83977 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Surface micromachining, i.e. structuring layers on the substrate Processes for surface micromachining not provided for in groups -
METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES
#2SEMICONDUCTOR PACKAGE WITH FLOATING METAL PORTION AND METHOD FOR MANUFACTURING
#3CROSS-SCALE STRUCTURE FEATURE SURFACE MACHINING METHOD BASED ON MULTI-COMPONENT COLLABORATIVE VIBRATION
#4Surface micromachined structures
#5PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL MIRROR DEVICE AND MICROELECTROMECHANICAL MIRROR DEVICE
#6HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
#7Methods for forming a MEMS device layer on an active device layer and devices formed thereby
#8Surface micromachined structures
#9Stacked structure and method for manufacturing the same
#10Atomic-scale e-beam sculptor
#11Manufacturing method of micro channel structure
#12Actuator layer patterning with topography
#13High-volume millimeter scale manufacturing
#143D PIEZOELECTRIC POLYMER MATERIALS AND DEVICES
#15Methods of preparing nanodevices
#16MEMS-BASED SPEAKER IMPLEMENTATION
#17Semiconductor device
#18Method for manufacturing electronic component
#19MEMS DEVICES AND METHOD OF MANUFACTURING
#20MONOLITHIC INTEGRATION OF STRESS ISOLATION FEAUTURES IN A MICROELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE
#21Fabrication of tungsten MEMS structures
#22Method of forming MEMS device
#23Method and apparatus for release-assisted microcontact printing of MEMS
#24Methods and devices for packaging integrated circuits
#25Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
#26Inorganic nanostructure reactive direct-write and growth
#27Method for fabricating a transducer apparatus
#28Patterning of antistiction films for electromechanical systems devices
#29Method for manufacturing microstructure using self-assembly of amphiphilic polymer
#30Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
#31Electrochemical Fabrication Methods for Producing Multilayer Structures Including the use of Diamond Machining in the Planarization of Deposits of Material
#32Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS
#33Fibrous networks and a method and apparatus for continuous or batch fibrous network production
#34Methods and Apparatus for Nanolapping
#35Method for producing localized patterns
#36Multi-cell Masks and Methods and Apparatus for Using Such Masks To Form Three-Dimensional Structures
#37Method and Apparatus for Maintaining Parallelism of Layers and/or Achieving Desired Thicknesses of Layers During the Electrochemical Fabrication of Structures
#38Methods for Electrochemically Fabricating Structures Using Adhered Masks, Incorporating Dielectric Sheets, and/or Seed Layers That Are Partially Removed Via Planarization
#39Production of microfluidic devices using laser-induced shockwaves
#40Electrochemical Fabrication Methods for Producing Multilayer Structures Including the use of Diamond Machining in the Planarization of Deposits of Material
#41Apparatus and Method for Nano-Scale Electric Discharge Machining
#42Methods and apparatus for nanolapping
#43METHOD FOR FORMING NANOSCALE FEATURES AND STRUCTURES PRODUCED THEREBY
#44Metal MEMS devices and methods of making same
#45System and method for positioning and synthesizing of nanostructures
#46Multi-cell masks and methods and apparatus for using such masks to form three-dimensional structures
#47Versatile system for selective organic structure production
#48Bevel dicing semiconductor components
#49Micromachining process, system and product
#50Method of manufacturing a microstructure
#51Precision machining method using a near-field scanning optical microscope
#52Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization
#53Three-dimensional lithographic fabrication technique
#54Anisotropic dry etching of Cu-containing layers
#55Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope
#56Electrochemical fabrication methods for producing multilayer structures including the use of diamond machining in the planarization of deposits of material
#57Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
#58Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
#59Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures
#60Multilayer MEMS device and method of making same
#61Process for creating a 3-dimensional configuration on a substrate
#62Preparation and surface modification of plastic microfluidic chip
#63Method for protecting the diaphragm and extending the life of SiC and/or Si MEMS microvalves
#64Method for forming nanoscale features and structures produced thereby