83991 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity Aligning features and geometries on both sides of a substrate, e.g. when double side etching
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
#2Micro-electro-mechanical systems micromirrors and micromirror arrays
#3Micro-electro-mechanical systems micromirrors and micromirror arrays
#4Method for manufacturing an opening structure and opening structure
#5Method of etching microelectronic mechanical system features in a silicon wafer
#6Method of etching microelectronic mechanical system features in a silicon wafer
#7Flexible strip for horology and method for manufacturing the same
#8Manufacturing method of a multi-level micromechanical structure on a single layer of homogenous material
#9Microfabricated gas flow structure
#10Semiconductor device
#11Method for manufacturing electronic component
#12Method for manufacturing an opening structure and opening structure
#13MOEMS apparatus and a method for manufacturing same
#14Method for fabricating a self-aligned vertical comb drive structure
#15SOI wafer and method of manufacturing the same
#16MOEMS apparatus and a method for manufacturing same
#17MOEMS apparatus and a method for manufacturing same
#18Method and device for wafer backside alignment overlay accuracy
#19Method of performing a double-sided process
#20Method and system for wafer backside alignment
#21Method of performing a double-sided process
#22METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER