83786 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems; Structural features, others than packages, for protecting a device against environmental influences Protection against shocks or vibrations, e.g. vibration damping
CRASH MITIGATION IN ACTIVE MEMS COOLING SYSTEMS
#2SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
#3MEMS MICROPHONE
#4MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) AND METHODS OF FABRICATING THE SAME
#5CRASH MITIGATION IN ACTIVE MEMS COOLING SYSTEMS
#6MICROMECHANICAL ARM ARRAY FOR MEMS ACTUATORS
#7MEMS DEVICE
#8MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FORMING THE SAME
#9METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROMECHANICAL SYSTEM (MEMS) ACTUATORS
#10PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
#11MEMS ACOUSTIC ELEMENT
#12MEMS Device, Electronic Apparatus, And Vehicle
#13MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
#14SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
#15STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#16MICROMIRROR CHIP PACKAGE STRUCTURE, LASER DEVICE, AND VEHICLE
#17STOPPER BUMP ON ROTOR
#18FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
#19Mems device, electronic apparatus, and vehicle
#20MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
#21Micromechanical arm array in micro-electromechanical system (MEMS) actuators
#22MICROMECHANICAL SENSOR STRUCTURE WITH DAMPING STRUCTURE
#23METHODS AND SYSTEMS FOR FABRICATION OF ULTRASOUND TRANSDUCER DEVICES
#24STOPPER BUMP STRUCTURES FOR MEMS DEVICE
#25MEMS device, electronic apparatus, and vehicle
#26SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
#27VIBRATION ISOLATOR PLATFORM WITH ELECTRONIC ACCELERATION COMPENSATION
#28Vibration sensor
#29BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#30Piezoelectric micromachined ultrasonic transducer having a polymeric member over a damper cavity
#31Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane element and methods of manufacturing thereof
#32Method for producing damper structures on a micromechanical wafer
#33Inertial sensor and inertial measurement unit
#34Microelectromechanical membrane transducer with active damper
#35Method for producing damper structures on a micromechanical wafer
#36Methods for vibration immunity to suppress bias errors in sensor devices
#37MEMS device, electronic apparatus, and vehicle
#38Method for producing a micromechanical device having a damper structure
#39Vibration damping in MEMS acceleration sensors
#40Micromechanical device and method for manufacturing a micromechanical device
#41Low-noise multi axis MEMS accelerometer
#42BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#43Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package
#44MEMS vibrator and MEMS oscillator
#45SENSOR UNIT, ELECTRONIC APPARATUS, AND VEHICLE
#46Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package
#47Fused quartz dual shell resonator and method of fabrication
#48Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#49MEMS structure for offset minimization of out-of-plane sensing accelerometers
#50Conductor path structure having a component received in a vibration-damped manner
#51Ultrasonic MEMS acoustic transducer with reduced stress sensitivity and manufacturing process thereof
#52MEMS actuation systems and methods
#53Sensor unit, electronic apparatus, and moving body
#54Silicon carbide microelectromechanical structure, device, and method
#55OFFSET REJECTION ELECTRODES
#56Damping system for a mobile mass of a MEMS device
#57Sensor unit, construction machine, and structure monitoring device
#58Vibration sensor
#59Shock caging features for MEMS actuator structures
#60MICROMECHANICAL DEVICE HAVING A DECOUPLED MICROMECHANICAL STRUCTURE
#61Vibration isolator platform with electronic acceleration compensation
#62Active MEMS damping
#63Micro-electro-mechanical device having two buried cavities and manufacturing process thereof
#64Bulk acoustic wave resonator on a stress isolated platform
#65Thermal airflow sensor
#66MEMS actuator structures resistant to shock
#67MEMS actuator structures resistant to shock
#68Shock-isolated mounting device with a thermally-conductive link
#69MEMS device, electronic apparatus, and vehicle
#70Bidirectional MEMS driving arrangements with a force absorbing system
#71Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic device, electronic device, and vehicle
#72MEMS DEVICES AND PROCESSES
#73MEMS sound transducer, MEMS microphone and method for providing a MEMS sound transducer
#74Physical quantity sensor
#75Thermal airflow sensor
#76Conductor path structure having a component received in a vibration-damped manner
#77Micromechanical system including a sensitive element and associated manufacturing method
#78MEMS isolation platform with three-dimensional vibration and stress isolation
#79Offset rejection electrodes
#80Silicon carbide microelectromechanical structure, device, and method
#81MEMS actuation systems and methods
#82MEMS device and process
#83Removal of a reinforcement ring from a wafer
#84Shock caging features for MEMS actuator structures
#85Micromechanical device having a decoupled micromechanical structure
#86Sensor device
#87MEMS FORCE SENSOR AND FORCE SENSING APPARATUS
#88Thermal airflow sensor
#89Micromechanical structure
#90Shock caging features for MEMS actuator structures
#91MEMS actuator structures resistant to shock
#92Structure-borne noise decoupling on sensors working with transmitter fields
#93Microelectromechanical system and fabricating process having decoupling structure that includes attaching element for fastening to carrier
#94Semi-flexible proof-mass
#95Piezoresistive detection resonant device in particular with large vibration amplitude
#96Method for manufacturing a MEMS element
#97Chip structure
#98Offset rejection electrodes
#99PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANE
#100Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
#101PRESSURE SENSOR HAVING CAP-DEFINED MEMBRANE
#102MEMS device structure and methods of forming same
#103Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure
#104Top-port MEMS microphone and method of manufacturing the same
#105Angular velocity sensor
#106Inhibiting propagation of surface cracks in a MEMS device
#107Inertia sensors with multi-directional shock protection
#108Sensor and method for manufacturing a sensor
#109Integrated CMOS back cavity acoustic transducer and the method of producing the same
#110Reduction of chipping damage to MEMS structure
#111Microelectromechanical system with a micro-scale spring suspension system and methods for making the same
#112Apparatus and method for reduced strain on MEMS devices
#113MEMS device having a suspended diaphragm and manufacturing process thereof
#114Microelectromechanical and/or nanoelectromechanical structure with a variable quality factor
#115Micro optical switch device, image display apparatus including the same, and method of manufacturing the micro optical switch device
#116Systems and methods for high frequency isolation
#117Packaging to reduce stress on microelectromechanical systems
#118MEMS device structure and methods of forming same
#119Sealed packaging for microelectromechanical systems
#120METHODS AND SYSTEMS FOR LIMITING SENSOR MOTION
#121MEMS vibration isolation system and method
#122Angular speed sensor for detecting angular speed
#123Vibration isolation interposer die
#124Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner
#125Actuator motion control features
#126MEMS MICROPHONE AND MANUFACTURING METHOD THEREOF
#127Acoustic sensor and method of manufacturing the same
#128Micromechanical system and method for manufacturing a micromechanical system
#129Sensor device
#130Optical deflector
#131Optical deflector
#132Internally shock caged serpentine flexure for micro-machined accelerometer
#133Internally shock caged serpentine flexure for micro-machined accelerometer
#134Micromechanical arm array in micro-electromechanical system (MEMS) actuators
#135Methods of manufacture of microisolators and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors
#136MEMS device connected to a substrate by flexible support structures