83974 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Surface micromachining, i.e. structuring layers on the substrate Releasing structures
Sub-classes:Packaging of microelectromechanical system devices
#2DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
#3Dual micro-electro mechanical system and manufacturing method thereof
#4Methods for forming a MEMS device layer on an active device layer and devices formed thereby
#5Dual micro-electro mechanical system and manufacturing method thereof
#6Fabrication of three-dimensional structures using reflowed molding
#7Fabrication and self-aligned local functionalization of nanocups and various plasmonic nanostructures on flexible substrates for implantable and sensing applications
#8Fabrication and self-aligned local functionalization of nanocups and various plasmonic nanostructures on flexible substrates for implantable and sensing applications
#9Method of manufacturing partially freestanding two-dimensional crystal film and device comprising such a film
#10MEMS and method for forming the same
#11Microfluidic device and microtube thereof
#12Process of making a microtube and microfluidic devices formed therewith