83993 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate; Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity Forming high aspect ratio structures having deep steep walls
METHOD FOR PRODUCING A MICROMECHANICAL LAYER STRUCTURE WITH HIGH ASPECT RATIO AND MICROMECHANICAL LAYER STRUCTURE
#2ETCHING METHOD
#3METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
#4METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR DEVICE
#5Etching method
#6System and method for fabricating photonic device elements
#7Method for manufacturing semiconductor substrate, method for manufacturing damascene wiring structure, semiconductor substrate, and damascene wiring structure
#8Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#9MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
#10Method for manufacturing micromechanical structures in a device wafer
#11Fence structure to prevent stiction in a MEMS motion sensor
#12Method of fabricating semiconductor structure
#13Component especially for horology with surface topology and method for manufacturing the same
#14MEMS microphone and manufacturing method for making same
#15Planar cavity MEMS and related structures, methods of manufacture and design structures
#16Narrow gap device with parallel releasing structure
#17Narrow gap device with parallel releasing structure
#18Planar cavity MEMS and related structures, methods of manufacture and design structures
#19Planar cavity mems and related structures, methods of manufacture and design structures
#20Planar cavity MEMS and related structures, methods of manufacture and design structures
#21Planar cavity MEMS and related structures, methods of manufacture and design structures
#22Planar cavity MEMS and related structures, methods of manufacture and design structures
#23Planar cavity MEMS and related structures, methods of manufacture and design structures
#24Inertial sensor, method for manufacturing inertial sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#25Planar cavity MEMS and related structures, methods of manufacture and design structures
#26Method of fabricating semiconductor structure
#27Fence structure to prevent stiction in a MEMS motion sensor
#28Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof
#29Method for manufacturing micromechanical structures in a device wafer
#30Planar cavity MEMS and related structures, methods of manufacture and design structures
#31Planar cavity MEMS and related structures, methods of manufacture and design structures
#32Planar cavity MEMS and related structures, methods of manufacture and design structures
#33Planar cavity MEMS and related structures, methods of manufacture and design structures
#34Semiconductor device, microphone and method for producing a semiconductor device
#35Microscale metallic CNT templated devices and related methods
#36Planar cavity MEMS and related structures, methods of manufacture and design structures
#37Planar cavity MEMS and related structures, methods of manufacture and design structures
#38Planar cavity MEMS and related structures, methods of manufacture and design structures
#39Material structure and method for deep silicon carbide etching
#40Planar cavity MEMS and related structures, methods of manufacture and design structures
#41Planar cavity MEMS and related structures, methods of manufacture and design structures
#42Planar cavity MEMS and related structures, methods of manufacture and design structures
#43Small wafer are MEMS switch
#44Small wafer area MEMs switch
#45Method for processing silicon substrate and method for manufacturing liquid ejection head
#46Simplified MEMS device fabrication process
#47Small wafer area MEMS switch
#48Planar cavity MEMS and related structures, methods of manufacture and design structures
#49DEVICE AND METHOD FOR PRODUCING A DEVICE COMPRISING MICRO OR NANOSTRUCTURES
#50MEMS-based method for manufacturing sensor
#51Planar cavity MEMS and related structures, methods of manufacture and design structures
#52Micromechanical component with a reduced contact surface and its fabrication method
#53Planar cavity MEMS and related structures, methods of manufacture and design structures
#54DEVICES WITH THINNED WAFER
#55Planar cavity MEMS and related structures, methods of manufacture and design structures
#56Planar cavity MEMS and related structures, methods of manufacture and design structures
#57Planar cavity MEMS and related structures, methods of manufacture and design structures
#58High aspect ratio etch without upper widening
#59Planar cavity MEMS and related structures, methods of manufacture and design structures
#60Microstructure manufacturing method
#61Fabrication method of semiconductor piece
#62Planar cavity MEMS and related structures, methods of manufacture and design structures
#63Planar cavity MEMS and related structures, methods of manufacture and design structures
#64Planar cavity MEMS and related structures, methods of manufacture and design structures
#65Planar cavity MEMS and related structures, methods of manufacture and design structures
#66Method and structure for creating cavities with extreme aspect ratios
#67Planar cavity MEMS and related structures, methods of manufacture and design structures
#68Planar cavity MEMS and related structures, methods of manufacture and design structures
#69Method for producing a micromechanical component, and corresponding micromechanical component
#70Precise definition of transducer electrodes
#71Methods for producing a cavity within a semiconductor substrate
#72Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof
#73Planar cavity MEMS and related structures, methods of manufacture and design structures
#74Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials
#75Reactive ion etching
#76Narrow gap device with parallel releasing structure
#77Method for etching a complex pattern
#78Method for manufacturing micro-structure
#79Planar cavity MEMS and related structures, methods of manufacture and design structures
#80Production process for a micromechanical component and micromechanical component
#81Method of silicon etch for trench sidewall smoothing
#82Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness
#83Microscale metallic CNT templated devices and related methods
#84Methods for producing a cavity within a semiconductor substrate
#85Method for achieving smooth side walls after Bosch etch process
#86Planar cavity MEMS and related structures, methods of manufacture and design structures
#87High aspect ratio MEMS devices and methods for forming the same
#88Electromagnetic wave oscillator having multi-tunnel and electromagnetic wave generating apparatus including the electromagnetic wave oscillator
#89Method for producing a MEMS apparatus with a high aspect ratio, and converter and capacitor
#90Methods for etching a substrate
#91MEMS process method for high aspect ratio structures
#92Planar cavity MEMS and related structures, methods of manufacture and design structures
#93Planar cavity MEMS and related structures, methods of manufacture and design structures
#94Planar cavity MEMS and related structures, methods of manufacture and design structures
#95Planar cavity MEMS and related structures, methods of manufacture and design structures
#96Planar cavity MEMS and related structures, methods of manufacture and design structures
#97Methods of manufacture for micro-electro-mechanical system (MEMS)
#98Planar cavity MEMS and related structures, methods of manufacture and design structures
#99Planar cavity MEMS and related structures, methods of manufacture and design structures
#100Method of manufacturing a micro-electro-mechanical system (MEMS)
#101Structuring three-dimensional components with non-diffusing noble or special metals and their alloys, with use being made of sputter technology
#102Method for manufacturing micro-structure
#103Robust high aspect ratio semiconductor device
#104Microstructure manufacturing method
#105Microelectromechanical system device and method of manufacturing the microelectromechanical system device
#106Method, apparatus and program for manufacturing silicon structure
#107Device made of single-crystal silicon
#108Method of manufacturing an electronic device
#109Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same
#110Process for structuring silicon
#111Method of fabricating micro-vertical structure
#112Method and system for etching a MEM device
#113Trench depth monitor for semiconductor manufacturing
#114Device made of single-crystal silicon
#115Deep anisotropic silicon etch method
#116Fabricating tall micro structures
#117High-aspect-ratio metal-polymer composite structures for nano interconnects
#118Method of manufacturing a mirror and a mirror device
#119Creating novel structures using deep trenching of oriented silicon substrates
#120Methods for nanoscale structures from optical lithography and subsequent lateral growth
#121Methods of and apparatus for making high aspect ratio microelectromechanical structures
#122Multiple layer etch stop and etching method
#123Method of manufacturing a thin-film circuit substrate having penetrating structure, and protecting adhesive tape
#124Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes
#125High-aspect-ratio metal-polymer composite structures for nano interconnects
#126Dry etching method and photonic crystal device fabricated by use of the same
#127Fabrication of MEMS devices with spin-on glass
#128Methods of forming oxide masks with submicron openings and microstructures formed thereby
#129Method and device for anisotropic etching of high aspect ratio
#130Fabrication method for microstructures with high aspect ratios
#131Microscale compression molding of metals with surface engineered LIGA inserts
#132Method for manufacturing movable portion of semiconductor device
#133Method for nanomachining high aspect ratio structures
#134Deep trench etching using HDP chamber
#135Microscale metallic CNT templated devices and related methods
#136Method to taylor mechanical properties on MEMS devices and nano-devices with multiple layer photoimageable dry film