83966 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Etch mask forming Mask characterised by its composition, e.g. multilayer masks
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#2MICRO-ELECTROMECHANICAL SYSTEM (MEMS) MIRROR COMB DRIVE
#3MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTODEFINABLE ORGANIC POLYMER SPACER LAYERS
#4METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#6Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers
#7METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#8Method and system for fabricating a MEMS device
#9Method and system for fabricating a MEMS device
#10MEMS SPEAKER AND METHOD OF MICROFABRICATION OF SUCH A SPEAKER
#11Method of fabricating a microscale canopy wick structure having enhanced capillary pressure and permeability
#12Forming method of thin layer
#13Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
#14Actuator layer patterning with topography
#15Fabrication process for a symmetrical MEMS accelerometer
#16Method of etching microelectronic mechanical system features in a silicon wafer
#17Method of etching microelectronic mechanical system features in a silicon wafer
#18Fence structure to prevent stiction in a MEMS motion sensor
#19Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof
#20Fabrication process for a symmetrical MEMS accelerometer
#21Electrically conductive patterns with wide line-width and methods for producing same
#22Wafer level packaging of MEMS
#23A Suspended Structure Made of Inorganic Materials and a Method for Manufacturing Same
#24Methods for providing lithography features on a substrate by self-assembly of block copolymers
#25Composite cavity and forming method thereof
#26Neutral hard mask and its application to graphoepitaxy-based directed self-assembly (DSA) patterning
#27Method for producing nanoimprint mold
#28Method of forming a resonator
#29Pattern forming method
#30Wafer level packaging of MEMS
#31Method of manufacturing a MEMS structure and use of the method
#32Method of manufacturing a MEMS structure
#33System on a chip using integrated MEMS and CMOS devices
#34Aluminum nitride (AlN) devices with infrared absorption structural layer
#35Pressure difference sensor and method for its manufacture
#36Methods of forming MEMS device
#37Method for forming silicon oxide and metal nanopattern's, and magnetic recording medium for information storage using the same
#38Silicon etching method
#39Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof
#40Method for forming pattern, and polysiloxane composition
#41Lithium microbattery fabrication method
#42Low temperature ceramic Microelectromechanical structures
#43Electronic device structure and method of making electronic devices and integrated circuits using grayscale technology and multilayer thin-film composites
#44Microelectromechanical resonators
#45Diblock copolymer, preparation method thereof, and method of forming nano pattern using the same
#46Micromechanical device and methods to fabricate same using hard mask resistant to structure release etch
#47Method for producing a dielectric layer on a component
#48SHADOW MASK, METHOD OF MANUFACTURING THE SAME AND METHOD OF FORMING THIN FILM USING THE SAME
#49Silicon germanium mask for deep silicon etching
#50POLYHEDRAL OLIGOMERIC SILSESQUIOXANE COMPOSITIONS, METHODS OF USING THESE COMPOSITIONS, AND STRUCTURES INCLUDING THESE COMPOSITIONS
#51Micromirror unit and method of making the same
#52Integrated system on chip using multiple MEMS and CMOS devices
#53Low temperature ceramic microelectromechanical structures
#54METHOD FOR PRODUCING AN ANTI-REFLECTION SURFACE ON AN OPTICAL ELEMENT, AND OPTICAL ELEMENTS COMPRISING AN ANTI-REFLECTION SURFACE
#55Methods of forming nano-devices using nanostructures having self-assembly characteristics
#56Method of fabricating a structure by anisotropic etching, and silicon substrate with an etching mask
#57Shadow mask, method of manufacturing the same and method of forming thin film using the same
#58Method of forming pattern of inorganic material film comprising thermally induced cracking
#59Method for fabricating a structure for a microelectromechanical systems (MEMS) device
#60Method for forming comb electrodes using self-alignment etching
#61Micromirror unit and method of making the same
#62Micromirror unit and method of making the same
#63Method for fabricating a structure for a microelectromechanical system (MEMS) device
#64Equipment and process for creating a custom sloped etch in a substrate
#65Resistless lithography method for fabricating fine structures
#66Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials
#67Graphoepitaxy directed self assembly
#68Method for making guiding lines with oxidized sidewalls for use in directed self-assembly (DSA) of block copolymers
#69Pressure sensors and methods of making the same