83971 ⎘
Manufacture or treatment of devices or systems in or on a substrate Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
Sub-classes:METHOD FOR PRODUCING A COMPOSITE CAP ELEMENT, AND COMPOSITE CAP ELEMENT
#2Method and device for a carrier proximity mask
#3Method and device for a carrier proximity mask
#4Thin metal membrane with support
#5Imprint apparatus and method of controlling the same
#6Isolated protrusion/recession features in a micro electro mechanical system
#7Pattern formation method
#8Microfluidic device and method for producing a microfluidic device
#9Method for manufacturing three-dimensionally shaped comb-tooth electret electrode
#10Apparatus for cutting transmission electron microscope micro-grids
#11Process for forming microstructures