83784 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems Structural features, others than packages, for protecting a device against environmental influences
Sub-classes:IMPACT-RESISTANT MICROMECHANICAL ARMS
#2MEMS resonator
#3CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY
#4MEMS GAS SENSOR AND ARRAY THEREOF, AND GAS DETECTION AND PREPARATION METHOD
#5MICROELECTROMECHANICAL SYSTEM DEVICE
#6IMPACT-RESISTANT MICROMECHANICAL ARMS
#7BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE
#8MEMS resonator
#9Overhanging device structures and related methods of manufacture
#10Method for processing a layer structure and microelectromechanical component
#11Waterproof switch actuatable by a fluid such as air and usable in particular for activating an inhalator apparatus, such as an electronic cigarette
#12Overhanging device structures and related methods of manufacture
#13Method for processing a layer structure and microelectromechanical component
#14MEMS locking system
#15N-implant electrical shield for piezo-resistor sensor
#16Infrared detector pixel structure and manufacturing method thereof
#17Method for processing a layer structure and microelectromechanical component
#18Stack type sensor package structure
#19MEMS device with enhanced sensing structure and manufacturing method thereof
#20Static expansion method
#21Liquid-resistant acoustic device gasket and membrane assemblies
#22Device and method for a threshold sensor
#23Systems and methods for increasing convective clearance of undesired particles in a microfluidic device
#24Systems and methods for increasing convective clearance of undesired particles in a microfluidic device
#25REFERENCE LEAK GENERATING DEVICE AND ULTRA-FINE LEAK TESTING DEVICE USING SAME
#26Method for manufacturing a MEMS device and MEMS device
#27Method for varied topographic MEMS cap process
#28THREE-DIMENSIONAL MICROELECTROMECHANICAL SYSTEMS STRUCTURE
#29SYSTEMS AND METHODS FOR INCREASING CONVECTIVE CLEARANCE OF UNDESIRED PARTICLES IN A MICROFLUIDIC DEVICE
#30Waterproof structure and electronic equipment including the same