83983 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Etching material Wet etching
METHOD FOR FABRICATING AN ENCLOSURE OF A PHOTOACOUSTIC DETECTING DEVICE
#2PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
#3Systems, Devices, and/or Methods for Images
#4MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FORMING THE SAME
#5LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPARENT MATERIAL
#6MANUFACTURE OF SURFACE RELIEF STRUCTURES
#7A METHOD OF FABRICATING NANOPORES
#8METHOD FOR WAFER TREATMENT
#9SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD OF FABRICATING THE SAME
#10METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING
#11Systems, Devices, and/or Methods for Images
#12PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING
#13Compositions and methods for selectively etching silicon nitride films
#14Three-dimensional semiconductor fabrication
#15Manufacture of surface relief structures
#16METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MICROSTRUCTURES
#17Method for processing glass by alkaline etching
#18Systems, Devices, and/or Methods for Images
#19MEMS device, manufacturing method of the same, and integrated MEMS module using the same
#20Semiconductor ICF target processing
#21Method for Fabrication of a Suspended Elongated Structure by Etching or Dissolution Through Openings in a Layer
#22Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating
#23Device and method for direct printing of microfluidic chip based on large-format array femtosecond laser
#24Manufacturing method of micro fluid actuator
#25Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same
#26Support structure for MEMS device with particle filter
#27PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
#28Three-dimensional semiconductor fabrication
#29Support structure for MEMS device with particle filter
#30Method of manufacturing wiring board
#31INTEGRATED CIRCUIT PACKAGE ASSEMBLIES WITH HIGH-ASPECT RATIO METALLIZATION FEATURES
#32Method for manufacturing a plurality of resonators
#33Method of texturing semiconductor substrate, semiconductor substrate manufactured using the method, and solar cell including the semiconductor substrate
#34Wafer level method for manufacturing integrated infrared (IR) emitter elements having an optical IR filter placed on the main surface region of the carrier substrate on which the IR emitter is formed
#35Complementary metal-oxide-semiconductor (CMOS) micro electro-mechanical (MEMS) microphone and method for fabricating the same
#36Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production
#37Method for fabricating microfluidic devices in fused silica by picosecond laser irradiation
#38METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#39Fabrication process for a symmetrical MEMS accelerometer
#40Systems, devices, and/or methods for images
#41Method for producing a microstructure component, microstructure component and x-ray device
#42Vertically stacked nanofluidic channel array
#43Ultrasonic transducer and method for manufacturing the same, display substrate and method for manufacturing the same
#44Fabry-Perot interference filter having layer with thinned edge portion and production method for Fabry-Perot interference filter
#45Nanostructures fabricated by metal asisted chemical etching for antibactertial applications
#46Hermetically sealed molecular spectroscopy cell
#47Nanopatterned biosensor electrode for enhanced sensor signal and sensitivity
#48Production method for fabry-perot interference filter
#49Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#50Spectrally and temporally engineered processing using photoelectrochemistry
#51Method for protecting a MEMS unit against infrared investigations and MEMS unit
#52Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices
#53Field emission devices and methods of making thereof
#54Method for producing a rolled-up electrical or electronic component
#55Fabrication process for a symmetrical MEMS accelerometer
#56Desmear module of a horizontal process line and a method for separation method and removal of desmear particles from such a desmear module
#57Nanostructures fabricated by metal assisted chemical etching for antibacterial applications
#58Microelectronic interconnect element with decreased conductor spacing
#59Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#60Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates
#61Hermetic encapsulation for microelectromechanical systems (MEMS) devices
#62Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#63Island etched filter passages
#64Process for manufacturing a microelectromechanical interaction system for a storage medium
#65MEMS-BASED CANTILEVER ENERGY HARVESTER
#66Method for fabricating suspended MEMS structures
#67Nonparallel island etching
#68Microdevices and methods of manufacture
#69Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility
#70Spectrally and temporally engineered processing using photoelectrochemistry
#71MEMS microphone structure and method of manufacturing the same
#72Release chemical protection for integrated complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical (MEMS) devices
#73Semiconductor structures and fabrication methods thereof
#74APPARATUS AND METHOD TO FABRICATE MEMS DEVCE
#75Process for silicon nitride removal selective to SiGe
#76Membrane structures for microelectromechanical pixel and display devices and systems, and methods for forming membrane structures and related devices
#77Compact fluid analysis device and method to fabricate
#78Electronic part, electronic apparatus, and moving object
#79Method for manufacturing a composite compensating balance spring
#80Silicon etching liquid, silicon etching method, and microelectromechanical element
#81Package, electronic device, method of manufacturing electronic device, electronic apparatus, and mobile body
#82Hermetic encapsulation for microelectromechanical systems (MEMS) devices
#83MEMS device chip manufacturing method
#84Polymer anchored microelectromechanical system (MEMS) cantilever and method of fabricating the same
#85Compact fluid analysis device and method to fabricate
#86Microelectronic interconnect element with decreased conductor spacing
#87Vibration device including support portion
#88Method for manufacturing a MEMS device and MEMS device
#89Inertial sensor and method of manufacturing the same
#90Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate
#91Method for etching a complex pattern
#92Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same
#93Conductive transparent film and method for making same
#94MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE THEREOF
#95Method for handling a thin substrate and for substrate capping
#96Tunable Polish Rates By Varying Dissolved Oxygen Content
#97Stress-controlled formation of tin hard mask
#98MEMS device structure with a capping structure
#99Semi-aqueous polymer removal compositions with enhanced compatibility to copper, tungsten, and porous low-K dielectrics
#100ANALYTE SENSOR AND FABRICATION METHODS
#101Micro-electro-mechanical system based focusing device and manufacturing method thereof
#102MEMs-based cantilever energy harvester
#103Method of fabricating In-Plane Switching (IPS) screen electrode
#104Selectively etching of a polymer matrix on pet
#105Microdevices and methods of manufacture
#106Composition and process for selectively etching metal nitrides
#107Field emission devices and methods of making thereof
#108Method of making a microelectronic interconnect element with decreased conductor spacing
#109Structure and method for placement, sizing and shaping of dummy structures
#110Process for silicon nitride removal selective to SiGe
#111Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same
#112Method for handling a thin substrate and for substrate capping
#113Catalyst-aided chemical processing method
#114Particulate nanosorting stack
#115Tunable polish rates by varying dissolved oxygen content
#116Inertial sensor and method of manufacturing the same
#117Anti-glare surface treatment method and articles thereof
#118Structure and Method for Placement, Sizing and Shaping of Dummy Structures
#119Device made of single-crystal silicon
#120CATALYST-AIDED CHEMICAL PROCESSING METHOD
#121Silicon etching liquid and etching method
#122Methods and systems for metal-assisted chemical etching of substrates
#123Analyte sensor and fabrication methods
#124Laser patterning of glass bodies
#125Microelectronic interconnect element with decreased conductor spacing
#126Micro-posts having improved uniformity and a method of manufacture thereof
#127Microphone with backside cavity that impedes bubble formation
#128Structure and method for placement, sizing and shaping of dummy structures
#129Device made of single-crystal silicon
#130Process for manufacturing a microelectromechanical interaction system for a storage medium
#131Spin-on protective coatings for wet-etch processing of microelectronic substrates
#132Catalyst-aided chemical processing method
#133Anisotropic wet etching of silicon
#134Spin-on protective coatings for wet-etch processing of microelectronic substrates
#135Structure and method for placement, sizing and shaping of dummy structures
#136Concept for the wet-chemical removal of a sacrificial material in a material structure
#137Method of fine patterning a metal layer
#138Integrated chemical microreactor with large area channels and manufacturing process thereof
#139Spin-on protective coatings for wet-etch processing of microelectronic substrates
#140Structure and method for placement, sizing and shaping of dummy structures
#141Bipolar transistor type MEMS pressure sensor and preparation method thereof
#142Method for forming MEMS cavity structure
#143Enhanced microfabrication using electrochemical techniques
#144Etching technique for microfabrication substrates