83972 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate Surface micromachining, i.e. structuring layers on the substrate
Sub-classes:APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE BY DIRECT LASER WRITING AND METHOD FOR USING THE SAME
#2Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#3MEMS device having uniform contacts
#4Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#5Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#6Methods for forming a MEMS device layer on an active device layer and devices formed thereby
#7Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures
#8MEMS device having uniform contacts
#9Method of forming a flexible MEMS device
#10Stable landing above RF conductor in MEMS device
#11Stiction reduction system and method thereof
#12Nanostructures fabricated by metal asisted chemical etching for antibactertial applications
#13MEDICAL IMPLANTS WITH 100% SUBSURFACE BORON CARBIDE DIFFUSION LAYER
#14Nanostructures fabricated by metal assisted chemical etching for antibacterial applications
#15Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus and moving object
#16Manufacturing method of micro-electro-mechanical system device and micro-electro-mechanical system device made thereby
#17MICROSTRUCTURED ARTICLES COMPRISING NANOSTRUCTURES AND METHOD
#18Misalignment correction for embedded microelectronic die applications
#19Misalignment correction for embedded microelectronic die applications
#20Microfluidic Cell Sorter System