83984 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Etching material Etching processes not provided for in groups -
MONOLITHIC SOUND TRANSDUCER AND ENVIRONMENTAL BARRIER
#2Copper-alloy capping layers for metallization in touch-panel displays
#3HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
#4Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor
#5Method for ablating or roughening wafer surfaces
#6Method for manufacturing an etch stop layer and MEMS sensor comprising an etch stop layer
#7Copper-alloy capping layers for metallization in touch-panel displays
#8Laser-assisted material phase-change and expulsion micro-machining process
#9INERTIAL SENSOR
#10Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve electrode gap
#11Actuator layer patterning with topography
#12Actuator layer patterning with topography
#13High-volume millimeter scale manufacturing
#14MEMS strain gauge sensor and manufacturing method
#15Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve tunneling electrode gap
#16Thin-film transistor and method of forming an electrode of a thin-film transistor
#17Device manufacturing method and device manufacturing apparatus
#18CMUT device and manufacturing method
#19Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#20Stress relief MEMS structure and package
#21Inertial sensor with nested seismic masses and method for manufacturing such a sensor
#22Stress relief MEMS structure and package
#23Integration of pressure sensors into integrated circuit fabrication and packaging
#24Magnet placement for integrated sensor packages
#25Integration of pressure or inertial sensors into integrated circuit fabrication and packaging
#26Copper-alloy capping layers for metallization in touch-panel displays
#27METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE BODY
#28ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING
#29METHOD OF MANUFACTURING BASE BODY HAVING MICROSCOPIC HOLE, AND BASE BODY
#30Methods, systems and devices for forming nanochannels
#31Angle control of multi-cavity molded components for MEMS and NEMS group assembly
#32System and methods for preparing freestanding films using laser-assisted chemical etch, and freestanding films formed using same
#33Systems and methods for preparing freestanding films using laser-assisted chemical etch, and freestanding films formed using same
#34Semiconductor device and manufacturing method thereof
#35STRUCTURE FOR DECREASING MINIMUM FEATURE SIZE IN AN INTEGRATED CIRCUIT
#36ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS GROUP ASSEMBLY
#37Method of processing substrates
#38METHOD OF CREATING SOLID OBJECT FROM A MATERIAL AND APPARATUS THEREOF
#39MEMS device including a laterally movable portion with piezo-resistive sensing elements and electrostatic actuating elements on trench side walls, and methods for producing the same
#40Double-sided etching method using embedded alignment mark
#41METHOD FOR FABRICATING MICROSTRUCTURE AND A MICROSTRUCTURE FORMED USING THE METHOD
#42Semiconductor device and manufacturing method thereof
#43Structure for decreasing minimum feature size in an integrated circuit
#44Method of strengthening a microscale chamber formed over a sacrificial layer
#45Micro corner cube array, method of making the micro corner cube array, and display device
#46Method of making comb-teeth electrode pair
#47Etching Apparatus and Process with Thickness and Uniformity Control
#48METHODS FOR FORMING THIN OXIDE LAYERS ON SEMICONDUCTOR WAFERS
#49Microelectromechanical devices and their fabrication
#50Surface and composition enhancements to high aspect ratio C-MEMS
#51Method for fabricating microstructure and microstructure
#52System and methods for etching a silicon wafer using HF and ozone
#53Equipment and process for creating a custom sloped etch in a substrate
#54Controlled dry etch of a film
#55Etching method
#56Method for making a microstructure by surface micromachining
#57Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
#58Controlled dry etch of a film
#59Etching process for micromachining crystalline materials and devices fabricated thereby