83980 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Bulk micromachining Bulk micromachining techniques not provided for in
METHOD OF MANUFACTURING A LAYERED STRUCTURE FOR A MEMS APPARATUS AND MEMS APPARATUS HAVING SUCH A LAYERED STRUCTURE
#2METHOD FOR MAKING A HOLLOW STRUCTURE, AND MICROMECHANICAL SENSOR HAVING SUCH A HOLLOW STRUCTURE
#3METHOD FOR FORMING A BORE FOR A CAVITY ARRANGED WITHIN A SEMICONDUCTOR LAYER STACK
#4LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPARENT MATERIAL
#5Structure forming method and device
#6MEMS devices and methods of forming same
#7MEMS devices and methods of forming same
#8Ultra-high charge density electrets and method of making same
#9Electrical tuning of resonant scanning
#10MEMS devices and methods of forming same
#11Process for fabrication of a micromechanical and/or nanomechanical structure comprising a porous surface
#12Method for manufacturing a micromechanical component
#13Semiconductor processing by magnetic field guided etching
#14Manufacturing method for a micromechanical component and a corresponding micromechanical component
#15MEMS devices and methods of forming same
#16Direct patterning of silicon by photoelectrochemical etching