83920 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
METHOD AND DEVICE FOR PRODUCING NANOPORES
#2MICROSTRUCTURE WITH HIGH BONDING STRENGTH AND FORMATION METHOD THEREOF
#3COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
#4METHODS OF FORMING NANOSTRUCTURES UTILIZING SELF-ASSEMBLED NUCLEIC ACIDS
#5MICROFLUIDIC DEVICES AND ASSOCIATED METHODS
#6FORMATION OF ANTIREFLECTIVE SURFACES
#7Hierarchical Silicon Nanostructures, Methods of Making, and Methods of Use
#8COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
#9Textiles having a microstructured surface and garments comprising the same
#10NANOZYME LINKED BIOASSAY AND ASSOCIATED METHODS
#11METHODS OF FORMING NANOSTRUCTURES INCLUDING METAL OXIDES USING BLOCK COPOLYMER MATERIALS
#12Dry adhesives and methods for making dry adhesives
#13Formation of antireflective surfaces
#14Copper-alloy capping layers for metallization in touch-panel displays
#15Nanosheet MEMs sensor device and method of manufacture
#16Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#17Methods of forming nanostructures utilizing self-assembled nucleic acids
#18Directed self-assembly
#19Programmable structural building blocks
#20Modification to rough polysilicon using ion implantation and silicide
#21Comb electrode release process for MEMS structure
#22Laminate for patterned substrates
#23Method for Fabricating a Microfluidic Device
#24Methods for forming flow channels in metal inverse opal structures
#25Microfluidic devices and associated methods
#26NANOSTRUCTURE TRANSFER METHOD
#27Copper-alloy capping layers for metallization in touch-panel displays
#28Methods of forming electronic assemblies with inverse opal structures using variable current density electroplating
#29METHOD FOR FORMING A CHEMICAL GUIDING STRUCTURE ON A SUBSTRATE AND CHEMO-EPITAXY METHOD
#30Methods of making hydrophobic contoured surfaces and hydrophobic contoured surfaces and devices made therefrom
#31Formation of antireflective surfaces
#32Antenna structure with metamaterial
#33Formation of reliefs on the surface of a substrate
#34Modification to rough polysilicon using ion implantation and silicide
#35Methods of forming structures utilizing self-assembling nucleic acids
#36Self-assembly patterning for fabricating thin-film devices
#37Method of controlling placement of micro-objects
#38Nanostructure featuring nano-topography with optimized electrical and biochemical properties
#39Micro fluid actuator
#40Pattern-forming method and patterned substrate
#41UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
#42Laminate for patterned substrates
#43Component especially for horology with surface topology and method for manufacturing the same
#44Nanostructured article
#45Microwave assisted and low-temperature fabrication of nanowire arrays on scalable 2D and 3D substrates
#46MULTISCALE MICRODEVICES WITH NANOPILLARS FOR CHRONICALLY IMPLANTED DEVICES
#47Methods for micro and nano fabrication by selective template removal
#48Method for forming a functionalised guide pattern for a graphoepitaxy method
#49Method for the directed self-assembly of a block copolymer by graphoepitaxy
#50Method for forming a functionalised assembly guide
#51Composition and pattern-forming method
#52Method of making a nanostructured cylindrical roll
#53Method for forming a chemical guiding structure on a substrate and chemoepitaxy method
#54Method of forming nano-patterns on a substrate
#55Methods of forming a semiconductor device using block copolymer materials
#56Method of forming a micro-structure
#57Method of forming semiconductor device
#58Methods of forming structures
#59MICROSTRUCTURED SURFACE HAVING DISCRETE TOUCH AESTHETICS
#60Self-assembly patterning for fabricating thin-film devices
#61Formation of antireflective surfaces
#62Directed self-assembly of block copolymers
#63Method for making carbon nanotube array
#64Self-assembled nanostructures including metal oxides and semiconductor structures comprised thereof
#65Etching method
#66Chip security fingerprint
#67Chip security fingerprint
#68Hierarchical micro assembler system
#69Plurality of electrodes on a substrate having different range of spacing
#70Methods of forming structures and methods of decreasing defect density
#71FABRICATION OF NANOSTRUCTURED SUBSTRATES COMPRISING A PLURALITY OF NANOSTRUCTURE GRADIENTS ON A SINGLE SUBSTRATE
#72Formation of reliefs on the surface of a substrate
#73Coating method using particle alignment and particle coated substrate manufactured thereby
#74Method of forming local nano/micro size structures of anodized metal
#75Thin-film transistor and method of forming an electrode of a thin-film transistor
#76Methods of making hydrophobic contoured surfaces and hydrophobic contoured surfaces and devices made therefrom
#77Systems, devices, and methods for contact measurement and modulation of material properties
#78RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE AND METHOD FOR PRODUCING STRUCTURE INCLUDING PHASE-SEPARATED STRUCTURE
#79Substrate treatment method, computer storage medium and substrate treatment system
#80Self-processing synthesis of hybrid nanostructures
#81Methods of forming nanostructures using self-assembled nucleic acids, and nanostructures thereof
#82Wafer processing equipment having exposable sensing layers
#83Neutral layer polymers, methods of manufacture thereof and articles comprising the same
#84Methods and apparatuses for directed self-assembly
#85METHOD OF FORMING A MICRO-STRUCTURE
#86Methods of forming nanostructures having low defect density
#87Pattern formation method
#88Self-assembly pattering for fabricating thin-film devices
#89Formation of organic nanostructure array
#90Block copolymer
#91Methods for providing lithography features on a substrate by self-assembly of block copolymers
#92Pattern forming method
#93Nano-structure and method of making the same
#94Ordering block copolymers
#95Method of forming pattern of semiconductor device
#96Two-dimensional micro- and nano-pattern, methods for forming the same, and microfluidic devices formed therefrom
#97Textiles having a microstructured surface and garments comprising the same
#98Guide pattern data correcting method, pattern forming method, and computer readable record medium
#99Pattern forming method
#100Self-organization material and pattern formation method
#101Method of making a nanostructure and nanostructured articles
#1022-dimensional patterning employing tone inverted graphoepitaxy
#103Block copolymer nanostructures formed by disturbed self-assembly and uses thereof
#104Low reflective and superhydrophobic or super water-repellent glasses and method of fabricating the same
#105Method of manufacturing silicon nanowire array
#106Pattern forming method
#107Pattern formation method
#108Methods of forming nano-scale and micro-scale structured materials and materials formed thereby
#109Nanopatterned articles produced using reconstructed block copolymer films
#110Methods of forming a nanostructured polymer material including block copolymer materials
#111Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
#112Methods and devices for selective deposition of materials including mechanical abrasion
#113Electro-assisted transfer and fabrication of wire arrays
#114Method of designing lithography features by self-assembly of block copolymer
#115Density multiplication and improved lithography by directed block copolymer assembly
#116Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures
#117Method of fabricating nanostructures using macro pre-patterns
#118Positive microcontact printing
#119CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER HAVING NANOPILLAR STRUCTURE AND METHOD OF FABRICATING THE SAME
#120Pattern forming method
#121Self-assembled nanostructures including metal oxides and semiconductor structures comprised thereof
#122Polarizer based on a nanowire grid
#123Integration of absorption based heating bake methods into a photolithography track system
#124Process for forming multi-layer film and patterning process
#125Methods for providing lithography features on a substrate by self-assembly of block copolymers
#126Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#127Anhydride copolymer top coats for orientation control of thin film block copolymers
#128Method for manufacturing slanted copper nanorods
#129Fabrication of directionally oriented block copolymer films
#130Ordering block copolymers
#131Method for fabricating microstructure to generate surface plasmon waves
#132Chemical pinning to direct addressable array using self-assembling materials
#133Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern
#134Nanoscale patterning method and integrated device for electronic apparatus manufactured therefrom
#135Coating method using particle alignment and particle coated substrate manufactured thereby
#136Dry adhesives and methods for making dry adhesives
#137Semiconductor patterning
#138Superoleophobic surfaces and methods of making same
#139Highly ordered arrays of micelles or nanoparticles on a substrate surface and methods for producing the same
#140Block copolymer self-assembly for pattern density multiplication and rectification
#141Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom
#142Method for fabricating microstructure to generate surface plasmon waves
#143Pattern forming method
#144SERS-sensor with nanostructured layer and methods of making and using
#145Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium
#146UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
#147Pattern forming method, pattern forming apparatus, and computer readable storage medium
#148Three-dimensional nanostructures and method for fabricating the same
#149Method and apparatus for forming a periodic pattern using a self-assembled block copolymer
#150Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition
#151SERS-sensor with nanostructured surface and methods of making and using
#152Processable self-organizing nanoparticle
#153Neutral layer polymers, methods of manufacture thereof and articles comprising the same
#154Method of forming pattern
#155Copper-alloy capping layers for metallization in touch-panel displays
#156Underlayer composition and method of imaging underlayer composition
#157Methods of reducing defects in directed self-assembled structures
#158Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns
#159Method to provide a patterned orientation template for a self-assemblable polymer
#160Pattern formation method for manufacturing semiconductor device using phase-separating self-assembling material
#161Directed self-assembling composition for pattern formation, and pattern-forming method
#162Method of producing structure containing phase-separated structure, method of forming pattern, and top coat material
#163Process for producing 3-dimensional structure assembled from nanoparticles
#164Methods of making patterned structures of materials, patterned structures of materials, and methods of using same
#165Methods of utilizing block copolymer to form patterns
#166Method for making patterns on the surface of a substrate using block copolymers
#167Methods for fabricating three-dimensional nano-scale structures and devices
#168Method of producing nanopatterned articles, and articles produced thereby
#169Semiconductor patterning
#170Methods of improving long range order in self-assembly of block copolymer films with ionic liquids and materials produced therefrom
#171Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
#172Pattern forming method
#173Method for block-copolymer lithography
#174Fabrication of complex three-dimensional structures based on directed assembly of self-assembling materials on activated two-dimensional templates
#175Hierarchical carbon nano and micro structures
#176Method for separately processing regions on a patterned medium
#177Pattern forming method
#178Templates including self-assembled block copolymer films
#179Method of forming fine pattern, and developer
#180Nano pattern formation
#181Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
#182Nano tri-carbon composite systems and manufacture
#183Three-dimensional (3D) porous device and method of making a 3D porous device
#184Anhydride copolymer top coats for orientation control of thin film block copolymers
#185Highly ordered arrays of colloidal 2D crystals and methods for producing the same
#186Standardized topographical arrangements for template regions that orient self-assembly
#187Method for producing substrate having surface nanostructure
#188Nanopatterned articles produced using surface-reconstructed block copolymer films
#189Method for producing mold for minute pattern transfer, method for producing diffraction grating using the same, and method for producing organic EL element including the diffraction grating
#190METHODS OF FORMING A PATTERN
#191Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials
#192Anhydride copolymer top coats for orientation control of thin film block copolymers
#193Method of controlling orientation of domains in block copolymer films
#194Self-assembly of small structures
#195Silicon hardmask layer for directed self-assembly
#196Methods using block co-polymer self-assembly for sub-lithographic patterning
#197Removable templates for directed self assembly
#198Patterning in the directed assembly of block copolymers using triblock or multiblock copolymers
#199Nano-structure of block copolymer and method of manufacturing the same
#200PATTERN FORMATION METHOD
#201Using chemical vapor deposited films to control domain orientation in block copolymer thin films
#202SELF-ASSEMBLED STRUCTURES, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME
#203Thermal annealing process
#204Block co-polymer photoresist
#205Micro-pattern forming method, and micro-channel transistor and micro-channel light-emitting transistor forming method using same
#206Directed assembly of block copolymer films between a chemically patterned surface and a second surface
#207Nano-scale structures
#208Method of forming a micro-structure
#209Method of forming a nano-structure
#210Method of forming a nano-structure
#211Nano-structure and method of making the same
#212Lithography using self-assembled polymers
#213Pattern formation method and polymer alloy base material
#214Graphene pattern and process of preparing the same
#215Metal nanoparticle array structure, device for producing same, and method for producing same
#216Fabricating method of nano structure for antireflection and fabricating method of photo device integrated with antireflection nano structure
#217Method for forming pattern and mask pattern, and method for manufacturing semiconductor device
#218Monocrystalline epitaxially aligned nanostructures and related methods
#219Surface treatments for alignment of block copolymers
#220SUBSTRATE
#221Block copolymer for manufacturing nanowire and method for manufacturing thereof
#222Crosslinkable graft polymer non preferentially wetted by polystyrene and polyethylene oxide
#223Systems and Methods for Self-Assembling Ordered Three-Dimensional Patterns By Buckling Of Thin Films Bonded To Curved Compliant Substrates
#224Method of forming oriented block copolymer line patterns, block copolymer line patterns formed thereby, and their use to form patterned articles
#225Apparatus for nano structure fabrication
#226Method of manufacturing semiconductor device
#227Self-assembly of block copolymers on topographically patterned polymeric substrates
#228Method for the production of conical nanostructures on substrate surfaces
#229Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly
#230Method of forming pattern
#231Method of forming pattern
#232DRY ADHESIVES AND METHODS FOR MAKING DRY ADHESIVES
#233Pattern forming method
#234Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method
#235Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
#236Methods of improving long range order in self-assembly of block copolymer films with ionic liquids
#237Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
#238Method of forming pattern
#239Method of producing nanopatterned articles, and articles produced thereby
#240Solvent annealing block copolymers on patterned substrates
#241Modified surface for block copolymer self-assembly
#242Methods for self-aligned self-assembled patterning enhancement
#243Fabrication of complex three-dimensional structures based on directed assembly of self-assembling materials on activated two-dimensional templates
#244Two-dimensional patterning employing self-assembled material
#245Pattern formation employing self-assembled material
#246Pattern formation employing self-assembled material
#247Methods and apparatus for high-throughput formation of nano-scale arrays
#248Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials
#249IMPRINT TEMPLATE FABRICATION AND REPAIR BASED ON DIRECTED BLOCK COPOLYMER ASSEMBLY
#250Forming nanometer-sized patterns by electron microscopy
#251Pattern formation employing self-assembled material
#252Graphoepitaxial self-assembly of arrays of downward facing half-cylinders
#253SYSTEM AND METHOD FOR IMPRINT-GUIDED BLOCK COPOLYMER NANO-PATTERNING
#254Methods of forming topographical features using segregating polymer mixtures
#255Two-dimensional patterning employing self-assembled material
#256Pattern forming method
#257Shaping nanostructure arrays
#258Method for improving self-assembled polymer features
#259METHOD FOR FABRICATING A LASER-INDUCED SURFACE NANOARRAY STRUCTURE, AND DEVICE STRUCTURE FABRICATED USING SAID METHOD
#260Registered structure formation via the application of directed thermal energy to diblock copolymer films
#261Underlayer composition and method of imaging underlayer composition
#262METHOD FOR FORMING A PATTERN AND A SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#263Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
#264Block copolymer and method of forming patterns by using the same
#265Particulate nanosorting stack
#266Methods of forming patterns
#267One-dimensional arrays of block copolymer cylinders and applications thereof
#268Methods of forming patterns, and methods of forming integrated circuits
#269NanoNeedles Pulling System
#270FORMATION OF ORGANIC NANOSTRUCTURE ARRAY
#271Guided self-assembly of block copolymer line structures for integrated circuit interconnects
#272Method of forming fine patterns using a block copolymer
#273Three-dimensional nanostructures and method for fabricating the same
#274NANO/MICRO-STRUCTURE AND FABRICATION METHOD THEREOF
#275PATTERN FORMATION METHOD AND PATTERN FORMATION DEVICE
#276VAPOR DEPOSITION APPARATUS FOR MINUTE-STRUCTURE AND METHOD THEREFOR
#277METHOD AND SYSTEM FOR MANUFACTURING NANOSTRUCTURES
#278Method for making three-dimensional nano-structure array
#279METHOD FOR PRODUCING NANOSTRUCTURES BY MEANS OF SPINODAL DECROSSLINKING
#280Nanostructured articles and methods of making nanostructured articles
#281Patterned nanowires
#282Cantilevers for deposition
#283Methods of utilizing block copolymer to form patterns
#284Method for patterning nanomaterial using solution evaporation
#285Methods of forming patterns, and methods of forming integrated circuits
#286Methods using block co-polymer self-assembly for sub-lithographic patterning
#287Magnetic patterning method and system
#288Nanostructured superhydrophobic, superoleophobic and/or superomniphobic coatings, methods for fabrication, and applications thereof
#289METHOD OF ACCELERATING SELF-ASSEMBLY OF BLOCK COPOLYMER AND METHOD OF FORMING SELF-ASSEMBLED PATTERN OF BLOCK COPOLYMER USING THE ACCELERATING METHOD
#290Methods of directed self-assembly and layered structures formed therefrom
#291Method for fabrication of patterned micro/nano architectures using directional photo-fluidization of polymer
#292MICROFINE STRUCTURE AND PROCESS FOR PRODUCING SAME
#293Method for transferring nanostructures into a substrate
#294PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS
#295SUPRAMOLECULAR BLOCK COPOLYMER COMPOSITIONS FOR SUB-MICRON LITHOGRAPHY
#296Programmable self-aligning liquid magnetic nanoparticle masks and methods for their use
#297Method of forming self-assembled patterns using block copolymers, and articles thereof
#298Method of manufacturing microstructure and substrate provided with the microstructure
#299Method for producing nanostructures on metal oxide substrate, method for depositing thin film on same, and thin film device
#300Directed material assembly