Patents-Review.com
ClassID:

83981 ⎘

B81C1/00523 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate Etching material

Sub-classes:
Recent Application in this class:
#1
20260138865
2026-05-21

BUMPSTOP PROCESS FOR A MOTION SENSOR

 #2
20250240578
2025-07-24

MICRO-ELECTROMECHANICAL MICROPHONES AND METHODS OF FORMING THE SAME

 #3
20250236514
2025-07-24

CHEMICAL STOP STRUCTURES FOR MEMS DEVICES

 #4
20250178890
2025-06-05

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTODEFINABLE ORGANIC POLYMER SPACER LAYERS

 #5
20250053083
2025-02-13

MANUFACTURE OF SURFACE RELIEF STRUCTURES

 #6
20240199413
2024-06-20

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

 #7
20240101413
2024-03-28

SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES

 #8
20230400788
2023-12-14

CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY

 #9
20230339745
2023-10-26

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

 #10
20230324678
2023-10-12

Hermetically sealed MEMS mirror and method of manufacture

 #11
20230249963
2023-08-10

Micro-electromechanical system device including a precision proof mass element and methods for forming the same

 #12
20230127477
2023-04-27

Multi-level microelectromechanical system structure with non-photodefinable organic polymer spacer layers

 #13
20230016416
2023-01-19

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

 #14
20220342297
2022-10-27

Manufacture of surface relief structures

 #15
20220308705
2022-09-29

Copper-alloy capping layers for metallization in touch-panel displays

 #16
20220289565
2022-09-15

MEMS device having decreased contact resistance

 #17
20220267145
2022-08-25

Micro-electromechanical system device including a precision proof mass element and methods for forming the same

 #18
20220112078
2022-04-14

Micro-device structures with etch holes

 #19
20210396850
2021-12-23

Mirror assembly for light steering with reduced finger thickness

 #20
20210370449
2021-12-02

Method of fabricating a microscale canopy wick structure having enhanced capillary pressure and permeability

 #21
20210292161
2021-09-23

Methods for forming a MEMS device layer on an active device layer and devices formed thereby

 #22
20210210308
2021-07-08

Method and device for a carrier proximity mask

 #23
20210208738
2021-07-08

Copper-alloy capping layers for metallization in touch-panel displays

 #24
20210090858
2021-03-25

Method and device for a carrier proximity mask

 #25
20210020404
2021-01-21

Methods for tuning plasma potential using variable mode plasma chamber

 #26
20210017019
2021-01-21

Methods for producing thin-film layers and microsystems having thin-film layers

 #27
20200148531
2020-05-14

System and method for a mems transducer

 #28
20200144492
2020-05-07

Combined physical and chemical etch to reduce magnetic tunnel junction (MTJ) sidewall damage

 #29
20200131033
2020-04-30

Actuator layer patterning with topography

 #30
20200102209
2020-04-02

Sidewall stopper for MEMS device

 #31
20200033591
2020-01-30

Hermetically sealed MEMS mirror and method of manufacture

 #32
20190375629
2019-12-12

Process for manufacturing a microelectromechanical device having a suspended buried structure and corresponding microelectromechanical device

 #33
20190345025
2019-11-14

Method for manufacturing low contact resistance semiconductor structure

 #34
20190333773
2019-10-31

Method of etching microelectronic mechanical system features in a silicon wafer

 #35
20190310153
2019-10-10

Methods for fabricating pressure sensors with non-silicon diaphragms

 #36
20190287810
2019-09-19

Method of etching microelectronic mechanical system features in a silicon wafer

 #37
20190241431
2019-08-08

Methods for producing thin-film layers and microsystems having thin-film layers

 #38
20190185317
2019-06-20

Device comprising a micro-electro-mechanical system substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor substrate

 #39
20190055117
2019-02-21

Method for producing a MEMS sensor, and MEMS sensor

 #40
20180331279
2018-11-15

Combined physical and chemical etch to reduce magnetic tunnel junction (MTJ) sidewall damage

 #41
20180201500
2018-07-19

Low contact resistance semiconductor structure and method for manufacturing the same

 #42
20180179054
2018-06-28

Stress compensation for piezoelectric optical MEMS devices

 #43
20180175075
2018-06-21

Thin-film transistor and method of forming an electrode of a thin-film transistor

 #44
20180148324
2018-05-31

Method for forming micro-electro-mechanical system (MEMS) device structure

 #45
20180093884
2018-04-05

Method of manufacturing MEMS switches with reduced switching voltage

 #46
20180065847
2018-03-08

Method of manufacturing MEMS switches with reduced switching voltage

 #47
20180065846
2018-03-08

Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure

 #48
20180016138
2018-01-18

Methods of manufacturing for MEMS switches with reduced switching voltage

 #49
20180016137
2018-01-18

Methods of manufacture for MEMS switches with reduced switching voltage

 #50
20170294274
2017-10-12

Method of manufacturing a switch

 #51
20170217759
2017-08-03

Wafer level packaging of MEMS

 #52
20170174505
2017-06-22

Infrared sensor design using an epoxy film as an infrared absorption layer

 #53
20170115175
2017-04-27

Pressure sensor with support structure for non-silicon diaphragm

 #54
20170113927
2017-04-27

Methods for fabricating pressure sensors with non-silicon diaphragms

 #55
20160376145
2016-12-29

METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND A COMPONENT HAVING THIS MICROMECHANICAL STUCTURE

 #56
20160362513
2016-12-15

Additives for orientation control of block copolymers

 #57
20160304740
2016-10-20

Additives for orientation control of block copolymers

 #58
20160159091
2016-06-09

Method of manufacturing ink jet printheads including electrostatic actuators

 #59
20160152465
2016-06-02

MEMS capacitive pressure sensors

 #60
20160124214
2016-05-05

ELECTROMAGNETIC MEMS DEVICE

 #61
20160096729
2016-04-07

Photolithography Structures and Methods

 #62
20160052781
2016-02-25

Wafer level packaging of MEMS

 #63
20160043108
2016-02-11

Semiconductor Structure with Multiple Active Layers in an SOI Wafer

 #64
20150378127
2015-12-31

Stress compensation for piezoelectric optical MEMS devices

 #65
20150355458
2015-12-10

MICRO-MACHINED OPTICAL MIRROR SWITCH

 #66
20150345196
2015-12-03

MEMS hinges with enhanced rotatability

 #67
20150266724
2015-09-24

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

 #68
20150246810
2015-09-03

INFRARED SENSOR DESIGN USING AN EPOXY FILM AS AN INFRARED ABSORPTION LAYER

 #69
20150203350
2015-07-23

METHOD OF FABRICATING ISOLATING SEMICONDUCTOR STRUCTURES

 #70
20150181348
2015-06-25

Micro-electro-mechanical transducer having an optimized non-flat surface

 #71
20150180370
2015-06-25

Micro-electro-mechanical transducer having an optimized non-flat surface

 #72
20150175412
2015-06-25

Micro-electro-mechanical transducer having an optimized non-flat surface

 #73
20150125984
2015-05-07

Low frequency response microphone diaphragm structures and methods for producing the same

 #74
20150125003
2015-05-07

System and method for a MEMS transducer

 #75
20150084139
2015-03-26

Device, system and method for providing MEMS structures of a semiconductor package

 #76
20140362307
2014-12-11

Copper-alloy capping layers for metallization in touch-panel displays

 #77
20140340814
2014-11-20

MEMS variable capacitor with enhanced RF performance

 #78
20140332945
2014-11-13

Method of etching a wafer

 #79
20140332911
2014-11-13

Capacitive micro-machined transducer and method of manufacturing the same

 #80
20140326697
2014-11-06

Conductive transparent film and method for making same

 #81
20140310914
2014-10-23

MEMS hinges with enhanced rotatability

 #82
20140299472
2014-10-09

Systems and methods for an integrated bio-entity manipulation and processing semiconductor device

 #83
20140238952
2014-08-28

METHOD FOR MANUFACTURING THIN SUBSTRATE

 #84
20140224776
2014-08-14

Laser-induced gas plasma machining

 #85
20140203883
2014-07-24

RESONATOR, OSCILLATOR, AND METHOD FOR FABRICATING OSCILLATOR

 #86
20140126031
2014-05-08

Method for fabricating a self-aligned vertical comb drive structure

 #87
20140106454
2014-04-17

Method for producing three-dimensional monolithic microfluidic devices

 #88
20140057444
2014-02-27

Thermal detector

 #89
20140057382
2014-02-27

Methods for fabricating MEMS structures by etching sacrificial features embedded in glass

 #90
20140036342
2014-02-06

Electrical routing

 #91
20130334628
2013-12-19

Process for manufacturing electro-mechanical systems

 #92
20130306590
2013-11-21

Stable Cavity-Induced Two-Phase Heat Transfer in Silicon Microchannels

 #93
20130298671
2013-11-14

Flexure bearing to reduce quadrature for resonating micromachined devices

 #94
20130134530
2013-05-30

Method of fabricating isolating semiconductor structures using a layout of trenches and openings

 #95
20120223400
2012-09-06

Infrared sensor design using an epoxy film as an infrared absorption layer

 #96
20120119611
2012-05-17

Electrical routing

 #97
20120013218
2012-01-19

Micro-electro-mechanical transducer having an optimized non-flat surface

 #98
20110309486
2011-12-22

Method of etching and singulating a cap wafer

 #99
20110180712
2011-07-28

Method for manufacturing MEMS device, method for manufacturing thermal detector, thermal detector, thermal detection device, and electronic instrument

 #100
20110136284
2011-06-09

Micro-electro-mechanical transducer having a surface plate

 #101
20110084781
2011-04-14

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

 #102
20100207489
2010-08-19

MEMS ultrasonic device having a PZT and cMUT

 #103
20100093125
2010-04-15

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

 #104
20100013574
2010-01-21

Micro-electro-mechanical transducer having a surface plate

 #105
20090260961
2009-10-22

MEMS switches with reduced switching voltage and methods of manufacture

 #106
20090095708
2009-04-16

Method for manufacturing liquid discharge head

 #107
20080304681
2008-12-11

Microphone with aligned apertures

 #108
20080295996
2008-12-04

STABLE CAVITY-INDUCED TWO-PHASE HEAT TRANSFER IN SILICON MICROCHANNELS

 #109
14797958
2017-07-25

MEMS sensor