and MEMS vacuum microphone
#125Micro-electro-mechanical pressure device and methods of forming same
#126MEMS component
#127MEMS device
#128Electronic device, electronic apparatus, and moving object
#129Multi-faced component-based electromechanical device
#130Electromechanical power switch integrated circuits and devices and methods thereof
#131MICROPHONE AND CONTROL METHOD THEREFOR
#132Electro-mechanical switching devices
#133Method for producing a component
#134MEMS sensor with high voltage switch
#135CHARGE STABILIZED DIELECTRIC FILM FOR ELECTRONIC DEVICES
#136MEMS device
#137Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
#138Comb drive with non-parallel overlapping comb fingers
#139Microelectromechanical structure and device
#140Curved RF electrode for improved Cmax
#141Thin film metal silicides and methods for formation
#142Microelectromechanical system microphone
#143Semiconductor device
#144Method for manufacturing electronic component
#145Sensor and its manufacturing method
#146MEMS STRUCTURE WITH MULTILAYER MEMBRANE
#147Methods and structures of integrated MEMS-CMOS devices
#148Microelectromechanical systems devices with improved reliability
#149Fully depleted region for reduced parasitic capacitance between a poly-silicon layer and a substrate region
#150Non-symmetric arrays of MEMS digital variable capacitor with uniform operating characteristics
#151Mirror driving device
#152Semiconductor device, display module, and electronic device
#153Electrostatic actuator and method for producing the same
#154Physical quantity detection device, electronic apparatus, and moving object
#155Capacitive sensing structure with embedded acoustic channels
#156MEMS structure with improved shielding and method
#157MEMS device and process for RF and low resistance applications
#158SOI substrate, physical quantity sensor, SOI substrate manufacturing method, and physical quantity sensor manufacturing method
#159MEMS sensor with dynamically variable reference capacitance
#160Three-dimensional inter-chip contact through vertical displacement MEMS
#161MEMS device
#162Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element
#163Microelectromechanical structure with frames
#164Capacitive transducer and method of manufacturing the same
#165MEMS microphone with dual-back plate and method of manufacturing the same
#166ELECTRODE SYSTEM FOR A MICROMECHANICAL COMPONENT
#167All-silicon electrode capacitive transducer on a glass substrate
#168Micro-electro-mechanical system device and micro-electro-mechanical system compensation structure
#169Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement
#170Micro-electro-mechanical system device having differential capacitors of corresponding sizes
#171Micromechanical component and method for producing a micromechanical component
#172MEMS devices, interface circuits, and methods of making thereof
#173Electromechanical transducer
#174Flexible high-voltage thin film transistors
#175MEMS structure with improved shielding and method
#176Capacitive sensing structure with embedded acoustic channels
#177Pressure sensor structure
#178MEMS backplate, MEMS microphone comprising a MEMS backplate and method for manufacturing a MEMS microphone
#179MEMS microphone with reduced parasitic capacitance
#180Capacitive micro-machined transducer and method of manufacturing the same
#181MEMS device and method of manufacturing the same
#182Actuator plate partitioning and control devices and methods
#183MEMS shutter assemblies for high-resolution displays
#184Microelectromechanical system and method
#185MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object
#186Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof
#187Manufacturing methods for micro-electromechanical system device having electrical insulating structure
#188MEMS device with multiple electrodes and fabricating method thereof
#189Three-dimensional inter-chip contact through vertical displacement MEMS
#190Mechanical switch
#191Displacement amount monitoring electrode structure
#192MEMS device and process for RF and low resistance applications
#193Pressure sensor, microphone, blood pressure sensor, and touch panel
#194Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#195Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#196Micromechanical sensor device with movable gate and corresponding production method
#197Conductive bus structure for interferometric modulator array
#198Starting substrate for semiconductor engineering having substrate-through connections and a method for making same
#199MEMS device with independent rotation in two axes of rotation
#200MEMS device, electronic apparatus, and manufacturing method of MEMS device
#201MEMS device, electronic module, electronic apparatus, and mobile unit
#202Microelectromechanical system (MEMS) devices with dielectric microstructure motion stopper
#203Electronic device
#204MEMS element and method of manufacturing the same
#205Electronic device
#206Through silicon via with reduced shunt capacitance
#207Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#208Semiconductor device, method of manufacturing semiconductor device, and electronic apparatus
#209Electromechanical microsystems with air gaps
#210Semiconductor pressure sensor
#211Methods and structures of integrated MEMS-CMOS devices
#212Electrostatic capacitance sensor
#213Tunable MEMS device and method of making a tunable MEMS device
#214Micromechanical sensor apparatus with a movable gate, and corresponding production process
#215MEMS Switch Having One or More Vacuum Gaps
#216Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
#217Electronic device, method for manufacturing thereof, and electronic apparatus
#218Structure for signal line, manufacturing method for signal line and switch using the signal line
#219Coated Capacitive Sensor
#220ACCELERATION SENSOR
#221Electrostatic actuator of a mobile structure with improved relaxation of trapped charges
#222APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES
#223ELECTROMECHANICAL DEVICES WITH VARIABLE MECHANICAL LAYERS
#224Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#225Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#226Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#227Micro-electromechanical system device having electrical insulating structure and manufacturing methods
#228MEMS vertical comb structure with linear drive/pickoff
#229MEMS sensor using multi-layer movable combs
#230MEMS device having a movable electrode
#231Micromechanical resonating devices and related methods
#232Three phase capacitance-based sensing
#233Method for producing an electrical feedthrough in a substrate, and substrate having an electrical feedthrough
#234Micromechanical component and manufacturing method for a micromechanical component
#235MEMS devices and fabrication thereof
#236MEMS device having a movable electrode
#237MEMS ELEMENT
#238Conductive bus structure for interferometric modulator array
#239Micromechanical sensor
#240Piezoelectric actuator, optical reflection element using the same and piezoelectric driver
#241MEMS SENSOR, METHOD OF MANUFACTURING THEREOF, AND ELECTRONIC APPARATUS
#242General strength and sensitivity enhancement method for micromachined device
#243Sensor for capacitive detection of a mechanical deflection
#244MEMS device having a movable electrode
#245Semiconductor device and method of fabricating the semiconductor device
#246PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD OF PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS
#247MEMS stress concentrating structure for MEMS sensors
#248MEMS device, MEMS device module and acoustic transducer
#249Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
#250Structure having plural conductive regions and process for production thereof
#251MEMS device and fabrication method thereof
#252MEMS device and method of manufacturing the same
#253Semiconductor device and method of fabricating the semiconductor device
#254Controlling electromechanical behavior of structures within a microelectromechanical systems device
#255MEMS device with independent rotation in two axes of rotation
#256Sensor device with reduced parasitic-induced error
#257Using pole pieces to guide magnetic flux through a MEMS device and method of making
#258Display device with openings between sub-pixels and method of making same
#259Capacitive MEMS device with programmable offset voltage control
#260Nanowire sensor device
#261Oscillator device
#262Micro movable element and micro movable element array
#263Microelectromechanical systems having stored charge and methods for fabricating and using same
#264Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same
#265Method of epitaxially growing piezoresistors
#266Micromechanical component and corresponding production method
#267MEMS device having a movable electrode
#268MEMS device and optical switch
#269Structural member having a plurality of conductive regions
#270MEMS device, MEMS device module and acoustic transducer
#271Micro movable device
#272Micromechanical resonating devices and related methods
#273Dielectric microstructure for use in microelectromechanical systems and method of forming same
#274Micro electric mechanical system device and method of producing the same
#275Electromechanical device and electrical device with the electromechanical device
#276MEMS device with independent rotation in two axes of rotation
#277Capacitor Compensation Structure and Method for a Micro-Electro-Mechanical System
#278Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#279MICROELECTROMECHANICAL CAPACITOR BASED DEVICE
#280Micro electro mechanical device, method for manufacturing the same, semiconductor device, and method for manufacturing the same
#281Capacitive MEMS device with programmable offset voltage control
#282Self-poling piezoelectric MEMs device
#283Ultra-low noise MEMS piezoelectric accelerometers
#284Non-contact actuator
#285Electric field concentration minimization for MEMS
#286Micro electro mechanical systems device
#287Piezo-resistive detection resonant device made using surface technologies
#288Acceleration sensor and fabrication method thereof
#289Micro oscillating device and micro oscillating device array
#290Device with optimised capacitive volume
#291Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
#292Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method
#293MEMS device having a movable electrode
#294MEMS device and fabrication method thereof
#295Conductive bus structure for interferometric modulator array
#296MICROMECHANICAL COMPONENT
#297Microelectromechanical device with optical function separated from mechanical and electrical function
#298Sensor device and a method for its manufacturing
#299MICRO-ELECTRO MECHANICAL SYSTEM DEVICE AND METHOD OF FORMING COMB ELECTRODES OF THE SAME
#300Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same