83982 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Etching material Dry etching
Method for singulating a wafer and suitable device
#2METHODS OF FABRICATING POROUS SILICON STRUCTURES
#3MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
#4FABRICATION OF CARBON-CONTAINING NANONEEDLES
#5METHODS OF FABRICATING POROUS SILICON STRUCTURES
#6CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION METHODS
#7MEMS STRUCTURES WITH GAPS
#8METHOD FOR WAFER TREATMENT
#9FLUID SENSOR SYSTEM
#10ETCHING METHOD
#11METHOD OF MANUFACTURING A MICROSTRUCTURE
#12VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
#13Fluid sensor system
#14Etching method
#15Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method
#16Calcite channel structures with heterogeneous wettability
#17Silicon carbide nanoneedles and fabrication thereof
#18MEMS device, manufacturing method of the same, and integrated MEMS module using the same
#19Semiconductor ICF target processing
#20Segmented pedestal for mounting device on chip
#21Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating
#22Manufacturing method of micro fluid actuator
#23Semiconductor device and method of manufacturing thereof
#24Calcite channel structures with heterogeneous wettability
#25Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer
#26Method and device for a carrier proximity mask
#27ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
#28Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate
#29MEMS microphone and method of manufacture
#30Method and device for a carrier proximity mask
#31Methods for tuning plasma potential using variable mode plasma chamber
#32Silicon carbide structure, device, and method
#33Method for manufacturing a plurality of resonators
#34Segmented pedestal for mounting device on chip
#35Method of manufacturing a microelectromechanical systems (MEMS) device
#36Sidewall stopper for MEMS device
#37METHOD AND STRUCTURE TO REDUCE IMPACT OF EXTERNAL STRESS AND AGING OF A BAW RESONATOR
#38Interposer substrate, MEMS device and corresponding manufacturing method
#39Atomic layer etching on microdevices and nanodevices
#40Complementary metal-oxide-semiconductor (CMOS) micro electro-mechanical (MEMS) microphone and method for fabricating the same
#41Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
#42Superhydrophobic and superoleophobic nanosurfaces
#43Fence structure to prevent stiction in a MEMS motion sensor
#44Reduced MEMS cavity gap
#45Method for producing hollow structure and hollow structure
#46METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#47Sidewall stopper for MEMS device
#48Method of fabricating semiconductor structure
#49Methods for multiple-patterning nanosphere lithography for fabrication of periodic three-dimensional hierarchical nanostructures
#50Method for producing a reflection-reducing layer system
#51Plasma processing apparatus and plasma processing method
#52Fabrication process for a symmetrical MEMS accelerometer
#53Method for processing conductive structure
#54Method of etching microelectronic mechanical system features in a silicon wafer
#55Semiconductor device having silicon layer with trench
#56Method of etching microelectronic mechanical system features in a silicon wafer
#57Vertically stacked nanofluidic channel array
#58Ultrasonic transducer and method for manufacturing the same, display substrate and method for manufacturing the same
#59Method of fabricating semiconductor structure
#60PATTERN FORMATION METHOD AND PATTERN FORMATION MATERIAL
#61Fence structure to prevent stiction in a MEMS motion sensor
#62Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity
#63Impact element for a sensor device and a manufacturing method
#64Microneedles
#65Enhanced control of shuttle mass motion in MEMS devices
#66Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#67Superhydrophobic and superoleophobic nanosurfaces
#68SILICON CARBIDE STRUCTURE, DEVICE, AND METHOD
#69Micro-electro-mechanical system (MEMS) structures and design structures
#70Micro-electro-mechanical system (MEMS) structures and design structures
#71Micro-electro-mechanical system (MEMS) structures and design structures
#72Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus
#73MEMS sensor, especially pressure sensor, for metrological registering of a measured variable
#74Field emission devices and methods of making thereof
#75Microstructure processing method and microstructure processing apparatus
#76Fabrication process for a symmetrical MEMS accelerometer
#77Plasma treatment method to meet line edge roughness and other integration objectives
#78MEMS anti-phase vibratory gyroscope
#79MEMS microphone having improved sensitivity and method for the production thereof
#80Block copolymer
#81Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#82Block copolymer
#83Block copolymer
#84Block copolymer
#85Block copolymer
#86Block copolymer
#87Block copolymer
#88Block copolymer
#89Monomer and block copolymer
#90Block copolymer
#91Block copolymer
#92Micro-electro-mechanical system (MEMS) structures and design structures
#93Micro-electro-mechanical system (MEMS) structures and design structures
#94Micro-Electro-Mechanical System (MEMS) structures and design structures
#95Method of fabricating MEMS devices using plasma etching and device therefor
#96PROCESS AND SYSTEM FOR THE SUBMICRON STRUCTURING OF A SUBSTRATE SURFACE
#97Microdevices and methods of manufacture
#98Reducing MEMS stiction by increasing surface roughness
#99Fabrication method of semiconductor piece
#100Silicon dioxide-polysilicon multi-layered stack etching with plasma etch chamber employing non-corrosive etchants
#101Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#102Atomic layer etch process using an electron beam
#103Fast atomic layer etch process using an electron beam
#104MEMS structure with improved shielding and method
#105APPARATUS AND METHOD TO FABRICATE MEMS DEVCE
#106DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME
#107Ultrasonic transducer, method of producing same, and ultrasonic probe using same
#108Methods and apparatus to reduce semiconductor wafer warpage in the presence of deep cavities
#109Methods for producing a cavity within a semiconductor substrate
#110MEMS pressure sensor and method of manufacturing the same
#111MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#112Micro-electro-mechanical system (MEMS) structures and design structures
#113Dicing method
#114Method for manufacturing a composite compensating balance spring
#115Method of manufacturing a MEMS structure and use of the method
#116Method of manufacturing a MEMS structure
#117Substrate etching method
#118Superhydrophobic films
#119Pressure difference sensor and method for its manufacture
#120MEMS device chip manufacturing method
#121Methods of forming a substrate opening
#122Semiconductor device and fabrication method
#123Method for the prevention of suspended silicon structure etching during reactive ion etching
#124Semiconductor device having a micro-mechanical structure
#125METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE
#126Wavelength tunable MEMS-Fabry Perot filter
#127Method for manufacturing a micromechanical component
#128Method for manufacturing a structured surface
#129Capacitive acceleration sensor with a bending elastic beam and preparation method thereof
#130New Lithographic Method
#131Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor
#132Method of patterning platinum layer
#133Inertial sensor and method of manufacturing the same
#134Reactive ion etching
#135PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#136MEMS structure with improved shielding and method
#137Substrate etching method and substrate processing device
#138Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate
#139Method for etching a complex pattern
#140Conductive transparent film and method for making same
#141MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE THEREOF
#142Control over ammonium fluoride levels in oxide etchant
#143Method for forming micro-electro-mechanical system (MEMS) beam structure
#144Semiconductor devices and methods for manufacturing semiconductor devices
#145ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME
#146Microprobe and microprobe manufacturing method
#147Plasma processing with preionized and predissociated tuning gases and associated systems and methods
#148ACOUSTIC SENSOR AND METHOD FOR MANUFACTURING SAME
#149Silicon dioxide-polysilicon multi-layered stack etching with plasma etch chamber employing non-corrosive etchants
#150Micro-electro-mechanical system based focusing device and manufacturing method thereof
#151Production process for a micromechanical component and micromechanical component
#152Method of forming fine pattern, and developer
#153Microdevices and methods of manufacture
#154Field emission devices and methods of making thereof
#155High temperature thermal annealing process
#156Thermal annealing process
#157Superhydrophobic and superoleophobic nanosurfaces
#158Nano/micro roller bearing having tolerance compensation function and method of manufacturing the same
#159Magnetic devices and methods of manufacturing the same
#160Superhydrophobic films
#161Particulate nanosorting stack
#162ULTRASONIC TRANSDUCER, METHOD OF PRODUCING SAME, AND ULTRASONIC PROBE USING SAME
#163Inertial sensor and method of manufacturing the same
#164Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component
#165Localized plasma processing
#166Method, apparatus and program for manufacturing silicon structure
#167Method and apparatus for etching
#168Process for the production of microelectromechanical systems
#169Equipment and methods for etching of MEMS
#170Method for etching a layer on a silicon semiconductor substrate
#171Micro-posts having improved uniformity and a method of manufacture thereof
#172Plasma processing with preionized and predissociated tuning gases and associated systems and methods
#173METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY
#174Reactive Ion Etching Process for Etching Metals
#175Dry etching method, fine structure formation method, mold and mold fabrication method
#176High resolution plasma etch
#177Method for Accelerated Etching of Silicon
#178Method for making a micro-fluid ejection device
#179Method for manufacturing a micro-electro-mechanical structure
#180Dry etching methods
#181Methods of forming oxide masks with submicron openings and microstructures formed thereby
#182Plasma processing method and high-rate plasma etching apparatus
#183Vapor HF etch process mask and method
#184Multiple layer etch stop and etching method
#185Method and system for xenon fluoride etching with enhanced efficiency
#186Localized plasma processing
#187Etching with electrostatically attracted ions
#188Conductive etch stop for etching a sacrificial layer
#189Method for making a micro-fluid ejection device
#190Dry etching method and photonic crystal device fabricated by use of the same
#191Methods and apparatus of etch process control in fabrications of microstructures
#192Method of fabricating structured membranes
#193Method for forming MEMS cavity structure
#194Graphoepitaxy directed self assembly
#195Etching technique for microfabrication substrates
#196MEMS rotary fuze architecture for out-of-line applications
#197Microfabricated ultrasonic transducers and related apparatus and methods
#198Dopant selective reactive ion etching of silicon carbide