ClassID:

83810

B81B7/0093 - CPC Classification

Classification description:

Microstructural systems; Auxiliary parts of microstructural devices or systems; Temperature control; Maintaining a constant temperature by heating or cooling by cooling

Recent Application in this class:
#1
20250291176
2025-09-18

MIRROR ARRANGEMENT WITH COOLED MIRROR ELEMENTS AND LITHOGRAPHY SYSTEM

#2
20250268106
2025-08-21

ACTUATOR DESIGNS FOR MEMS-BASED ACTIVE COOLING

#3
20250263292
2025-08-21

TILES HAVING MULTIPLE COOLING CELLS FOR MEMS-BASED COOLING

#4
20250031350
2025-01-23

CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS

#5
20230331545
2023-10-19

Apparatus and method for dissipating heat with microelectromechanical system

#6
20230034707
2023-02-02

PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP DEVICES

#7
20230012794
2023-01-19

DRIVING OF PIEZOELECTRICS FOR MEMS-BASED COOLING SYSTEMS

#8
20220354021
2022-11-03

Centrally anchored MEMS-based active cooling systems

#9
20220259036
2022-08-18

Apparatus and method for dissipating heat with microelectromechanical system

#10
20220081284
2022-03-17

Tiles having multiple cooling cells for MEMS-based cooling

#11
20220077014
2022-03-10

Packaged device with die wrapped by a substrate

#12
20210397010
2021-12-23

Wearable display device

#13
20210392788
2021-12-16

Centrally anchored MEMS-based active cooling systems

#14
20210323811
2021-10-21

Apparatus and method for dissipating heat with microelectromechanical system

#15
20210176894
2021-06-10

Centrally anchored MEMS-based active cooling systems

#16
20210013116
2021-01-14

Packaged device with die wrapped by a substrate

#17
20200275178
2020-08-27

Method for operating an integrated MEMS microphone device and integrated MEMS microphone device

#18
20200239299
2020-07-30

PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP DEVICES

#19
20200102216
2020-04-02

MEMS cryocooler systems and methods

#20
20190039883
2019-02-07

Monolithic phase change heat sink

#21
20180151468
2018-05-31

DEVICE INTEGRATION OF ACTIVE COOLING SYSTEMS

#22
20160343637
2016-11-24

DEVICE INTEGRATION OF ACTIVE COOLING SYSTEMS

#23
20160329266
2016-11-10

Electronic power device with improved cooling

#24
20150061455
2015-03-05

Vibration device including support portion

#25
20150060756
2015-03-05

Optical-microwave-quantum transducer

#26
20150021410
2015-01-22

System and method for miniaturization of synthetic jets

#27
20150021409
2015-01-22

System and method for miniaturization of synthetic jets

#28
20130230934
2013-09-05

System and method for miniaturization of synthetic jets

#29
20130082376
2013-04-04

3D integrated electronic device structure including increased thermal dissipation capabilities

#30
20120187519
2012-07-26

Method of forming a cooling device for an integrated circuit

#31
20110156245
2011-06-30

Method and apparatus for cooling an integrated circuit

#32
20100053891
2010-03-04

System and method for miniaturization of synthetic jets

#33
20100052112
2010-03-04

Printable, flexible and stretchable diamond for thermal management

#34
20080290489
2008-11-27

Package structure and electronic device using the same

#35
20080088010
2008-04-17

Electronic device with integrated micromechanical contacts and cooling system

#36
20070278663
2007-12-06

Integrated circuit cooling device

#37
20050045974
2005-03-03

Die carrier with fluid chamber

#38
17473818
2025-05-27

Actuator designs for MEMS-based active cooling