83810 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems; Temperature control; Maintaining a constant temperature by heating or cooling by cooling
MIRROR ARRANGEMENT WITH COOLED MIRROR ELEMENTS AND LITHOGRAPHY SYSTEM
#2ACTUATOR DESIGNS FOR MEMS-BASED ACTIVE COOLING
#3TILES HAVING MULTIPLE COOLING CELLS FOR MEMS-BASED COOLING
#4CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS
#5Apparatus and method for dissipating heat with microelectromechanical system
#6PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP DEVICES
#7DRIVING OF PIEZOELECTRICS FOR MEMS-BASED COOLING SYSTEMS
#8Centrally anchored MEMS-based active cooling systems
#9Apparatus and method for dissipating heat with microelectromechanical system
#10Tiles having multiple cooling cells for MEMS-based cooling
#11Packaged device with die wrapped by a substrate
#12Wearable display device
#13Centrally anchored MEMS-based active cooling systems
#14Apparatus and method for dissipating heat with microelectromechanical system
#15Centrally anchored MEMS-based active cooling systems
#16Packaged device with die wrapped by a substrate
#17Method for operating an integrated MEMS microphone device and integrated MEMS microphone device
#18PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP DEVICES
#19MEMS cryocooler systems and methods
#20Monolithic phase change heat sink
#21DEVICE INTEGRATION OF ACTIVE COOLING SYSTEMS
#22DEVICE INTEGRATION OF ACTIVE COOLING SYSTEMS
#23Electronic power device with improved cooling
#24Vibration device including support portion
#25Optical-microwave-quantum transducer
#26System and method for miniaturization of synthetic jets
#27System and method for miniaturization of synthetic jets
#28System and method for miniaturization of synthetic jets
#293D integrated electronic device structure including increased thermal dissipation capabilities
#30Method of forming a cooling device for an integrated circuit
#31Method and apparatus for cooling an integrated circuit
#32System and method for miniaturization of synthetic jets
#33Printable, flexible and stretchable diamond for thermal management
#34Package structure and electronic device using the same
#35Electronic device with integrated micromechanical contacts and cooling system
#36Integrated circuit cooling device
#37Die carrier with fluid chamber
#38Actuator designs for MEMS-based active cooling