83807 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems Temperature control
Sub-classes:AIRFLOW GENERATING DEVICE AND ITS APPLICATIONS
#2Electronic Structure, Inertial Measurement Unit, Electronic Apparatus, And Moving Object
#3Stacked-die MEMS resonator
#4A SEMICONDUCTOR STRUCTURE AND A MICROFLUIDIC SYSTEM THEREOF
#5STACKED-DIE MEMS RESONATOR
#6MEMS resonator system
#7MEMS STRUCTURE
#8Stacked-die MEMS resonator
#9FLUID PROPELLING APPARATUS INCLUDING A HEAT SINK
#10Stacked-die MEMS resonator
#11Manufacturing of integrated circuit resonator
#12Fluidic chip
#13Microelectromechanical system apparatus with heater
#14Package structure for micromechanical resonator
#15Fluid propelling apparatus including a heat sink
#16Low-profile stacked-die MEMS resonator system
#17Digital PCR device
#18Fluidic chip
#19Stacked-die MEMS resonator system
#20Semiconductor arrangement with thermal insulation configuration
#21Projector, Oscillating Mirror Element Unit and Headup Display
#22MEMS GAS SENSING DEVICE
#23Low-profile stacked-die MEMS resonator system
#24Stacked die package for MEMS resonator system
#25Stacked die package for MEMS resonator system