83811 ⎘
Microstructural systems; Auxiliary parts of microstructural devices or systems; Temperature control; Maintaining a constant temperature by heating or cooling by heating
THERMALLY STABILIZED ACCELEROMETER
#2MEMS Oscillator and Electronic Device
#3Ovenized MEMS
#4Temperature Distribution of Microheater
#5FLUIDIC SENSING ASSEMBLY WITH FLEXIBLE SUBSTRATE
#6FLUIDIC SENSING ASSEMBLY WITH THERMAL PLATFORM
#7HEATING DEVICE AND MICROFLUIDIC APPARATUS COMPRISING THE SAME
#8MEMS DEVICE AND MANUFACTURING METHOD THEREOF
#9Ovenized MEMS
#10MICROELECTROMECHANICAL HEATING DEVICE
#11CMOS-MEMS humidity sensor
#12MEMS sensor as well as method for operating a mems sensor
#13Method for detecting contamination of a MEMS sensor element
#14Semiconductor structure and manufacturing method thereof
#15Microelectromechanical system apparatus with heater
#16System with oven control and compensation for detecting motion and/or orientation
#17Gas detector and gas detection method
#18Micro-electromechanical apparatus for thermal energy control
#19Device and method for sensor calibration
#20Temperature stabilized MEMS device
#21System with oven control and compensation for detecting motion and/or orientation
#22Semiconductor structure and manufacturing method thereof
#23Gas detector with a thermally uniform MEMS die
#24MEMS device with integrated temperature stabilization
#25Temperature stabilitized MEMS
#26Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope
#27Micromechanical device having integrated heating
#28Device for homogeneous heating of an object