ClassID:

83808

B81B7/0087 - CPC Classification

Classification description:

Microstructural systems; Auxiliary parts of microstructural devices or systems; Temperature control On-device systems and sensors for controlling, regulating or monitoring

Recent Application in this class:
#1
20260152386
2026-06-04

MICROELECTROMECHANICAL DEVICE

#2
20260028614
2026-01-29

Isotachophoresis for Purification of Nucleic Acids

#3
20250066187
2025-02-27

TEMPERATURE STABILIZATION OF MICRO ELECTROMECHANICAL SYSTEM SENSORS FOR ANTENNA MONITORING DEVICES

#4
20250059025
2025-02-20

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR

#5
20250011164
2025-01-09

SENSOR DEVICE

#6
20240375941
2024-11-14

TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM

#7
20240361587
2024-10-31

ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS

#8
20240301395
2024-09-12

Isotachophoresis for Purification of Nucleic Acids

#9
20240253975
2024-08-01

DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACTURE AND OPERATION THEREOF

#10
20230358781
2023-11-09

Systems and methods for thermally regulating sensor operation

#11
20230357748
2023-11-09

Isotachophoresis for purification of nucleic acids

#12
20230183057
2023-06-15

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#13
20230133753
2023-05-04

SINGLE-AXIS INERTIAL SENSOR MODULE WITH INTERPOSER

#14
20230107211
2023-04-06

Systems and methods for operating a mems device based on sensed temperature gradients

#15
20230061188
2023-03-02

ENHANCED MEMS SENSOR EMBEDDED HEATER

#16
20220342199
2022-10-27

Micromirror arrays

#17
20220267143
2022-08-25

MICROELECTROMECHANICAL HEATING DEVICE

#18
20220227619
2022-07-21

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#19
20220204339
2022-06-30

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

#20
20220098030
2022-03-31

Sensor with integrated heater

#21
20220091155
2022-03-24

SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENSOR AND METHOD FOR ASCERTAINING AN ACCELERATION WITH THE AID OF THE MICROELECTROMECHANICAL Z INERTIAL SENSOR

#22
20220057423
2022-02-24

Sensor system, method for operating a sensor system

#23
20220048760
2022-02-17

Systems and methods for operating a MEMS device based on sensed temperature gradients

#24
20210341729
2021-11-04

Electrooptical systems having heating elements

#25
20210300751
2021-09-30

Method for detecting contamination of a MEMS sensor element

#26
20210276859
2021-09-09

A MEMS Package

#27
20210276858
2021-09-09

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#28
20210252602
2021-08-19

MOUNTS FOR MICRO-MIRRORS

#29
20210204071
2021-07-01

MEMS microphone with integrated resistor heater

#30
20210181070
2021-06-17

Aircraft air contaminant analyzer and method of use

#31
20210122627
2021-04-29

Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures

#32
20210054361
2021-02-25

Isotachophoresis for purification of nucleic acids

#33
20210053820
2021-02-25

Package level thermal gradient sensing

#34
20210053819
2021-02-25

Systems and methods for operating a MEMS device based on sensed temperature gradients

#35
20200340889
2020-10-29

Aircraft air contaminant analyzer and method of use

#36
20200275178
2020-08-27

Method for operating an integrated MEMS microphone device and integrated MEMS microphone device

#37
20200240943
2020-07-30

MEMS gas sensor

#38
20200239300
2020-07-30

Hydrogen sensor on medium or low temperature solid micro heating platform

#39
20200209175
2020-07-02

Microelectromechanical system apparatus with heater

#40
20200087142
2020-03-19

Sensor with integrated heater

#41
20200049539
2020-02-13

CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane

#42
20200039818
2020-02-06

Sensing thermal gradients within a microelectromechanical device

#43
20190391176
2019-12-26

Systems and methods for thermally regulating sensor operation

#44
20190382259
2019-12-19

Device and method for a threshold sensor

#45
20190302046
2019-10-03

Gas detector and gas detection method

#46
20190292044
2019-09-26

Microelectromechanical accelerometer based sensor system

#47
20190276307
2019-09-12

Electronic system comprising a microelectromechanical system and a box encapsulating this microelectromechanical system

#48
20190237654
2019-08-01

MEMS heater or emitter structure for fast heating and cooling cycles

#49
20190161341
2019-05-30

Systems and methods for temperature sensor access in die stacks

#50
20190073917
2019-03-07

Virtual Reality Assisted Training

#51
20190071663
2019-03-07

Isotachophoresis for purification of nucleic acids

#52
20190052944
2019-02-14

Integrated temperature sensor in microphone package

#53
20190039069
2019-02-07

Isotachophoresis for purification of nucleic acids

#54
20190033243
2019-01-31

OXIDE BARRIER COATED SEMICONDUCTOR GAS SENSORS

#55
20190033242
2019-01-31

Low heat transfer encapsulation for high sensitivity and low power environmental sensing applications

#56
20180339898
2018-11-29

Microelectromechanical resonator with improved electrical features

#57
20180259376
2018-09-13

Environmental sensor

#58
20180222747
2018-08-09

Microelectromechanical accelerometer based sensor system

#59
20180043356
2018-02-15

Microfluidic temperature control

#60
20180041841
2018-02-08

MEMS microphone with improved sensitivity

#61
20170339477
2017-11-23

To detect the ambient temperature around the MEMS microphone

#62
20170297908
2017-10-19

Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

#63
20170288125
2017-10-05

MEMS heater or emitter structure for fast heating and cooling cycles

#64
20170248628
2017-08-31

Multiple MEMS device and methods

#65
20170240419
2017-08-24

Microelectromechanical accelerometer based sensor system

#66
20170184629
2017-06-29

Systems and methods for thermally regulating sensor operation

#67
20170129768
2017-05-11

Heating apparatus for a MEMS sensor

#68
20170029270
2017-02-02

Gas detector with a thermally uniform MEMS die

#69
20160340174
2016-11-24

Monolithic fabrication of thermally isolated microelectromechanical system (MEMS) devices

#70
20160297670
2016-10-13

Device and method for a threshold sensor

#71
20160233851
2016-08-11

Systems and methods for device temperature stabilization

#72
20160221822
2016-08-04

System and method for an integrated transducer and temperature sensor

#73
20160207040
2016-07-21

Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use

#74
20160178415
2016-06-23

Device and method for sensor calibration

#75
20150137303
2015-05-21

Mechanisms for forming micro-electro mechanical device

#76
20150115377
2015-04-30

MEMS device with integrated temperature stabilization

#77
20140169405
2014-06-19

Sensor with an embedded thermistor for precise local temperature measurement

#78
20140151869
2014-06-05

Integrated heater on MEMS cap for wafer scale packaged MEMS sensors

#79
20140034132
2014-02-06

Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use

#80
20130078155
2013-03-28

Method and device for thermal insulation of micro-reactors

#81
20130001765
2013-01-03

Integrated heater on MEMS cap for wafer scale packaged MEMS sensors

#82
20100279451
2010-11-04

Direct contact heat control of micro structures

#83
20090212386
2009-08-27

MEMS DEVICE AND METHOD OF MAKING SAME

#84
20070205473
2007-09-06

PASSIVE ANALOG THERMAL ISOLATION STRUCTURE

#85
15953094
2019-03-26

MEMs devices

#86
15662810
2019-10-01

Thermal management using microelectromechanical systems bimorph cantilever beams