83979 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Bulk micromachining Formation of buried layers by techniques other than deposition, e.g. by deep implantation of elements
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
#2Method for transferring a useful layer into a supporting substrate
#3Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
#4Tunable MEMS etalon
#5Method for processing an embedded metal film
#6Systems and methods for preparing films comprising metal using sequential ion implantation, and films formed using same
#7Contoured insulator layer of silicon-on-insulator wafers and process of manufacture
#8Method of fabricating a MEMS/NEMS electromechanical component
#9Three-dimensional silicon on oxide device isolation
#10MEMS substrates, devices, and methods of manufacture thereof
#11Method for realizing microchannels in an integrated structure
#12Ion implanted microscale and nanoscale device method
#13Method of making cavities in a semiconductor wafer