83785 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems; Structural features, others than packages, for protecting a device against environmental influences Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
Method for checking a sensor value of a MEMS sensor
#2Method for protecting a MEMS unit against infrared investigations and MEMS unit
#3Method for protecting a MEMS unit against infrared investigations and MEMS unit
#4Method for protecting a MEMS unit against infrared investigations and MEMS unit
#5Adjustable physical unclonable function
#6Vanishing via for hardware IP protection from reverse engineering
#7Varistor in base for MEMS microphones
#8Preventing glass particle injection during the oil fill process
#9APPARATUS AND METHOD FOR PROVIDING ISOLATION BETWEEN COMPONENTS IN MICROFABRICATED DEVICES
#10IC manufacturing method, IC and apparatus
#11Integrated MEMS and ESD protection devices
#12Corrosion-resistant MEMS component and method for the production thereof
#13Sensor device
#14Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing
#15MEMS device with controlled gas space chemistry
#16Semiconductor sensor having heater on insulation film and manufacturing method of the same
#17Optical interference display panel and manufacturing method thereof
#18METHOD OF FABRICATING A POLYMER-BASED CAPACITIVE ULTRASONIC TRANSDUCER
#19Micromechanical component, method for fabrication and use
#20Shock resistant and mode mixing resistant torsional hinged device
#21Method and device for protecting interferometric modulators from electrostatic discharge
#22SENSOR CHIP AND SUBSTRATE ASSEMBLY FOR MEMS DEVICE
#23Micro-electromechanical device
#24Method for fabricating a three-dimensional acceleration sensor
#25Heat-resistant electret condenser microphone
#26Method for fabricating a three-dimensional acceleration sensor
#27Method of fabricating a polymer-based capacitive ultrasonic transducer
#28Micromechanical device having integrated heating
#29Process for fabricating micromachine
#30Acceleration sensor manufacturable by simplified method
#31Micromechanical component
#32Method and device for protecting interferometric modulators from electrostatic discharge
#33Particle filter for microelectromechanical systems
#34Apparatus and system for suspending a chip-scale device and related methods
#35Micro device having micro system structure and method for method for manufacturing the same
#36Semiconductor component and micromechanical structure
#37Microelectromechanical system and method for fabricating the same
#38Sensor device having thin membrane and method of manufacturing the same
#39Optical interference display panel and manufacturing method thereof
#40Semiconductor sensor and method of plating semiconductor devices
#41Method for producing and testing a corrosion-resistant channel in a silicon device