83985 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
Sub-classes:MANUFACTURE OF SURFACE RELIEF STRUCTURES
#2PROCESS FOR MANUFACTURING A THREE-DIMENSIONAL STRUCTURE IN BENDING
#3HIGH-ASPECT RATIO METALLIZED STRUCTURES
#4MICRO-DEVICE STRUCTURES WITH ETCH HOLES
#5Optical device production method
#6Optical device production method
#7HIGH-ASPECT RATIO METALLIZED STRUCTURES
#8Manufacture of surface relief structures
#9Stretchable substrate and method of manufacturing the same
#10Micro-device structures with etch holes
#11Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor
#12Optical device production method
#13Optical device
#14Manufacturing method of micro-nano structure antireflective coating layer and display apparatus thereof
#15Cavity forming method for a sensor chip, manufacturing method thereof, chip and electronics apparatus
#16Method for manufacturing doubly re-entrant microstructures
#17MEMS structure with an etch stop layer buried within inter-dielectric layer
#18Etching method for forming a carrier having inward side walls in particular for confining a droplet for capillary self-assembly
#19Aluminum nitride (AlN) devices with infrared absorption structural layer
#20Dopant selective reactive ion etching of silicon carbide